JPS60170286A - Method of producing glass ceramic substrate - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to a method for manufacturing a hybrid substrate using crystallized glass.

(b) Technology background Thick film or! Ceramics mainly composed of alumina (αAl: LOJ) have traditionally been used as membrane hybrid substrates.

However, in applications such as computers that require high-speed calculations and miniaturization and large-capacity elements, it is necessary to use multilayer substrates, and in this case, ceramic substrates whose main component is alumina are It has a high dielectric constant of 8 to 9, which poses a problem in high-speed processing of pulse signals.

That is, the capacitance generated between wiring patterns on a multilayer board is proportional to the area of the wiring patterns that face each other and inversely proportional to the distance. Therefore, as the number of constituent layers of a multilayer board increases and the thickness of each layer becomes thinner, the capacitance between wiring patterns increases, which increases crosstalk and degrades quality.

Therefore, a multilayer substrate that exhibits a lower dielectric constant than the conventional one is required.

The present invention relates to a glass-ceramic substrate developed from the viewpoint of the present invention.

(c) Prior Art and Problems A glass substrate is a substrate that exhibits a lower dielectric constant than a conventional alumina substrate.

However, glass substrates are inferior in mechanical strength to alumina substrates, so they cannot be handled in the conventional manner throughout the manufacturing process.

Therefore, partially crystallized glass substrates have been put into practical use as a strength improvement method.

That is, this is a method in which amorphous glass powder is mixed with a binder to produce Grinshi-1, which is fired at a high temperature to partially crystallize it at the stage of forming a substrate.

The advantage of this method is that, in addition to improving mechanical strength, the properties of the crystal appear as properties of the substrate.

Here, the properties of crystals are usually significantly different from those of amorphous glass, and if the thermal expansion coefficient of the crystal is small, this effect will appear on the substrate, and if the dielectric constant is small, the dielectric constant of the substrate will also be small. Become.

Although this partial crystallization increases the mechanical strength and improves the dielectric constant to about 5 to 6, it has not yet reached the required performance.

(d) Object of the Invention An object of the present invention is to provide a method for manufacturing a glass multilayer substrate that has superior mechanical strength and improved electrical performance such as dielectric constant compared to conventional glass substrates.

(e) Structure of the Invention The object of the present invention is to knead crystallized glass powder with a binder to make a green sheet, screen print a conductive paste on the green sheet to form a wiring pattern, and then laminate the sheets to form a wiring pattern. A glass-ceramic substrate characterized in that it is obtained by pressing and then firing in a non-oxidizing atmosphere! This can be realized by the M manufacturing method.

(f) Embodiments of the Invention The present invention solves the above problems by using crystallized glass as the glass powder used to form the green sheet.

Here, there are two types of crystallized glass: fully crystallized glass is used as a fine powder, and partially crystallized glass is used as a fine powder.In the latter case, the surface roughness of the substrate Although there is a tendency for the amount to increase somewhat, there is no practical problem at all.

The present invention will be explained below with reference to Examples.

The glass coating composition includes 70% by weight of silica (Sl%), 15% by weight of alumina (A1203>), 10% by weight of lithium oxide (Li0), and titanium oxide (Ti02).
) was composed of 5% by weight. Kogode]'i0. is added as a crystal nucleating agent.

” - After mixing the powders with the listed component ratios well, +60<1'
The mixture was held for 3 hours at c for 3 hours, and after melting, it was quenched to obtain an amorphous glass.

Next, this was held at 600"C for 2 hours to form nuclei, and then held at 4,800"C for 2 hours to grow crystal nuclei to produce crystallized glass, which had an average grain size of 41. It was ground to 1 μm to produce ``ζ crystallized glass.

In this way, 17 glasses of high crystallinity glass powder can be produced.

Next, in order to produce a glass with insufficient crystallinity, the period for growing crystal nuclei at 800° C. in the case of glass with this composition may be shortened.

Specifically, the heat treatment time, which was previously 11-9 at 800° C. for 21 hours, was shortened to 1 hour.

Next, the glass powder was well kneaded using 4B1 fat such as acrylic resin as a binder and an organic solvent to form a green sheet using the doctor blade method (-7).

This Grinshi-1- is 45Cm square ζ, - using a bunch.
After cutting out one piece, a wiring pattern was formed by screen printing copper (Cυ) paste.

This is how various wiring patterns were screen printed 1
One green sheet is in the correct position ゎ-LuU.

After laminating the layers, they were dried at a pressure of 30 MPa for 30 minutes to integrate them, and then dried at a pressure of 90'c in a nitrogen gas atmosphere. 7
A multilayer substrate made of glass seshiminoki could be obtained by firing for 30 minutes at a time.

Comparing the substrates formed using glass powder with high crystallinity and glass with insufficient crystallization,
There is no difference in crystallinity, but the latter is slightly lower in terms of surface roughness. However, for practical purposes (1, l, there is no problem at all.

The table shows a comparison of the characteristics with the glass substrate from (π).

By using crystallized glass as shown in Table 2, the degree of crystallinity of the substrate can be made the same, and the mechanical strength of the substrate can be improved without changing the surface roughness. The dielectric constant can also be set to -1-, and the dielectric constant is about 5.
You can go to F.

The crystallized glass according to the present invention may be any glass with a low dielectric constant having a crystallization temperature of 600'C or higher and 900'C or higher, having the composition mentioned in the examples. .

It can be said that glass compositions using 1゛10□ and ZrO are also suitable materials for the present invention.

(g) Effects of the Invention The present invention improves the low mechanical strength and high dielectric constant of conventional glass substrates, and by implementing the present invention, the characteristics of multilayer wiring boards are improved.

Claims (1)

[Claims] [11] A green sheet is made by kneading crystallized glass powder with a binder, a wiring pattern is formed by screen printing a conductive paste on the green sheet, and this is laminated and pressurized. A method for producing a glass-ceramic substrate, characterized in that it is obtained by firing in a non-oxidizing atmosphere. (2) The method for manufacturing a glass-ceramink substrate according to claim 1, characterized in that glass with a high degree of crystallinity is used as the glass powder used to form the green sheet. (3) The method for manufacturing a glass-ceramic substrate according to claim 1, characterized in that partially crystallized glass is used as the glass powder used to form the green sheet.