JPS60169686A - Cryo-pump - Google Patents
Cryo-pumpInfo
- Publication number
- JPS60169686A JPS60169686A JP2279084A JP2279084A JPS60169686A JP S60169686 A JPS60169686 A JP S60169686A JP 2279084 A JP2279084 A JP 2279084A JP 2279084 A JP2279084 A JP 2279084A JP S60169686 A JPS60169686 A JP S60169686A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- panels
- recovery
- cryopump
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明はクライオポンプに係り、特にクライオポンプ内
に蓄積した排気ガスを選択回収出来るクライオポンプに
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a cryopump, and particularly to a cryopump that can selectively recover exhaust gas accumulated within the cryopump.
第１図は各２：（′気体の温度と蒸気圧との関係を示す
蒸気圧曲線であり、このグラフから判るようにクライオ
ポンプ内に設けられた複数段の冷却面の温度をそれぞれ
変えることにより、各段の冷却面に凝縮捕獲される気体
の種類を変えることができる。Figure 1 is a vapor pressure curve showing the relationship between the temperature of the gas and the vapor pressure. This makes it possible to change the type of gas that is condensed and captured on the cooling surface of each stage.
第２図はこの原理を応用したクライオポンプの従来構造
の一例を示したものであり、クライオポンプケース１内
に冷却管２，３．４が配設されており、それぞれに冷媒
５，６．７が導入さハている。これらの冷却管２，３．
４にはそれぞれ吸着部材の一つであるシェブロンバッフ
ル８，９および多孔質吸着剤パネル１０が固設さ九てい
る。FIG. 2 shows an example of the conventional structure of a cryopump applying this principle, in which cooling pipes 2, 3, 4 are arranged inside the cryopump case 1, and coolant 5, 6, . 7 has been introduced. These cooling pipes 2, 3.
Chevron baffles 8, 9 and porous adsorbent panels 10, which are one of the adsorption members, are fixed to each of the adsorption members 4.
また、シェブロンバッフル８，９問およびシェブロンバ
ッフル９とパネル１０間に、それぞれｉｌ＋ｉｔ度制御
され開閉可能なシャッタ１．５，１．６が配設されてい
る。Furthermore, shutters 1.5 and 1.6, which can be opened and closed under il+it degree control, are arranged between the chevron baffles 8 and 9 and between the chevron baffle 9 and the panel 10, respectively.
クライオポンプケース１の入口側は入ロ側ゲー１〜バル
ブ１１を介して入口側ダク１〜１２に接続されでおり、
同じく出力側は出ロ側ゲー１−バルブ１３を介して出口
側ダグ１〜１４に接続されている。The inlet side of the cryopump case 1 is connected to the inlet ducts 1 to 12 via the inlet gates 1 to valves 11,
Similarly, the output side is connected to the outlet side dugs 1 to 14 via the outlet side gate 1-valve 13.
このように構成された従来構造のクライオポンプでは、
例えは、冷媒５に液体窒素を用い、冷媒６．７に液体ヘ
リウムを用いると、シェブロンバッフル８は７７ｋに、
シェブロンバッフル９および多孔質吸着剤パネル１０は
４２Ｋに冷却されるから、人口側ダグｌ−１，２からグ
ー１−バルブ１１を介して導かれる排気ガスの組成を、
例えば水蒸気（ｌ（２０）ａ、水素ガス（１−１２）ｂ
、ヘリウムガス（Ｎ Ｏ）の３種類と仮定すれば、それ
ぞれのガスａ、ｈ、ｃ、は図示のようにそれぞれ、冷却
面８゜９．１０に凝縮捕獲される。この場合、クライオ
ポンプの出力側に接続された出ロ側ゲー１〜バルブ１３
は閉じられている。In a cryopump with a conventional structure configured in this way,
For example, if liquid nitrogen is used as the refrigerant 5 and liquid helium is used as the refrigerant 6.7, the chevron baffle 8 will be 77k.
Since the chevron baffle 9 and the porous adsorbent panel 10 are cooled to 42 K, the composition of the exhaust gas led from the artificial side Doug 1-1, 2 through the Goo 1-valve 11 is as follows.
For example, water vapor (l(20)a, hydrogen gas (1-12)b
, helium gas (N 2 O), the respective gases a, h, and c are condensed and captured on the cooling surface 8°9.10, respectively, as shown in the figure. In this case, the output side gate 1 to valve 13 connected to the output side of the cryopump
is closed.
クライオポンプはガスため込み式のポンプであるため、
冷却面での捕護ガス旦がある限度以上になると、捕獲性
能が落ぢるため、捕獲ガスを回収再生する作業を行なう
必要がある。このとき、捕獲ガス中に有害ガスが含まれ
る場合、あるいはその他の理由で各ガスを個別に回収排
気する必要が生じたときに、選択回収排気運転が行なわ
れる。Since the cryopump is a gas storage pump,
When the amount of captured gas on the cooling surface exceeds a certain limit, the capture performance deteriorates, so it is necessary to recover and regenerate the captured gas. At this time, when the captured gas contains harmful gases or when it becomes necessary to collect and exhaust each gas individually for other reasons, the selective recovery and exhaust operation is performed.
