JPS60190876A - Apparatus for inspecting printed wiring board - Google Patents

Apparatus for inspecting printed wiring board

Info

Publication number
JPS60190876A
JPS60190876A JP59046312A JP4631284A JPS60190876A JP S60190876 A JPS60190876 A JP S60190876A JP 59046312 A JP59046312 A JP 59046312A JP 4631284 A JP4631284 A JP 4631284A JP S60190876 A JPS60190876 A JP S60190876A
Authority
JP
Japan
Prior art keywords
coil
checker
inspected
bin
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59046312A
Other languages
Japanese (ja)
Inventor
Makoto Fukai
深井 誠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP59046312A priority Critical patent/JPS60190876A/en
Publication of JPS60190876A publication Critical patent/JPS60190876A/en
Pending legal-status Critical Current

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  • Measuring Leads Or Probes (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

PURPOSE:To bring a desired checker pin corresponding to an article to be inspected into contact with a part to be insepected, by mounting a shape memory alloy, of which the configuration changes by an ambient temp. state and a heating state, in correlation with the checker pin and providing a means for heating said alloy. CONSTITUTION:The leading end part 20 of a checker pin 20 is formed so as to be tapered toward a part 2 to be inspected and can be certainly contacted with the part 2 to be inspected. The probe 28 having the checker pin 20 is connected to a guide rod 29 extending to a downward direction. The guide rod 29 is surrounded by a coil 31 between a ring shaped projection 33 and a movable disc 24 and further surrounded by a coil 32 below the movable disc 24. One end part of the coil 32 is fixed to the movable disc 24 and the other end part thereof is fixed to the lower end part of a cylinder 23. The coils 31, 32 are made of a shape memory alloy and contracted when heated by power. Therefore, the checker pin 20 is retracted by the coils 31, 32, to which a current is supplied, before reaches the part 2 to be inspected and the supply of a current is stopped at said position to make it possible to impinge the pin 20 to the part 2 to be inspected.

Description

【発明の詳細な説明】 技俯分野 本発明は亀子回路素子が後続さrた印刷配線基板の゛直
子lul路の凹賂機能金検査するための検査装置に関し
、もつと詳しくは基板トのパターン電極部にチェッカー
ビン全部し当てて1言号を有効に検出する検出磯[ (
 以下フイクスチャーと呼フ)全備えた検査装置に関す
る。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an inspection device for inspecting the concavities of the traces of a printed circuit board followed by circuit elements, and more particularly to A detection method that effectively detects one word by applying the entire checker bin to the electrode part [ (
It relates to a fully equipped inspection device (hereinafter referred to as a fixture).

背景技術 典型的なフイクスナヤーは第1図に示さしる。Background technology A typical fixnayer is shown in FIG.

第1図(1)で示されるフィクスチャーでは被測定基板
1を所定位置に固定し、ポンプ(図示せず)を作動させ
て、可動板2と固定板3との間の空気をホース4を介し
て吸引する。そのため可動板2と共に基板1も下がり、
テストプローブ5と&仮lの伎検企部分6とが陵触する
。テストプローブ5はラ゛ソビング自己線7によってイ
ンタフェイスボード8と薩続さ汎、さらにインタフェイ
スポード8はテスタ(図示せず)に後続される。
In the fixture shown in FIG. 1 (1), the substrate 1 to be measured is fixed at a predetermined position, a pump (not shown) is operated, and a hose 4 is used to pump air between the movable plate 2 and the fixed plate 3. suction through. Therefore, the board 1 also moves down along with the movable plate 2.
The test probe 5 and the test probe part 6 of &kari collide. The test probe 5 is connected to an interface board 8 by a reading line 7, and the interface port 8 is further followed by a tester (not shown).

このような先行技術では印刷配線基板の′機種交替毎に
フィクスチャー全体を交換する必要があp。
In such prior art, it is necessary to replace the entire fixture every time the printed wiring board model is replaced.

多品種少量生産の場合にフィクスチャーのコストが高く
なる。また多数のフィクスチャーを準備しておかなけれ
ばならずその置き場所を考慮しなければならない。さら
には取替作業が面倒である。
In the case of high-mix, low-volume production, the cost of fixtures becomes high. Also, a large number of fixtures must be prepared and their locations must be considered. Furthermore, replacement work is troublesome.

