JPS60180789A - クリ−ンル−ム内作業ロボツト装置 - Google Patents

クリ−ンル−ム内作業ロボツト装置

Info

Publication number
JPS60180789A
JPS60180789A JP59034855A JP3485584A JPS60180789A JP S60180789 A JPS60180789 A JP S60180789A JP 59034855 A JP59034855 A JP 59034855A JP 3485584 A JP3485584 A JP 3485584A JP S60180789 A JPS60180789 A JP S60180789A
Authority
JP
Japan
Prior art keywords
robot
work robot
power supply
carriage
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59034855A
Other languages
English (en)
Japanese (ja)
Other versions
JPH05198B2 (enrdf_load_stackoverflow
Inventor
赤沼　清彦
相場　武
秀治 大橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP59034855A priority Critical patent/JPS60180789A/ja
Publication of JPS60180789A publication Critical patent/JPS60180789A/ja
Publication of JPH05198B2 publication Critical patent/JPH05198B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
JP59034855A 1984-02-25 1984-02-25 クリ−ンル−ム内作業ロボツト装置 Granted JPS60180789A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59034855A JPS60180789A (ja) 1984-02-25 1984-02-25 クリ−ンル−ム内作業ロボツト装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59034855A JPS60180789A (ja) 1984-02-25 1984-02-25 クリ−ンル−ム内作業ロボツト装置

Publications (2)

Publication Number Publication Date
JPS60180789A true JPS60180789A (ja) 1985-09-14
JPH05198B2 JPH05198B2 (enrdf_load_stackoverflow) 1993-01-05

Family

ID=12425786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59034855A Granted JPS60180789A (ja) 1984-02-25 1984-02-25 クリ−ンル−ム内作業ロボツト装置

Country Status (1)

Country Link
JP (1) JPS60180789A (enrdf_load_stackoverflow)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62166412A (ja) * 1986-01-18 1987-07-22 Fanuc Ltd 移動型産業用ロボツト
JPS62268308A (ja) * 1986-05-14 1987-11-20 Toshiba Corp 浮上式搬送装置
JPS63186589U (enrdf_load_stackoverflow) * 1987-05-21 1988-11-30
JPH0251085U (enrdf_load_stackoverflow) * 1988-09-30 1990-04-10
JPH0878502A (ja) * 1994-08-31 1996-03-22 Jenoptik Technol Gmbh ２つの末端位置間において物を搬送する搬送装置
JPH08181188A (ja) * 1994-08-31 1996-07-12 Jenoptik Technol Gmbh 半導体加工装置用装填装置
JPH08294883A (ja) * 1995-04-26 1996-11-12 Enshu Ltd 多関節アーム式搬送方法
JP2009248197A (ja) * 2008-04-01 2009-10-29 Denso Wave Inc ロボット及び生産システム
JP2012101869A (ja) * 2010-11-08 2012-05-31 Okamura Corp 物品搬送装置
WO2023117324A1 (de) * 2021-12-20 2023-06-29 Festo Se & Co. Kg Handhabungssystem

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS505190U (enrdf_load_stackoverflow) * 1973-05-11 1975-01-20
JPS58137576A (ja) * 1982-02-05 1983-08-16 トヨタ自動車株式会社 自走式汎用ロ−ダ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS505190U (enrdf_load_stackoverflow) * 1973-05-11 1975-01-20
JPS58137576A (ja) * 1982-02-05 1983-08-16 トヨタ自動車株式会社 自走式汎用ロ−ダ装置

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62166412A (ja) * 1986-01-18 1987-07-22 Fanuc Ltd 移動型産業用ロボツト
JPS62268308A (ja) * 1986-05-14 1987-11-20 Toshiba Corp 浮上式搬送装置
JPS63186589U (enrdf_load_stackoverflow) * 1987-05-21 1988-11-30
JPH0251085U (enrdf_load_stackoverflow) * 1988-09-30 1990-04-10
JPH0878502A (ja) * 1994-08-31 1996-03-22 Jenoptik Technol Gmbh ２つの末端位置間において物を搬送する搬送装置
JPH08181188A (ja) * 1994-08-31 1996-07-12 Jenoptik Technol Gmbh 半導体加工装置用装填装置
JPH08294883A (ja) * 1995-04-26 1996-11-12 Enshu Ltd 多関節アーム式搬送方法
JP2009248197A (ja) * 2008-04-01 2009-10-29 Denso Wave Inc ロボット及び生産システム
JP2012101869A (ja) * 2010-11-08 2012-05-31 Okamura Corp 物品搬送装置
WO2023117324A1 (de) * 2021-12-20 2023-06-29 Festo Se & Co. Kg Handhabungssystem

Also Published As

Publication number Publication date
JPH05198B2 (enrdf_load_stackoverflow) 1993-01-05

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