JPS60168255U - 真空排気制御装置 - Google Patents

真空排気制御装置

Info

Publication number
JPS60168255U
JPS60168255U JP5640484U JP5640484U JPS60168255U JP S60168255 U JPS60168255 U JP S60168255U JP 5640484 U JP5640484 U JP 5640484U JP 5640484 U JP5640484 U JP 5640484U JP S60168255 U JPS60168255 U JP S60168255U
Authority
JP
Japan
Prior art keywords
exhaust
control device
mode
vacuum exhaust
exhaust control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5640484U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0424599Y2 (enrdf_load_stackoverflow
Inventor
庄田　純一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP5640484U priority Critical patent/JPS60168255U/ja
Publication of JPS60168255U publication Critical patent/JPS60168255U/ja
Application granted granted Critical
Publication of JPH0424599Y2 publication Critical patent/JPH0424599Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP5640484U 1984-04-17 1984-04-17 真空排気制御装置 Granted JPS60168255U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5640484U JPS60168255U (ja) 1984-04-17 1984-04-17 真空排気制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5640484U JPS60168255U (ja) 1984-04-17 1984-04-17 真空排気制御装置

Publications (2)

Publication Number Publication Date
JPS60168255U true JPS60168255U (ja) 1985-11-08
JPH0424599Y2 JPH0424599Y2 (enrdf_load_stackoverflow) 1992-06-10

Family

ID=30579964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5640484U Granted JPS60168255U (ja) 1984-04-17 1984-04-17 真空排気制御装置

Country Status (1)

Country Link
JP (1) JPS60168255U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6453076A (en) * 1987-08-19 1989-03-01 Jeol Ltd High vacuum pump protecting system in high vacuum exhaust system
JPH01239751A (ja) * 1988-03-18 1989-09-25 Jeol Ltd 真空装置における排気系

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6453076A (en) * 1987-08-19 1989-03-01 Jeol Ltd High vacuum pump protecting system in high vacuum exhaust system
JPH01239751A (ja) * 1988-03-18 1989-09-25 Jeol Ltd 真空装置における排気系

Also Published As

Publication number Publication date
JPH0424599Y2 (enrdf_load_stackoverflow) 1992-06-10

Similar Documents

Publication Publication Date Title
JPS60168255U (ja) 真空排気制御装置
JPS5945848U (ja) 真空装置の排気動作表示装置
JPS60195982U (ja) 真空ポンプ装置
JPS5954800U (ja) 真空システム
JPS6087383U (ja) ポンプ装置
JPS59117671U (ja) イオンスパツタリング装置
JPS587111Y2 (ja) 液封式真空ポンプにおける空気エゼクタ−の自動起動装置
JPS60122360U (ja) スパツタリング装置
JPS60167192U (ja) タ−ボ分子ポンプを用いた排気系
JPS60175896U (ja) 自動運転ポンプ装置
JPS60133186U (ja) 真空排気制御装置
JPS597271U (ja) エンジンコンプレツサのスタ−タ保護装置
JPS58161137U (ja) 燃料噴射ポンプの噴射時期制御装置
JPS6446897U (enrdf_load_stackoverflow)
JPS6143262U (ja) スパツタ装置用タ−ゲツト
JPS62176488U (enrdf_load_stackoverflow)
JPS60185242U (ja) サンプリング装置
JPS58144862U (ja) ガスレ−ザ装置
JPS59152436U (ja) リ−クテスト装置
JPS5986384U (ja) 密閉型電動圧縮機の起動装置
JPS59189124U (ja) 着火時期センサの付着物除去装置
JPS60148812U (ja) 水位検出装置
JPS5842372U (ja) ポンプの弁装置
JPS5952085U (ja) 真空装置
JPS58142716U (ja) 圧力制御装置