JPS60200319A - 炉温度制御装置 - Google Patents

炉温度制御装置

Info

Publication number
JPS60200319A
JPS60200319A JP5581184A JP5581184A JPS60200319A JP S60200319 A JPS60200319 A JP S60200319A JP 5581184 A JP5581184 A JP 5581184A JP 5581184 A JP5581184 A JP 5581184A JP S60200319 A JPS60200319 A JP S60200319A
Authority
JP
Japan
Prior art keywords
control
fuel
zone
amount
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5581184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332606B2 (pm
Inventor
Kenzo Yonezawa
憲造 米沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP5581184A priority Critical patent/JPS60200319A/ja
Publication of JPS60200319A publication Critical patent/JPS60200319A/ja
Publication of JPH0332606B2 publication Critical patent/JPH0332606B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1917—Control of temperature characterised by the use of electric means using digital means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Regulation And Control Of Combustion (AREA)
  • Control Of Heat Treatment Processes (AREA)
  • Feedback Control In General (AREA)
  • Control Of Temperature (AREA)
JP5581184A 1984-03-23 1984-03-23 炉温度制御装置 Granted JPS60200319A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5581184A JPS60200319A (ja) 1984-03-23 1984-03-23 炉温度制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5581184A JPS60200319A (ja) 1984-03-23 1984-03-23 炉温度制御装置

Publications (2)

Publication Number Publication Date
JPS60200319A true JPS60200319A (ja) 1985-10-09
JPH0332606B2 JPH0332606B2 (pm) 1991-05-14

Family

ID=13009309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5581184A Granted JPS60200319A (ja) 1984-03-23 1984-03-23 炉温度制御装置

Country Status (1)

Country Link
JP (1) JPS60200319A (pm)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03201012A (ja) * 1989-12-28 1991-09-02 Tokyo Erekutoron Kyushu Kk レジスト処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03201012A (ja) * 1989-12-28 1991-09-02 Tokyo Erekutoron Kyushu Kk レジスト処理装置

Also Published As

Publication number Publication date
JPH0332606B2 (pm) 1991-05-14

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