この選択回収排気運転とは、例えば、ガスＣのみを個別
に回収する場合、入１コ側ゲー１−バルブ１１を閉じ、
出ロ側ゲー１−バルブ１３を開き、シャッタ１６を図示
しない開閉機構により閉じ、ついで、冷媒７の’１Ｉｒ
Ａ度をガスＣがパネル１０の表面より遊離するまで昇渇
し、出口側ダグ１〜１４およびその先に接続された排気
ポンプ（図示せず）によりガスＣを回収４るものである
。This selective recovery exhaust operation means, for example, when recovering only gas C individually, closing the input 1 side gate 1 valve 11,
The outlet side gate 1-valve 13 is opened, the shutter 16 is closed by an opening/closing mechanism (not shown), and then the refrigerant 7 is
A degree is raised until gas C is liberated from the surface of the panel 10, and gas C is recovered by an exhaust pump (not shown) connected to the outlet side dugs 1 to 14 and beyond.
第：（図はこの選択回収排気の状態を示したものである
が、従来のクライオポンプの構造によると、選択回収用
量ｌコが１個所のため、あるパネル又はシェブロンバッ
フルを回収再生中の場合、残りのパネル又はバッフルは
回収再生状態に入れず、待機している必要があり、全パ
ネル等の回収再生を完了するまでに長時間かかるという
欠点があった。(The figure shows the state of this selective recovery exhaust.According to the structure of conventional cryopumps, the selective recovery volume is in one place, so if a certain panel or chevron baffle is being recovered and regenerated. However, the remaining panels or baffles must be on standby without entering the recovery and regeneration state, which has the disadvantage that it takes a long time to complete the recovery and regeneration of all panels.
〔発明の１−１的〕
本発明σ月、１的は、短時間の選択回収排気を行なうこ
とのできるクライオポンプを提供するにある。[Object 1-1 of the Invention] The first object of the present invention is to provide a cryopump capable of performing selective recovery and evacuation for a short period of time.
本発明はクライオポンプの回収再生用出口を複数個設け
て、各パネルおよびバッフル等の回収再生を並列に行な
うことにより、短時間で選択回収を完了するようにした
ものである。In the present invention, a cryopump is provided with a plurality of recovery and regeneration outlets, and each panel, baffle, etc. is recovered and regenerated in parallel, thereby completing selective recovery in a short time.
以下、本発明のクライオポンプの一実施例を図面を参照
して説明する。Hereinafter, one embodiment of the cryopump of the present invention will be described with reference to the drawings.
第４図および第５図に本発明の一実施例を示す。An embodiment of the present invention is shown in FIGS. 4 and 5.
第４図において、クライオポンプ１のガス回収再生側出
口をパネルおよびパンフルの列数だけ設け、夫々、個別
のゲートバルブ１３および出口ｉ側ダグ１へ１４に接続
する。In FIG. 4, the gas recovery and regeneration side outlets of the cryopump 1 are provided as many as the number of rows of panels and panfuls, and are connected to individual gate valves 13 and outlets 14 to the i-side dug 1, respectively.
動作を以下に説明する。クライオポンプの通常排気時に
は排気ガスは入力側ダグ１〜１２がら開いているゲート
バルブ１１を介してクライオポンプケース１内に導かれ
、排気ガスの成分であるガスａ、ｂ、ｃはそれぞれ冷却
面８，９．１０に凝縮捕獲される。このとき、グー１−
バルブ１３は閉じられる。The operation will be explained below. During normal exhaustion of the cryopump, the exhaust gas is guided into the cryopump case 1 via the gate valve 11 that is open from the input side dugs 1 to 12, and gases a, b, and c, which are the components of the exhaust gas, are respectively directed to the cooling surface. Condensed and captured on 8,9.10. At this time, goo 1-
Valve 13 is closed.
クライオポンプ内に蓄積したガスを選択回収排気する場
合には、第５図に示すように、まず、入口側ゲートバル
ブＪ】を閉じ、出ロ側ゲー１−バルブ１３を開く。シャ
ッタ１５および１６を図示しない開閉機構により閉じ、
パネル８２９およびＩＯを昇温して吸着ガスａ、ｂおよ
びＣをパネル８．９および１０よりＭ離し、夫々の出ロ
側ゲー１−バルブＩ３を通って夫々の出口側ダグ（−１
４に排気する。When selectively collecting and exhausting the gas accumulated in the cryopump, first close the inlet side gate valve J and open the outlet side gate valve 13, as shown in FIG. The shutters 15 and 16 are closed by an opening/closing mechanism (not shown),
The temperature of panels 829 and IO is increased to move the adsorbed gases a, b and C away from panels 8.9 and 10 by M, and the gases a, b and C are separated from panels 8.9 and 10 by passing through the respective outlet side gates 1 and 13 and the respective outlet side gates (-1).