第1図(2)で示さ扛る龍のフィクスチャーでは数種類
の基板に対して必要な最小公倍数分のチェックピン9を
立て、不用なチェッカービン10についてはマスクプレ
ー1−11によって覆い、W仮とは匿触しないようにし
ている。
In the dragon fixture shown in Fig. 1 (2), check pins 9 are set up for the least common multiple of several types of boards, and unnecessary checker bins 10 are covered with mask plate 1-11. I try not to touch anyone privately.

このような先行技術では、多槻種毎にマスクプレー)1
1を交換するだけでパターン゛−極部からの信号を検出
することが[す能である。しかしながらマスクプレー)
11(7)取外し・取付は作業は繁雑であり、自動化工
場における検査装置としては不光分である。
In such prior art, mask play for each Tatsuki species) 1
It is possible to detect signals from the pattern's extreme portions by simply exchanging 1. However, mask play)
11(7) Removal and installation are complicated and are not suitable for use as inspection equipment in automated factories.

第1図(3)で示さj、るさらに曲のフィクスチャーで
は、予め格子北にチェッカービン15を配置しておき、
各(幾抽毎に必要なチェッカービンを押しとげるための
りフタ−ビン12と、必要なテスタとの1沈角虫71(
分にインタフェースビン18と10己設したボード14
を用いて、チェッカービン15とテスタとの配線の切替
えを行なう。
In the fixture for the j, Rusara song shown in FIG. 1 (3), checker bins 15 are placed in advance on the north grid,
Each (1 sinker 71 (
Interface bin 18 and 10 self-installed board 14
is used to switch the wiring between the checker bin 15 and the tester.

このような先1j技術ではボード14を交換することに
よってすべての機(車に対応1−iJ能でりるが、第1
図(2)で示したフィクスチャーと同様に取1寸け・収
外し作業が繁雑であり、自動化工場における検査装置と
じては不充分でるる。
In such advanced 1J technology, by replacing the board 14, all machines (1-iJ compatible with cars) can be installed, but the first
As with the fixture shown in Figure (2), the work of removing and removing the fixture is complicated, making it inadequate as an inspection device in an automated factory.

目 的 本発明の目的は、上述の技術的課題全解決し、各被検査
物に対応して所望のチェッカービンを被検査部分に硬触
させることが可能な印刷配411i!躯板の検査装置を
提供することである。
Purpose An object of the present invention is to solve all of the above-mentioned technical problems and to provide a printing arrangement 411i that allows a desired checker bin to be brought into hard contact with a portion to be inspected corresponding to each object to be inspected. It is an object of the present invention to provide an inspection device for a foundation board.

実施例 第2図は、本発明に従うフイクステヤ−の一部の断面図
である。ピンボード21には複数の挿通孔22が形成さ
nる。この挿通孔22は印刷配線基板16の設計の際に
予め定められた複数の被検査部分18に対応した位置に
形成さnる。挿通孔22には、シリンダ23が固着され
る。このシリンダ23の一端は挿通孔22から突出して
いる。このシリンダ23内には、プローブ28が挿通さ
れる。
Embodiment FIG. 2 is a cross-sectional view of a portion of a fixter according to the present invention. A plurality of insertion holes 22 are formed in the pin board 21. The insertion holes 22 are formed at positions corresponding to a plurality of portions 18 to be inspected that are predetermined when the printed wiring board 16 is designed. A cylinder 23 is fixed to the insertion hole 22 . One end of this cylinder 23 protrudes from the insertion hole 22. A probe 28 is inserted into this cylinder 23 .

