JPS60198579A - Semiconductor display - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an insulated field effect semiconductor device (hereinafter referred to as I
The present invention relates to an active matrix type flat display device, particularly a color display device, which controls and displays each of a group of picture elements arranged in a matrix using a GF (referred to as GF).

This invention is based on a liquid crystal (LC) having a function of controlling the amount of light transmitted.
(referred to as D) and electrochromic (referred to as ECU), electroluminescence (ECU) that emits light by itself.
It is possible to control each picture element as an active element by using a semiconductor device, especially an IGF, which applies a voltage or current to each picture element and controls the presence or absence of an electric signal. The purpose is

Conventionally, in such a semiconductor display device, the matrix circuit is shown in FIG.
(Here, it is assumed to be an LCD) are connected in series, and this IGF
The gate electrode was arranged in the X direction, and the source and drain were arranged in the Y direction.

However, the side of the LCD that is not connected to the IGF is simply all held at a common ground level, and that voltage level is only common to all elements.

For this reason, the counter electrode (3) of this LCD was simply provided with a CTF (transparent conductive film) on the entire surface of the inside of the substrate facing the substrate on which the IGF was provided.

A flat display device with such a structure allows RGB
In order to form pairs of the three primary colors (red, green, and blue), three times as many active elements as in a monochrome display device are required.

Furthermore, the number of picture elements is 525 x 640 for three times this integration.
(total of 330 elements), and the degree of integration was such that it was completely impossible to put it to practical use.

The present invention eliminates such drawbacks, and the process that requires precise patterning of IGF (generally using 6 to 8 masks) is performed on one substrate, and the wiring for color discrimination and its peripheral circuitry are placed on the other side. This is provided on the board side of the board.

and CTF, which is the electrode of the picture element connected to one IGF.
is one, but since the other electrode, CTF, which is the other electrode opposing this CTP, is provided with RGB, there are three. As a result, in terms of manufacturing, the final finished product can be made by first manufacturing each of the two independent substrates, inspecting their quality, and then superimposing the non-defective products of each product. As a result, it has the great feature that the yield of semiconductor display devices can be greatly improved.

The present invention will be described in more detail below with reference to the drawings.

FIG. 2 is a circuit diagram of the present invention, which corresponds to the conventional invention shown in FIG. For simplicity, the drawing shows a 3X3 (3X3X3 if RGB is divided) matrix arrangement.

That is, although there are 27 independent picture elements, only 9 JGFs are needed in the matrix, which is a great feature. Furthermore, the plan view and longitudinal cross-sectional view of the actual picture element group are shown in Figure 4.
As shown in FIG. 5, counter electrodes (3>, <3 t), (
The spacing between the electrodes at 3″>, i.e. (3>, (3t), (3
It can be seen that the distance between the two (FIG. 4(B)<31) may be 5 to 10 microns. Wiring (5) provided for these IGFs,
(5">, (5 pieces are 50 to 100μ, so it may be difficult for the user to view the panel,
This method also has the advantage of being able to reduce the number of medium-wide lines to 1/3 compared to conventional methods. As a result, it was found that the product did not cause discomfort to the user.

In Figure 2, the active element is one IGF.
The source or drain of (2) and the display element (LCD here) connected to one of the sources or drains of (1), <12>(
1'). Furthermore, the other one is connected to the lead (5) in the Y direction in FIG.
4'>(Connected into 4.

In addition, the counter electrodes (3) and <3'> of the display element (the three are independent, and are connected to the counter electrodes of the display elements arranged in a matrix in the Y direction in FIG. 9).

In the drawing, one board has decoders (7) and (8>
, IGF (1) and one electrode of the display element are provided, and separated into three on the other substrate side (and separated in the X direction,
Connected in the Y direction or diagonally.

In FIG. 2, electrodes and leads for RGB are connected in the Y direction, and these are connected to a color classification control circuit (decoder) 9).

In the circuit shown in Figure 2, the charge accumulated in the electrode of the display element is
Parasitic capacitance (44) between the gate electrode and the structure shown in the figure
occurs. Therefore, the frequency characteristics become slow. As a result, this circuit uses an LC that does not require high frequency characteristics.
Preferably, D is used in the display element.

FIG. 3 is similar to FIG. 2, but counter electrodes (3), <3'), (3'') of the display element are connected in the X direction.

Other details are the same as in FIG. 2.

In FIG. 3, (11), (
12), < 13) ... (11"), (12
(This corresponds to 13 arranged horizontally.Then, the parasitic capacitance (40)<41) becomes large, but it becomes small between the gate electrodes. For this reason, the circuit of FIG. 3 is advantageous when the display element is provided with an EL that generates various colors by changing the frequency.

4 and 5 show a plan view and a longitudinal sectional view of the semiconductor display device of the present invention.

The circuit configuration of this drawing corresponds to the structure of FIG. 2.

In the drawing, an IG is placed on a substrate (25) having an insulating surface.
F (2) has two IGFs (2>, <2°>) arranged in parallel in a pair.
In addition to being important for reducing the driving stress of the GF, even if one IGf develops a short or open failure,
The IGF is removed by a laser trimming method to provide redundancy in which only the other IGF drives the display element.

Regarding this vertical channel type IGF, FIG. 4(B) shows a vertical cross-sectional view taken along A-^'' in FIG. 4(A>).

