JPS60170768A - 半導体内の容量比測定装置 - Google Patents
半導体内の容量比測定装置Info
- Publication number
- JPS60170768A JPS60170768A JP2793284A JP2793284A JPS60170768A JP S60170768 A JPS60170768 A JP S60170768A JP 2793284 A JP2793284 A JP 2793284A JP 2793284 A JP2793284 A JP 2793284A JP S60170768 A JPS60170768 A JP S60170768A
- Authority
- JP
- Japan
- Prior art keywords
- level
- input terminal
- transistor
- capacitors
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 25
- 239000003990 capacitor Substances 0.000 claims abstract description 53
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000001914 filtration Methods 0.000 claims 1
- 230000003071 parasitic effect Effects 0.000 abstract description 9
- 238000005259 measurement Methods 0.000 abstract description 4
- 238000006243 chemical reaction Methods 0.000 description 16
- 238000010586 diagram Methods 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
- Analogue/Digital Conversion (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2793284A JPS60170768A (ja) | 1984-02-15 | 1984-02-15 | 半導体内の容量比測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2793284A JPS60170768A (ja) | 1984-02-15 | 1984-02-15 | 半導体内の容量比測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60170768A true JPS60170768A (ja) | 1985-09-04 |
| JPH0465988B2 JPH0465988B2 (enrdf_load_stackoverflow) | 1992-10-21 |
Family
ID=12234663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2793284A Granted JPS60170768A (ja) | 1984-02-15 | 1984-02-15 | 半導体内の容量比測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60170768A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4720670A (en) * | 1986-12-23 | 1988-01-19 | International Business Machines Corporation | On chip performance predictor circuit |
| JP2009115710A (ja) * | 2007-11-08 | 2009-05-28 | Tokyo Institute Of Technology | 可変容量計測装置及び可変容量計測方法 |
| US7977721B2 (en) * | 2008-04-30 | 2011-07-12 | Agere Systems Inc. | High voltage tolerant metal-oxide-semiconductor device |
-
1984
- 1984-02-15 JP JP2793284A patent/JPS60170768A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4720670A (en) * | 1986-12-23 | 1988-01-19 | International Business Machines Corporation | On chip performance predictor circuit |
| JP2009115710A (ja) * | 2007-11-08 | 2009-05-28 | Tokyo Institute Of Technology | 可変容量計測装置及び可変容量計測方法 |
| US7977721B2 (en) * | 2008-04-30 | 2011-07-12 | Agere Systems Inc. | High voltage tolerant metal-oxide-semiconductor device |
| US8105912B2 (en) | 2008-04-30 | 2012-01-31 | Agere Systems Inc. | High voltage tolerant metal-oxide-semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0465988B2 (enrdf_load_stackoverflow) | 1992-10-21 |
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