プローブ28は、被検査部分2に陵触iJ能なチェッカ
ービン26と、チェッカービン26′f:m検f部分2
に向けてはねIt勢するコイルばね27と金含む。チェ
ッカービン26の第2図における北方の先端部20は、
ftL検葺検分部分18けて先細り状に形成さ扛ている
。これによってチェッカービン26は、肢候を部分18
のみに確実に限触することかでさる。シリンダ28の内
周面の挿通孔22の下端部(−1j近にば、環状突起3
3が)1卸戊され、この環状突起33によってプローブ
28が環状突起33エリ下方に降下するのが防がれる。
The probe 28 includes a checker bin 26 that can touch the part 2 to be inspected, and a checker bin 26'f: m inspection part 2.
It includes a coil spring 27 and gold that springs toward it. The northern tip 20 of the checker bin 26 in FIG.
The ftL inspection part is tapered to 18 degrees. This causes the checker bin 26 to open the limbs in the portion 18.
Make sure to limit your exposure to only those areas. The lower end of the insertion hole 22 on the inner peripheral surface of the cylinder 28 (near -1j, the annular protrusion 3
3) is lowered, and the annular projection 33 prevents the probe 28 from descending below the annular projection 33 area.

プローブ28には、第2図における下方に延びて案内棒
29b二連設さ7’している。案内棒29の中央(、]
゛近には可すリ盤24が固定さ扛るっ町動盤24には!
11ra子25が装設さtzており、端子25はシリン
ダ23に穿設された長孔30を介してシリンダ23の外
周面に突出している。ラッピング線45の一端が端子2
5に匿続さtL、その曲端がテスタ(図示せず)に阪恍
される。チェッカービン26は、案内棒29および端子
25全介し・てラッピング脈45に電気的に1〆読さn
る。環状突起33と用動盤24の間において、案内棒2
9はコイル31によって外囲さ扛る。コイル31の一端
部は、環状突起33に固定され、llh 1711u部
は町切盤24に固定さnる。町動盤24の謁2図におけ
る下方において、案内棒29は、コイハフ32によって
外囲される。コイlし32の一端部は町動盤24に固定
され、匝端部はシリンダ23の下端部に固定される。コ
イ7し31お工びコイル32は形状記憶合金から成り、
七nそれ一力を与えることができる構成を付する。ここ
で用いられる形状記憶合金は、屯力會与えて加熱するこ
とに工つてコイル31およびコイル32が縮退した状態
に変形する特性を持つものである。
The probe 28 is provided with two guide rods 29b 7' extending downward in FIG. Center of guide rod 29 (,]
The moving board 24 is fixed near the moving board 24!
The terminal 25 protrudes from the outer peripheral surface of the cylinder 23 through a long hole 30 formed in the cylinder 23. One end of the wrapping wire 45 is terminal 2
5, and its curved end is tested by a tester (not shown). The checker bin 26 is electrically connected to the wrapping pulse 45 through the guide rod 29 and the terminal 25.
Ru. Between the annular projection 33 and the movable platen 24, the guide rod 2
9 is surrounded by a coil 31. One end of the coil 31 is fixed to the annular projection 33, and the llh 1711u portion is fixed to the cutting board 24. In the lower part of the moving board 24 in the audience 2 figure, the guide rod 29 is surrounded by a core half 32. One end of the coil 32 is fixed to the movement platen 24, and a stubby end is fixed to the lower end of the cylinder 23. The coil 7 and 31 are made of a shape memory alloy.
It has a structure that can give it a certain amount of power. The shape memory alloy used here has a property that the coils 31 and 32 deform into a contracted state when heated under stress.

第2図においては、コイル32に混圧を印加してコイ次
32が縮退した状態を示している。
FIG. 2 shows a state in which the coil 32 is degenerated by applying a mixed pressure to the coil 32.