Exhaust to 4.
この場合、パネル８，９および１０の吸着ガスａ、ｂお
よびＣを同時に選択回収排気できるので、クライオポン
プ全体の選択回収排気の時間短縮を可能にする。また第
６図は本発明の他の実施例を示すもので、シャッタの代
りにバルブ１７．１８を設けたものである。In this case, the adsorbed gases a, b, and C of the panels 8, 9, and 10 can be selectively recovered and exhausted at the same time, so that the time required for selectively recovering and exhausting the entire cryopump can be shortened. FIG. 6 shows another embodiment of the invention, in which valves 17 and 18 are provided in place of the shutter.
この実施例では、更に回収再生時、各パネルとバッフル
間の密閉度が」二る。In this embodiment, the degree of sealing between each panel and the baffle is further increased during recovery and regeneration.
本発明によれば、クライオポンプの再生時、各パネルお
よびバッフルの選択回収排気を同時にできるので、クラ
イオポンプ全体としての選択回収再生の時間短縮を行な
うことができる。According to the present invention, when the cryopump is regenerated, each panel and baffle can be selectively recovered and exhausted at the same time, so that the time required for selective recovery and regeneration of the cryopump as a whole can be shortened.
第１図は各種気体の蒸気圧曲線、第２図は従来のクライ
オポンプの排気時の動作説明図、第３図は同じく再生時
の動作説明図、第４図は本発明のクライオポンプの一実
施例の排気時の動作説明図、第５図は同じく再生時の動
作説明図、第６図は本発明の他の実施例の動作説明図で
ある。
１１・・・入口側ゲートバルブ、１２・・・入口側ダク
ト、１３・出ロ側ゲー１〜バルブ、１４・・・出口側ダ
グ１〜、ａ、ｂ、ｃ・・排気ガス、１．５．１６・・・
シャッタ、１度 （ｏｋ ）Fig. 1 is a vapor pressure curve of various gases, Fig. 2 is an explanatory diagram of the operation of a conventional cryopump during exhaust, Fig. 3 is an explanatory diagram of the operation during regeneration, and Fig. 4 is an illustration of the cryopump of the present invention. FIG. 5 is an explanatory diagram of the operation during exhaust of the embodiment, FIG. 5 is an explanatory diagram of the operation during regeneration, and FIG. 6 is an explanatory diagram of the operation of another embodiment of the present invention. 11... Inlet side gate valve, 12... Inlet side duct, 13... Outlet side gate 1~valve, 14... Outlet side duct 1~, a, b, c... Exhaust gas, 1.5 .16...
Shutter, 1 degree (ok)
Claims (1)
のケース内に設けられ、それぞれが異なるガスの成分を
凝縮・吸着する複数の吸着部材と、これら吸着部材を冷
却する冷却管と、前記各吸着部材間に開閉自在なシャツ
タヌはバルブを設け、前記シャッタ又はバルブは前記ケ
ース内に前記ガスを導入するときには前記各シャッタ又
はバルブが開放され、かつ、前記吸着部）ｊに吸着した
前記ガスを回収するときには、前記シャッタ又はバルブ
で前記吸着部材間を閉じる構造のクライオポンプにおい
て、ガス回収側の出口を複数個にすることを特徴とする
クライオポンプ。1. A case into which a gas consisting of a plurality of components is introduced, a plurality of adsorption members provided within the case, each of which condenses and adsorbs a different gas component, and a cooling pipe that cools these adsorption members; A valve that can be freely opened and closed is provided between each suction member, and the shutter or valve is opened when introducing the gas into the case, and the gas adsorbed on the suction part) is opened. A cryopump having a structure in which the shutter or the valve closes the space between the adsorption members when recovering the gas, the cryopump having a plurality of outlets on the gas recovery side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2279084A JPS60169686A (en) | 1984-02-13 | 1984-02-13 | Cryo-pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2279084A JPS60169686A (en) | 1984-02-13 | 1984-02-13 | Cryo-pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60169686A true JPS60169686A (en) | 1985-09-03 |
Family
ID=12092473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2279084A Pending JPS60169686A (en) | 1984-02-13 | 1984-02-13 | Cryo-pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60169686A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0726395A1 (en) * | 1995-02-07 | 1996-08-14 | Hauzer Techno Coating Europe Bv | Regeneration of cryocondensation pump panels in a vacuum chamber |
-
1984
- 1984-02-13 JP JP2279084A patent/JPS60169686A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0726395A1 (en) * | 1995-02-07 | 1996-08-14 | Hauzer Techno Coating Europe Bv | Regeneration of cryocondensation pump panels in a vacuum chamber |
| NL9500225A (en) * | 1995-02-07 | 1996-09-02 | Hauzer Techno Coating Europ B | Method for regenerating cryocondensation pump panels in a vacuum chamber, vacuum chamber suitable for carrying out the method and an apparatus for coating products provided with such a vacuum chamber. |
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