JPS56145327A - Pressure transducer - Google Patents

Pressure transducer

Info

Publication number
JPS56145327A
JPS56145327A JP4975980A JP4975980A JPS56145327A JP S56145327 A JPS56145327 A JP S56145327A JP 4975980 A JP4975980 A JP 4975980A JP 4975980 A JP4975980 A JP 4975980A JP S56145327 A JPS56145327 A JP S56145327A
Authority
JP
Japan
Prior art keywords
thermal dependency
diaphragm part
intermediary
resistors
inputted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4975980A
Other languages
Japanese (ja)
Other versions
JPS5941134B2 (en
Inventor
Yoshihiro Shigeta
Masaru Okumura
Teizo Takahama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP4975980A priority Critical patent/JPS5941134B2/en
Publication of JPS56145327A publication Critical patent/JPS56145327A/en
Publication of JPS5941134B2 publication Critical patent/JPS5941134B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE:To reduce thermal dependency in a wide range by providing a temperature-compensation resisting region in the pressure-insensitive part of a semiconductor piece constituting a bridge circuit as a strain gage. CONSTITUTION:A thin diaphragm part 12 is formed in the central part of an N type silicon plate 11 200mum thick and P-type high impurity-concentration regions 13 and 14 are formed on the diaphragm part and outside the diaphragm part. The P- type region 13 is connected in a bridge 1 and the output thereof is inputted, through the intermediary of two operational amplifiers and resistors, to the minus terminal of an operational amplifier 4 to the plus terminal of which the partial voltage generated by resistors R6 and R7 is inputted through the intermediary of a resistor R8. Furthermore, since the P-type region 14 is inserted as a feedback circuit, together with a fixed resistor R10, into the minus input terminal of an output operation amplifier 4, the thermal dependency of the bridge circuit is turned to be the same with the thermal dependency of the feedback circuit and thus the pressure transducer with little thermal dependency can be obtained.
JP4975980A 1980-04-15 1980-04-15 pressure transducer Expired JPS5941134B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4975980A JPS5941134B2 (en) 1980-04-15 1980-04-15 pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4975980A JPS5941134B2 (en) 1980-04-15 1980-04-15 pressure transducer

Publications (2)

Publication Number Publication Date
JPS56145327A true JPS56145327A (en) 1981-11-12
JPS5941134B2 JPS5941134B2 (en) 1984-10-04

Family

ID=12840106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4975980A Expired JPS5941134B2 (en) 1980-04-15 1980-04-15 pressure transducer

Country Status (1)

Country Link
JP (1) JPS5941134B2 (en)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS578425A (en) * 1980-06-18 1982-01-16 Mitsubishi Electric Corp Pressure detector
JPS58120142A (en) * 1982-01-04 1983-07-16 ハネウエル・インコ−ポレ−テツド Semiconductor pressure converter
JPS58123780A (en) * 1982-01-20 1983-07-23 Hitachi Ltd Transducer for strain gage of semiconductor
JPS5935481A (en) * 1982-08-23 1984-02-27 Mitsubishi Electric Corp Pressure detector
JPS6097230A (en) * 1983-11-01 1985-05-31 Nec Corp Pressure converter
JPS6097231A (en) * 1983-11-01 1985-05-31 Nec Corp Pressure converter
JPS60152913A (en) * 1984-01-20 1985-08-12 Nec Corp Pressure converter
JPS60201228A (en) * 1984-03-27 1985-10-11 Yokogawa Hokushin Electric Corp Pressure sensor
JPS60201227A (en) * 1984-03-26 1985-10-11 Yokogawa Hokushin Electric Corp Pressure sensor
JPS60205329A (en) * 1984-03-30 1985-10-16 Yokogawa Hokushin Electric Corp Pressure sensor
JPS60253279A (en) * 1984-05-29 1985-12-13 Toyota Central Res & Dev Lab Inc Measuring instrument for strain in semiconductor
JPS60259922A (en) * 1984-06-05 1985-12-23 Sumitomo Electric Ind Ltd Strain sensor
JPH02218171A (en) * 1989-02-17 1990-08-30 Mitsubishi Electric Corp Semiconductor pressure sensor
JPH042170A (en) * 1990-04-18 1992-01-07 Mitsubishi Electric Corp Temperature compensation method for span voltage of semiconductor diffused resistor type of pressure sensor
JPH04113239A (en) * 1990-09-03 1992-04-14 Hitachi Ltd Composite function type sensor
JPH04212032A (en) * 1990-03-19 1992-08-03 Hitachi Ltd Compound sensor and compound transmitter and plant system using it
EP1286148A1 (en) * 2001-02-08 2003-02-26 TGK CO., Ltd. Method for adjusting pressure sensor