シリンダ23の下部付近には固定台34が固定さn、固
定台84のと面には支持板85が乗載される。固定台3
4お工び支持板35には、挿通孔84a、851dがそ
れぞれ穿設さnる。支持板35の第2図における右fu
llの端部は形状記1、は台金から成るコイル36によ
って固定さr、る。支持板35の第2図における左側の
端部は、ノ[シ状記憶合金から成るコイ7し87によっ
て固定される。コイル86.87のそれぞれの也端部は
固定台34によって固定さBており、4を力を与えて加
熱することによって縮退した形状になる。第2図にンい
ては、コイル36に重力が与えらtしており、この状態
で(中1市孔34a、85aK+内俸29がj中通して
いる。案内+#29が挿通孔34a、35aに挿通して
、コイル32に・1力を与えることに↓りで案内棒29
μ下方にIJ置し、この伏してチェ・ツカ−ビン26は
挿通孔22に収納さ11ている。
A fixed base 34 is fixed near the bottom of the cylinder 23, and a support plate 85 is mounted on the opposite side of the fixed base 84. Fixed stand 3
4. The support plate 35 is provided with insertion holes 84a and 851d, respectively. Right fu in FIG. 2 of support plate 35
The end of ll is fixed by a coil 36 made of a base metal. The left end of the support plate 35 in FIG. 2 is fixed by a coil 7 to 87 made of a saw-shaped memory alloy. The ends of each of the coils 86 and 87 are fixed by a fixing base 34, and by applying force and heating the coils 86 and 87, the coils assume a contracted shape. In FIG. 2, gravity is applied to the coil 36, and in this state (the middle 1st hole 34a, 85aK + inner shaft 29 is passed through the middle hole 34a, The guide rod 29 is inserted through the coil 35a and applies one force to the coil 32.
IJ is placed below μ, and the check box 26 is housed 11 in the insertion hole 22 in this face down position.

第3図はチェッカービン26が印刷配線基板16」二/
−)岐偵食部分18に回けて突出した伏1表を示す図で
ある。印刷用l尿JA仮16の「圧子U路映能を恢査す
るVこ当りて、印刷1記槻JAvi16υ予め定めた彼
倹査部分18の垂下にチェッカービン26が間融μ」能
な工うにビンボード21が1己lIaさ′Iする。コイ
ル31に直方を与えることによってコイ々31は加熱さ
れ刊d遇する。このことによってナエツカーヒ゛ン26
は印刷I記機法阪16 ’/) flu jij、!食
浦分18に同けて突出する。この際コイル37は、重力
を与えることに工って面出し、支持敗85は第3図VC
おりる左1則に仔;助し、浴内伜29i/)下端部29
aが叉ト¥仮85の弔8図VC紐げるL聞に当限する。
In FIG. 3, the checker bin 26 is connected to the printed wiring board 16''2/
-) It is a diagram showing a protruding face-down 1 table that is turned around to the Qingei Shoku portion 18. Printing JA provisional 16 "Inspecting the indenter U path reflection function, printing 1 JAvi 16υThe checker bottle 26 is fixed to the predetermined hanging part 18" The sea urchin board 21 is in its original state. By giving the coil 31 a rectangular shape, the coil 31 is heated and distributed. By this, Naetzkahin 26
The printing method is 16'/) flu jij,! It stands out as much as Shokuura Min 18. At this time, the coil 37 is designed to give gravity and the surface is exposed, and the support loss 85 is shown in Figure 3 VC.
Lower end 29
A is for the time being limited to the L length that can be tied to the 85 VC.

このことによってチェッカービン26が破検査部分18
から離反する方向に鉛泣するのが防がれ、彼検査部分1
8とチェッカービン26の先端部20との陵触状態が確
実に保持さt′しる。
As a result, the checker bin 26
This prevents him from moving away from the test part 1.
8 and the tip 20 of the checker bin 26 are securely maintained.

以」二のような(財)作は残余のチェッカービン26に
おいても行lわ往、所望の被慣査部分18にチェッカー
ビンの先端部20を陵触さぜることが可能となる。各チ
ェッカービン26には北述したようにラッピング線45
を介してテスタに陸続さn。
The above operations are also performed on the remaining checker bin 26, making it possible to touch the tip 20 of the checker bin to the desired portion 18 to be inspected. Each checker bin 26 has a wrapping line 45 as described above.
connected to the tester via n.

+ii子回路の+S、能の検査が行なわれる。ut子回
路の機能の検査が行なわnた後、コイル36に屯力全与
えることによってコイル36は縮退し、支持板35は第
3図における右方に移動する。このことによって支持板
35の挿通孔85&は案内棒29の下端部29aに位置
する。その際コイル32に重力を与えることによってコ
イル32は輸退する。
+S of the +ii child circuit is tested. After testing the function of the output circuit, the coil 36 is retracted by applying full force to the coil 36, and the support plate 35 is moved to the right in FIG. As a result, the insertion hole 85& of the support plate 35 is located at the lower end portion 29a of the guide rod 29. At this time, the coil 32 is moved up and down by applying gravity to the coil 32.