In the drawing, the lower electrode (14) of the IGF (2) is connected to the electrode (22) of the display element (1);
) as a stack having the same shape as the source or drain (15) (thickness 500-3000), stack (1
6X thickness 0.5-5μ) (Actually, silicon nitride film was used)
, drain or source (17>(thickness 500-300
0λ), an electrode (18>(thickness 1
Insulation between 000 and 5000 people! 1i(19)(0,
5 to 3μ) (actually using PIQ). Furthermore, a non-single-crystal semiconductor (including an amorphous structure) (21) to which hydrogen or a halogen element (preferably fluorine) has been added covers these laminates with a thickness of 0.1 to 0.4 μm. ing.

This semiconductor (21) is in ohmic contact with the layer (15), <17) constituting the P or N type source and drain. This semiconductor layer has a silicon oxide or silicon nitride film (500 to 3,000 thick) and a semiconductor, chromium,
A gate electrode of titanium, molybdenum, tungsten or these compounds (LV: 300-3,000) is used (2
0). This gate electrode is a lead (4) that constitutes a pass line in the X direction.

(4') (4'''), and this lead is 0.
It has a thickness of 5-3μ. Its sheet resistance is 0.50/
I keep it to myself.

Furthermore, each of the three opposing electrodes on the substrate having another insulating surface facing the electrode (22) of the display element separates RGB, and one for red (R) (11') and one for green (G). (12') and (13') are provided for blue (B). and the upper and lower substrates (26),
<25) Red, edge and blue filters are provided on top.

This (11), <12>, <13>...
(11-(12″>, (13″) electrodes are also oriented, and the electrodes of each active element are connected to each other in the Y direction. What is particularly important is that the oriented first A plurality of second electrodes, here divided into three, are provided in a plane corresponding to the area of the electrode (2). Between these two electrodes, an LCD, for example, a liquid crystal display, is installed. (1) to two substrates (25), <
26) were combined and the periphery was sealed, followed by salting. Furthermore, since this electrode spacing (32) is 10 to 20 μ, it is suitable for actual use (can be identified and is not bothersome. This X-direction CTF also serves as a lead. As is clear from Fig. 2, for example, on the lead side in the Y direction, (5) is set as "1", the other (5') (5' side is set as rOJ, and (4), (4') in the Y direction, (4'ri at each level r I J, r OJ, r I
In addition, by applying R, G, and B signals under the control of the color division decoder (9), all the elements connected in (5) can be driven simultaneously. It has been found that it is possible to display a predetermined color using the signal.

In addition, it goes without saying that if all of these RGB are set to ``Il'', the color becomes white, and if all of these RGB are set to ``0'', the color becomes black. This control can be easily performed from the color division decoder side (9).

FIG. 5 shows a longitudinal sectional view taken along line BB' in FIG. 4(A). From the drawing, the electrodes on the counter electrode side are connected and the leads (
12').

The IGF (2) is provided on a substrate (25) and the electrodes (22) of the display element are also shown. Display element (24
) uses an EL light emitter or LCD reflective type,
One of the substrates (26) is transparent, and may be made of glass or Sumirard 1300 (abbreviated as PES) manufactured by Sumitomo Bakelite. As the other substrate (25), it is effective to use a stainless steel substrate with an insulating film formed of plastic or the like. Further, when a full color display is performed by disposing a fluorescent lamp below the surface of this semiconductor device and providing a color filter on the - side of the substrate (25) or (26) of the present invention, both substrates are made of glass. etc., and it is necessary to be transparent.

With the above configuration, the 20 inch experimentally becomes 100 x 10
When 0 elements were provided at 5 CI x 5 cm, the yield was significantly improved. In the conventional method, if a 100 x 100 panel with a defect count of 1% or less was regarded as a good product, the yield was only 3%. However, in the structure of the present invention, lofts exceeding 10% could be obtained.

Therefore, it has been found that when the number of elements increases to 525×640, the effects of the present invention can be expected to increase even further.

Furthermore, in the present invention, the side viewed by a person, for example, the substrate (26)
It is effective to provide an antireflection film (27) on the top surface.

Additionally, in the present invention, IGF was of the longitudinal channel type and was used in pairs. However, it goes without saying that only one IGF or a horizontal channel type IGF may be used.

This invention mainly shows a full color type. However, it can also be used as a high resolution display device. By removing the color filter on the second electrode, although the display is black and white, the number of picture elements is substantially tripled, resulting in three times higher resolution. Moreover, this three times can be doubled or quadrupled by increasing the number of second electrodes to two or four or more.

[Brief explanation of the drawing]

FIG. 1 shows a circuit diagram of a conventional display device. Figures 2 and 3 show circuit diagrams of the display device of the present invention.
a

Claims (1)

[Claims] 1. One first electrode corresponding to each picture element in a group of picture elements arranged in a matrix on a substrate having an insulating surface;
a semiconductor device that controls the presence or absence of an electric signal to the electrode; and a second electrode arranged in a pair with the first electrode of the picture element, A display element in which a light transmittance control body or a light emitting body is provided between the electrodes, wherein the second electrode is connected in the X direction, the Y direction, or the diagonal direction. Display device. 2. In claim 1, the plurality of second electrodes arranged in pairs on the first electrode are provided corresponding to red, green, or blue display parts. A semiconductor display device. 3. In claim 1, the first electrode and the display device are connected in the X direction, the Y direction, and the diagonal direction on another substrate having an insulating surface, which is provided across the substrate on which the first electrode and the display device are provided. 1. A semiconductor display device, characterized in that the second electrode is provided on the same substrate as a control circuit.