JPS6015985A - 半導体発光装置の製造方法 - Google Patents

半導体発光装置の製造方法

Info

Publication number
JPS6015985A
JPS6015985A JP58122724A JP12272483A JPS6015985A JP S6015985 A JPS6015985 A JP S6015985A JP 58122724 A JP58122724 A JP 58122724A JP 12272483 A JP12272483 A JP 12272483A JP S6015985 A JPS6015985 A JP S6015985A
Authority
JP
Japan
Prior art keywords
layer
mask
semiconductor
type
semiconductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58122724A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6355876B2 (enExample
Inventor
Masahiro Morimoto
森本　正弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58122724A priority Critical patent/JPS6015985A/ja
Publication of JPS6015985A publication Critical patent/JPS6015985A/ja
Publication of JPS6355876B2 publication Critical patent/JPS6355876B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
  • Led Devices (AREA)
JP58122724A 1983-07-06 1983-07-06 半導体発光装置の製造方法 Granted JPS6015985A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58122724A JPS6015985A (ja) 1983-07-06 1983-07-06 半導体発光装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58122724A JPS6015985A (ja) 1983-07-06 1983-07-06 半導体発光装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6015985A true JPS6015985A (ja) 1985-01-26
JPS6355876B2 JPS6355876B2 (enExample) 1988-11-04

Family

ID=14843015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58122724A Granted JPS6015985A (ja) 1983-07-06 1983-07-06 半導体発光装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6015985A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023512003A (ja) * 2020-01-31 2023-03-23 サンドヴィック マイニング アンド コンストラクション オーワイ さく岩機及び圧力エネルギー蓄積方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023512003A (ja) * 2020-01-31 2023-03-23 サンドヴィック マイニング アンド コンストラクション オーワイ さく岩機及び圧力エネルギー蓄積方法

Also Published As

Publication number Publication date
JPS6355876B2 (enExample) 1988-11-04

Similar Documents

Publication Publication Date Title
JPH09232625A (ja) 端面発光型光半導体素子及びその製造方法
JPS6015985A (ja) 半導体発光装置の製造方法
JPH04184973A (ja) 長波長光送信ｏｅｉｃ
JPH0461292A (ja) 半導体レーザ
JPH02228087A (ja) 半導体レーザ素子
JPS62166586A (ja) 半導体発光素子とその製造方法
JP3030932B2 (ja) 半導体微細構造の製造方法
JPH0437598B2 (enExample)
JPS6190489A (ja) 半導体レ−ザ装置およびその製造方法
JPS60126880A (ja) 半導体レ−ザ装置
JPS593872B2 (ja) 半導体発光装置の製造方法
JPS63142692A (ja) 半導体レ−ザ装置
JPH0558594B2 (enExample)
JPS60164383A (ja) 半導体レ−ザの製造方法
JPH0373584A (ja) 半導体レーザ装置
JPS6292385A (ja) 半導体レ−ザ
JPH04154183A (ja) 半導体レーザ及びその製造方法
JPS6161486A (ja) 半導体レ−ザ装置
JPS61176172A (ja) 半導体発光素子
JPS62216389A (ja) 半導体発光装置の製造方法
JPH0338893A (ja) 半導体発光素子およびその製造方法
JPH04215484A (ja) 半導体発光素子
JPS61248575A (ja) 半導体発光素子の製造方法
JPH02222590A (ja) 半導体レーザの作製方法
JPS6191990A (ja) 半導体レ−ザ装置およびその製造方法