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002236070A (en) * 2001-02-07 2002-08-23 Tgk Co Ltd Pressure sensor
JP4045979B2 (en) 2003-02-26 2008-02-13 株式会社デンソー Pressure detection device

Cited By (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS578425A (en) * 1980-06-18 1982-01-16 Mitsubishi Electric Corp Pressure detector
JPH0313537B2 (en) * 1980-06-18 1991-02-22 Mitsubishi Electric Corp
JPH029704B2 (en) * 1982-01-04 1990-03-05 Honeywell Inc
JPS58120142A (en) * 1982-01-04 1983-07-16 ハネウエル・インコ−ポレ−テツド Semiconductor pressure converter
JPS58123780A (en) * 1982-01-20 1983-07-23 Hitachi Ltd Transducer for strain gage of semiconductor
JPH0414512B2 (en) * 1982-01-20 1992-03-13 Hitachi Ltd
JPS5935481A (en) * 1982-08-23 1984-02-27 Mitsubishi Electric Corp Pressure detector
JPH043493B2 (en) * 1982-08-23 1992-01-23
JPS6097230A (en) * 1983-11-01 1985-05-31 Nec Corp Pressure converter
JPS6097231A (en) * 1983-11-01 1985-05-31 Nec Corp Pressure converter
JPS60152913A (en) * 1984-01-20 1985-08-12 Nec Corp Pressure converter
JPH0542607B2 (en) * 1984-03-26 1993-06-29 Yokogawa Electric Corp
JPS60201227A (en) * 1984-03-26 1985-10-11 Yokogawa Hokushin Electric Corp Pressure sensor
JPH0542609B2 (en) * 1984-03-27 1993-06-29 Yokogawa Electric Corp
JPS60201228A (en) * 1984-03-27 1985-10-11 Yokogawa Hokushin Electric Corp Pressure sensor
JPS60205329A (en) * 1984-03-30 1985-10-16 Yokogawa Hokushin Electric Corp Pressure sensor
JPH0542612B2 (en) * 1984-03-30 1993-06-29 Yokogawa Electric Corp
JPS60253279A (en) * 1984-05-29 1985-12-13 Toyota Central Res & Dev Lab Inc Measuring instrument for strain in semiconductor
JPH0337750B2 (en) * 1984-05-29 1991-06-06 Toyoda Chuo Kenkyusho Kk
JPH0546488B2 (en) * 1984-06-05 1993-07-14 Sumitomo Electric Industries
JPS60259922A (en) * 1984-06-05 1985-12-23 Sumitomo Electric Ind Ltd Strain sensor
JPH02218171A (en) * 1989-02-17 1990-08-30 Mitsubishi Electric Corp Semiconductor pressure sensor
JPH04212032A (en) * 1990-03-19 1992-08-03 Hitachi Ltd Compound sensor and compound transmitter and plant system using it
JPH042170A (en) * 1990-04-18 1992-01-07 Mitsubishi Electric Corp Temperature compensation method for span voltage of semiconductor diffused resistor type of pressure sensor
JPH04113239A (en) * 1990-09-03 1992-04-14 Hitachi Ltd Composite function type sensor
EP1286148A1 (en) * 2001-02-08 2003-02-26 TGK CO., Ltd. Method for adjusting pressure sensor
US6889554B2 (en) 2001-02-08 2005-05-10 Tgk Co., Ltd. Method of adjusting pressure sensor
EP1286148A4 (en) * 2001-02-08 2008-05-07 Tgk Co Ltd Method for adjusting pressure sensor

Also Published As

Publication number Publication date
JPS5941134B2 (en) 1984-10-04

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