JPS60193877A - 輸送用半導体ウエーハケース - Google Patents

輸送用半導体ウエーハケース

Info

Publication number
JPS60193877A
JPS60193877A JP4779684A JP4779684A JPS60193877A JP S60193877 A JPS60193877 A JP S60193877A JP 4779684 A JP4779684 A JP 4779684A JP 4779684 A JP4779684 A JP 4779684A JP S60193877 A JPS60193877 A JP S60193877A
Authority
JP
Japan
Prior art keywords
wafer
wafers
basket
center
cage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4779684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0239867B2 (enrdf_load_html_response
Inventor
秀雄 工藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Priority to JP4779684A priority Critical patent/JPS60193877A/ja
Publication of JPS60193877A publication Critical patent/JPS60193877A/ja
Publication of JPH0239867B2 publication Critical patent/JPH0239867B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Packages (AREA)
  • Packaging Frangible Articles (AREA)
JP4779684A 1984-03-13 1984-03-13 輸送用半導体ウエーハケース Granted JPS60193877A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4779684A JPS60193877A (ja) 1984-03-13 1984-03-13 輸送用半導体ウエーハケース

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4779684A JPS60193877A (ja) 1984-03-13 1984-03-13 輸送用半導体ウエーハケース

Publications (2)

Publication Number Publication Date
JPS60193877A true JPS60193877A (ja) 1985-10-02
JPH0239867B2 JPH0239867B2 (enrdf_load_html_response) 1990-09-07

Family

ID=12785329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4779684A Granted JPS60193877A (ja) 1984-03-13 1984-03-13 輸送用半導体ウエーハケース

Country Status (1)

Country Link
JP (1) JPS60193877A (enrdf_load_html_response)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6436043A (en) * 1987-07-07 1989-02-07 Empak Inc Package
JPH0220042A (ja) * 1988-05-24 1990-01-23 Empak Inc 半導体用ウエハー若しくは基板用パッケージ
JPH0256444U (enrdf_load_html_response) * 1988-10-17 1990-04-24

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6190726B2 (ja) * 2014-01-17 2017-08-30 信越ポリマー株式会社 基板収納容器

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52113881A (en) * 1976-03-18 1977-09-24 Fluoroware Inc Siliconeewafer transporting container

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52113881A (en) * 1976-03-18 1977-09-24 Fluoroware Inc Siliconeewafer transporting container

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6436043A (en) * 1987-07-07 1989-02-07 Empak Inc Package
JPH0220042A (ja) * 1988-05-24 1990-01-23 Empak Inc 半導体用ウエハー若しくは基板用パッケージ
JPH0256444U (enrdf_load_html_response) * 1988-10-17 1990-04-24

Also Published As

Publication number Publication date
JPH0239867B2 (enrdf_load_html_response) 1990-09-07

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