JPS60200112A - 光学的形状誤差検出法 - Google Patents

光学的形状誤差検出法

Info

Publication number
JPS60200112A
JPS60200112A JP59055750A JP5575084A JPS60200112A JP S60200112 A JPS60200112 A JP S60200112A JP 59055750 A JP59055750 A JP 59055750A JP 5575084 A JP5575084 A JP 5575084A JP S60200112 A JPS60200112 A JP S60200112A
Authority
JP
Japan
Prior art keywords
light
hologram
inspected
wave
shape error
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59055750A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0217044B2 (en, 2012
Inventor
Toshio Honda
本田　捷夫
Junpei Tsujiuchi
辻内　順平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TPR Osaka Seimitsu Kikai Co Ltd
Original Assignee
Osaka Seimitsu Kikai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Seimitsu Kikai Co Ltd filed Critical Osaka Seimitsu Kikai Co Ltd
Priority to JP59055750A priority Critical patent/JPS60200112A/ja
Priority to US06/713,531 priority patent/US4657396A/en
Publication of JPS60200112A publication Critical patent/JPS60200112A/ja
Publication of JPH0217044B2 publication Critical patent/JPH0217044B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP59055750A 1984-03-23 1984-03-23 光学的形状誤差検出法 Granted JPS60200112A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP59055750A JPS60200112A (ja) 1984-03-23 1984-03-23 光学的形状誤差検出法
US06/713,531 US4657396A (en) 1984-03-23 1985-03-19 Optical method for detecting errors in shape

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59055750A JPS60200112A (ja) 1984-03-23 1984-03-23 光学的形状誤差検出法

Publications (2)

Publication Number Publication Date
JPS60200112A true JPS60200112A (ja) 1985-10-09
JPH0217044B2 JPH0217044B2 (en, 2012) 1990-04-19

Family

ID=13007527

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59055750A Granted JPS60200112A (ja) 1984-03-23 1984-03-23 光学的形状誤差検出法

Country Status (2)

Country Link
US (1) US4657396A (en, 2012)
JP (1) JPS60200112A (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6374526U (en, 2012) * 1986-10-31 1988-05-18
JPH01116403A (ja) * 1987-10-30 1989-05-09 Osaka Seimitsu Kikai Kk 被検面の形状誤差の光学的検出方法と装置

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6041271A (en) * 1991-10-10 2000-03-21 Finn-Power International, Inc. Apparatus to determine the operational effectiveness of a machine tool and method therefor
JP4105256B2 (ja) * 1997-07-29 2008-06-25 株式会社ナノシステムソリューションズ 光照射装置及び表面検査装置
US6870611B2 (en) 2001-07-26 2005-03-22 Orbotech Ltd. Electrical circuit conductor inspection
US6654115B2 (en) 2001-01-18 2003-11-25 Orbotech Ltd. System and method for multi-dimensional optical inspection
HU229699B1 (hu) * 2007-05-23 2014-05-28 Mta Termeszettudomanyi Kutatokoezpont Mta Ttk Pinhole kamerát alkalmazó, leképzõ optikai vizsgálóberendezés (reflektométer, polariméter, ellipszométer)
CN100557382C (zh) * 2007-12-07 2009-11-04 保定惠阳航空螺旋桨制造厂 一种斜齿轮齿形误差的三坐标测量方法
DE102012105571B4 (de) * 2012-06-26 2017-03-09 Ovd Kinegram Ag Dekorelement sowie Sicherheitsdokument mit einem Dekorelement

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3748048A (en) * 1971-11-01 1973-07-24 Gen Motors Corp Method of detecting changes of a specular surface
US4053228A (en) * 1975-12-12 1977-10-11 Michael Schiller Finger identification
US4215939A (en) * 1977-12-22 1980-08-05 Owens-Illinois, Inc. Glue drop detector
JPS6049841B2 (ja) * 1980-07-16 1985-11-05 室蘭工業大学長 光学式非接触型検出装置
US4563095A (en) * 1982-12-20 1986-01-07 Essex Group, Inc. Method and apparatus for monitoring the surface of elongated objects

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6374526U (en, 2012) * 1986-10-31 1988-05-18
JPH01116403A (ja) * 1987-10-30 1989-05-09 Osaka Seimitsu Kikai Kk 被検面の形状誤差の光学的検出方法と装置

Also Published As

Publication number Publication date
JPH0217044B2 (en, 2012) 1990-04-19
US4657396A (en) 1987-04-14

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term