JPS60169707A - 表面状態測定装置 - Google Patents
表面状態測定装置Info
- Publication number
- JPS60169707A JPS60169707A JP2448584A JP2448584A JPS60169707A JP S60169707 A JPS60169707 A JP S60169707A JP 2448584 A JP2448584 A JP 2448584A JP 2448584 A JP2448584 A JP 2448584A JP S60169707 A JPS60169707 A JP S60169707A
- Authority
- JP
- Japan
- Prior art keywords
- measurement surface
- light
- measured
- reflected
- defocus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 201000009310 astigmatism Diseases 0.000 claims abstract description 19
- 238000005259 measurement Methods 0.000 claims description 64
- 230000003287 optical effect Effects 0.000 claims description 46
- 238000006073 displacement reaction Methods 0.000 abstract description 18
- 230000004907 flux Effects 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 9
- 238000004364 calculation method Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 230000003746 surface roughness Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 241001175904 Labeo bata Species 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000002559 palpation Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004439 roughness measurement Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Automatic Focus Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2448584A JPS60169707A (ja) | 1984-02-14 | 1984-02-14 | 表面状態測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2448584A JPS60169707A (ja) | 1984-02-14 | 1984-02-14 | 表面状態測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60169707A true JPS60169707A (ja) | 1985-09-03 |
| JPH047804B2 JPH047804B2 (enrdf_load_stackoverflow) | 1992-02-13 |
Family
ID=12139485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2448584A Granted JPS60169707A (ja) | 1984-02-14 | 1984-02-14 | 表面状態測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60169707A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2604515A1 (fr) * | 1986-09-29 | 1988-04-01 | Spectec Sa | Dispositif de mesure de position par mesure d'astigmatisme a l'aide d'une detection optique differentielle |
| JP2014025699A (ja) * | 2011-07-27 | 2014-02-06 | Dmg Mori Seiki Co Ltd | 変位検出装置 |
-
1984
- 1984-02-14 JP JP2448584A patent/JPS60169707A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2604515A1 (fr) * | 1986-09-29 | 1988-04-01 | Spectec Sa | Dispositif de mesure de position par mesure d'astigmatisme a l'aide d'une detection optique differentielle |
| JP2014025699A (ja) * | 2011-07-27 | 2014-02-06 | Dmg Mori Seiki Co Ltd | 変位検出装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH047804B2 (enrdf_load_stackoverflow) | 1992-02-13 |
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