JPS60169517U - 光学式スケ−ル読取装置 - Google Patents

光学式スケ−ル読取装置

Info

Publication number
JPS60169517U
JPS60169517U JP5640184U JP5640184U JPS60169517U JP S60169517 U JPS60169517 U JP S60169517U JP 5640184 U JP5640184 U JP 5640184U JP 5640184 U JP5640184 U JP 5640184U JP S60169517 U JPS60169517 U JP S60169517U
Authority
JP
Japan
Prior art keywords
half mirror
scale
optical scale
interference lights
scale reader
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5640184U
Other languages
English (en)
Japanese (ja)
Other versions
JPH041456Y2 (enExample
Inventor
明 大手
浩二 秋山
西田　健二郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP5640184U priority Critical patent/JPS60169517U/ja
Publication of JPS60169517U publication Critical patent/JPS60169517U/ja
Application granted granted Critical
Publication of JPH041456Y2 publication Critical patent/JPH041456Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP5640184U 1984-04-17 1984-04-17 光学式スケ−ル読取装置 Granted JPS60169517U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5640184U JPS60169517U (ja) 1984-04-17 1984-04-17 光学式スケ−ル読取装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5640184U JPS60169517U (ja) 1984-04-17 1984-04-17 光学式スケ−ル読取装置

Publications (2)

Publication Number Publication Date
JPS60169517U true JPS60169517U (ja) 1985-11-11
JPH041456Y2 JPH041456Y2 (enExample) 1992-01-20

Family

ID=30579958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5640184U Granted JPS60169517U (ja) 1984-04-17 1984-04-17 光学式スケ−ル読取装置

Country Status (1)

Country Link
JP (1) JPS60169517U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013145863A (ja) * 2011-11-29 2013-07-25 Gigaphoton Inc ２光束干渉装置および２光束干渉露光システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5781510U (enExample) * 1980-11-05 1982-05-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5781510U (enExample) * 1980-11-05 1982-05-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013145863A (ja) * 2011-11-29 2013-07-25 Gigaphoton Inc ２光束干渉装置および２光束干渉露光システム

Also Published As

Publication number Publication date
JPH041456Y2 (enExample) 1992-01-20

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