このことによってチェッカービン26(Iよ第3図にお
ける下方に移動して第2図に示される状態に戻る。
This moves the checker bin 26 (I) downward in FIG. 3 and returns to the state shown in FIG.

と述の実施例では、形状記憶台舎は、重力を与えて11
111熱することにエリコイル81,32,86゜37
がi:(fi退しt形状になるようにしていたが、屯1
土を印加することにより、コイル81,32.86.3
7が伸長するように形状記憶合金金用いても=い。その
場合において、コイlし31を設けずにコイル3またけ
金設けて、コイlし32に「比圧をEIJ)Jll L
で加熱することにより案内棒を押し北けてチェッカービ
ン26が彼横査部分18に(ジ触するようにしてもよい
。この場合には、コイル32に重力を与えるのを止める
ことにより、プローブ28および案内棒29の自重によ
りてコイル32が輸送した形状になり、チェッカービン
26が挿通孔22に収納された伏り狽に戻るものでゆる
う第4図は印刷配線基板1Gの111〕略化したil/
−11図であり、第5図はビンボーF2]の’4’−+
111図でめるっ印刷配線基板l“6」二には、敲槻査
i□JIS分18として格子状の父、4−H4,1に電
子回路素子の収j・J孔か刀条成される。父、q4xに
対1心してビンホード21t/こチェッカービン26が
設けらノ′Lる。印刷配線基板)及1’6hにiJ?望
の’+4i、千回1洛素f−が医院されると、この匿読
されfc菟子u路素子の端子に対応したチェッカービン
26を北述した方法で作動させて間融させ、回路素子の
検査が行なわ汀る。lお破検丘部分18としては格子状
の交、蜘に規定する必要はなく、基板の種類に応じて定
位置に規定すれば工いっ効 果 以」二のように本発明によれば、各被検査物に対1芯し
て所望のチェッカービンを接触させることができるので
、従来のようにフイクスチャーを被検査物の抽類ごとに
取替える8砦はなく、したがって作業性が同とされ、か
つ検査時間の短稲を図1る。
In the embodiment described, the shape memory platform is 11
111 Heating Elikoil 81, 32, 86° 37
is i: (fi was set back to form a t shape, but ton 1
By applying soil, the coils 81, 32.86.3
Shape memory alloy gold may be used so that 7 is elongated. In that case, a latch is provided across the coil 3 without providing the coil 31, and the specific pressure is set to EIJ) on the coil 32.
The guide rod may be pushed north by heating the checker pin 26 so that it touches the transverse section 18. In this case, by stopping the application of gravity to the coil 32, the probe 28 and the guide rod 29, the coil 32 assumes the transported shape, and the checker bin 26 returns to the shape stored in the insertion hole 22. I did it/
-11 figure, and figure 5 is '4'-+ of Binbo F2]
In Figure 111, the printed wiring board l "6" 2 has a lattice pattern as a JIS part 18, and 4-H4, 1 has a J/J hole or a sword formation. be done. Father, a bin hoard 21t/this checker bin 26 is installed one center to the q4x. Printed wiring board) and iJ on 1'6h? When the desired '+4i, 1,000 times 1 Rakusu f- is brought to the hospital, the checker bin 26 corresponding to the terminal of this secretly read fc 菟子 U path element is operated in the manner described above to melt the circuit. The device is inspected and stopped. According to the present invention, it is not necessary to specify the lattice-like intersections or spiders as the fracture inspection hill portion 18, but it is possible to have an effect by specifying it at a fixed position depending on the type of substrate. Since the desired checker bin can be brought into contact with each object to be inspected one core at a time, there is no need to replace the fixture for each drawing of the object to be inspected, unlike in the past, and work efficiency is therefore the same. Figure 1 shows rice that requires short inspection time.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は先行技術ff1iffl明するための図、第2
図は/Fl:@明に従うフイクスチャーの一部の断面図
、m 8 図ハfエツカービン26が突出した状態金示
す11,11面図、第4図は印刷配線基板1・6の簡略
化した平面図、第5図はビンホード21の平面図である
。 2■・・・ビンボード、26・・・チェッカービン、3
1.82.86.87・・・コイル 41 第4図 第5図 手 続 補 正 書 c方式) 昭和59年6月5日 ”(1 特5′1庁し官 殿 、9)l13 1、事件の表示 特願昭59−46312 2、発明の名称 印刷配線基板の検査装置 3、補正をする者 事件との関係 出願人 住所 名 称 (504) シャープ株式会社代表者 4、代理人 6、補正の対象 8A細書および図面 7、補正の内容 明a書および図面の浄書(内容に変更なし)。 以上 482−
FIG. 1 is a diagram for explaining the prior art, FIG.
The figure is a cross-sectional view of a part of the fixture according to /Fl:@light, m 8 Figure f shows the state in which the carbine 26 is protruding, and Figure 4 is a simplified plan view of the printed wiring boards 1 and 6. FIG. 5 is a plan view of the bin hoard 21. 2 ■... Bin board, 26... Checker bin, 3
1.82.86.87...Coil 41 Figure 4 Figure 5 Procedures Amendment c Method) June 5, 1982'' (1 Patent Act 5'1 Office of the Government, 9) l13 1. Indication of the case Patent application No. 59-46312 2. Name of the invention Printed wiring board inspection device 3. Person making the amendment Relationship to the case Applicant Address Name (504) Sharp Corporation Representative 4, Agent 6, Amendment Subject 8A specification and drawing 7, amendment statement a and engraving of drawings (no change in content). Above 482-

Claims (1)

【特許請求の範囲】 印刷配線基板に購成さttた電子回路の彼伐査部分にチ
ェッカーピンを押し当てて醒気的導辿を行ない、電子回
路の回路P&能を検査する枳査装置において、 目11記チェッカーピンに関連して設けら扛た常温状態
お工び加熱状匹で形状が髪化する形状記憶合金と、形状
記憶合金に加熱の之めの”it力を与える手段とを含む
ことを′特徴とする印刷配線基板の検査装置。
[Claims] In an inspection device for inspecting the circuit P & performance of an electronic circuit by pressing a checker pin against the inspection part of an electronic circuit installed on a printed wiring board and conducting a careful tracing. Item 11: A shape memory alloy whose shape becomes like a hair when heated at room temperature, which is provided in connection with the checker pin, and a means for applying "it" force for heating to the shape memory alloy. A printed wiring board inspection device characterized by comprising:
JP59046312A 1984-03-09 1984-03-09 Apparatus for inspecting printed wiring board Pending JPS60190876A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59046312A JPS60190876A (en) 1984-03-09 1984-03-09 Apparatus for inspecting printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59046312A JPS60190876A (en) 1984-03-09 1984-03-09 Apparatus for inspecting printed wiring board

Publications (1)

Publication Number Publication Date
JPS60190876A true JPS60190876A (en) 1985-09-28

Family

ID=12743653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59046312A Pending JPS60190876A (en) 1984-03-09 1984-03-09 Apparatus for inspecting printed wiring board

Country Status (1)

Country Link
JP (1) JPS60190876A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4801876A (en) * 1986-04-18 1989-01-31 Sagami Tsushin Kogyo Kabushiki Kaisha Printed wiring board tester
JPH0158170U (en) * 1987-10-07 1989-04-11
WO2018078752A1 (en) * 2016-10-26 2018-05-03 三菱電機株式会社 Inspection device and inspection method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4801876A (en) * 1986-04-18 1989-01-31 Sagami Tsushin Kogyo Kabushiki Kaisha Printed wiring board tester
JPH0158170U (en) * 1987-10-07 1989-04-11
WO2018078752A1 (en) * 2016-10-26 2018-05-03 三菱電機株式会社 Inspection device and inspection method
CN109844550A (en) * 2016-10-26 2019-06-04 三菱电机株式会社 Check device and inspection method
US10802047B2 (en) 2016-10-26 2020-10-13 Mitsubishi Electric Corporation Inspection device and inspection method

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