JPS6015941A - Inspection device - Google Patents

Abstract

PURPOSE:To improve operation efficiency and reduce cost by continuously automating all inspection processes. CONSTITUTION:An article to be inspected is sucked up by a magnet mechanism from the predetermined position of a tray 1 and released on a walking beam 3 on the supply side. The article to be inspected placed on the walking beam 3 is positioned in the direction of conveyance and the direction rectangular to the conveyance, and conveyed at regular pitches. The article to be inspected 10 conveyed into a socket 13 is rocked up and down under the state in which the bottom of the article is held by an alignment heat mounted at the center in the socket 13, and an alignment is complated and a lead section in the article to be inspected is pressed by a pusher from an upper section. A test start signal is transmitted over a tester after pressing, and an acceptable one or a defective one is selected. The acceptable one conveyed by a walking beam 14 is accommodated in a tray 18 for a recovery section by the magnet mechanism.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to an inspection technique, and particularly to an inspection technique that is effective when applied to characteristic inspection of flat type semiconductor devices.

[Background Art] In the process of manufacturing semiconductor devices, when the characteristics of a product that has been assembled are inspected using a socket, operations such as inserting the product into the socket, taking it out, and transporting the product are all performed manually.

Therefore, if the work requires a large number of man-hours and is performed by unskilled workers,
In particular, when it comes to products that require short inspection times, manual work cannot be done in time, resulting in problems such as a reduction in the throughput of the inspection device and the occurrence of bending of the product during handling. Furthermore, due to negligence on the part of one worker, the circuit within the product may be damaged by static electricity due to forgetting to connect the charged ground.

[Object of the Invention] An object of the present invention is to provide an inspection technique that can improve efficiency by automating inspection work.

Another object of the present invention is to develop an inspection technique that requires fewer man-hours.
There is one for every J%.

Still another object of the present invention is to provide an inspection technique that can reduce costs by reducing the number of workers.

Still another object of the present invention is to provide an inspection technique that makes it possible to improve the reliability of high-temperature sorting through automatic inspection.

A further object of the present invention is to provide an inspection technique that can prevent deformation and damage to an object to be inspected.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[Summary of the Invention] A summary of typical inventions disclosed in this application is as follows in Section flj.

By automating all inspections, it is possible to achieve the aforementioned goals such as improved work efficiency.

[Example] Fig. 1 is a schematic perspective view showing the main structure of an inspection device that is an embodiment of the present invention, Fig. 2 is an enlarged partial perspective view of its supply side transport section, and Fig. 3 is a collection side transport section. FIG. 2 is an enlarged partial perspective view of FIG.

This embodiment is an example in which the present invention is applied to characteristic inspection and selection of a full-circle topper 7-cage type semiconductor device.

In this embodiment, the objects to be inspected are housed in the tray 1 in an uninspected state, and the tray 1 is housed in the rank 2 in a multi-stage manner. Although not shown, a pusher mechanism is provided at the rear of the rack 2 to push out the lowest tray 1 among the trays 1 in the rack 2 toward the front right in the figure.

A supply-side walking beam 3 (first conveyance means) is disposed at an example portion on the exit side of the rack 2 in a direction perpendicular to the rack 2 . This Umaking Beam 3
consists of a transport block 4 provided at the center in the longitudinal direction and general transport rails 5 on both sides of the transport block 4. A heater 6 is provided in the transport block 4 in the longitudinal direction. A plurality of recesses 7 having positioning surface surfaces 8 in a direction opposite to the elongated direction of the recesses 7 are formed on the upper surface, and an object to be inspected is placed in each of the four recesses 7. Positioning slopes 9 are also formed on the inside of both transport rails 5 in opposite directions, and these slopes 9 cooperate with the slopes 8 to position the object to be inspected in the X and Y directions. Perform from four directions.

Above the making beam 3, as shown in FIG. 2, there is a reservoir that attracts the objects 10 to be inspected in the tray 1 with magnetic attraction and feeds them one by one into the recesses 7 of the transport block 4. A magnet mechanism 11 is installed.

On the side of the front end of the walking beam 3, there is a rotary arm J\t1 for transferring the object to be inspected 10 conveyed by the walking beam 3 to the socket 13 of one column.
MtA I 2 (transport means) is provided. The rotating arm mechanism 12 has two holding arms extending perpendicularly to each other, and rotates intermittently at an angle of 45 degrees, for example, and moves up and down to hold the object 10 on the walking beam 3.
are placed on the socket 13 one by one.

The socket 13 has an alignment head 7 in its center that holds the bottom surface of the object to be inspected 10, and this alignment head positions the object to be measured by swinging upward:F.

Socket 13 is also? ! ! ! It is equipped with a pusher (not shown) for pressing the test object 10 from above to ensure contact with the measurement terminal.

In this embodiment, two sockets 13 are provided on both sides of the rotary arm mechanism 12 to save free time for inspection and to perform an efficient inspection. (not shown).

A recovery walking beam 14 (second tU feeding means) is provided on the opposite side of the walking beam 3 across the rotating arm mechanism 12 and the socket 1-13. This walking beam 14 is used to collect the object 10 to be inspected after the characteristic test in the socket 13 to a collection position. This walking beam 14 has substantially the same structure as the walking beam 3, with a transport block 15 at the center in the longitudinal direction and lft! ! Although the transport block 15 consists of a transport rail 16, a heater is not provided in the transport block 15.

Further, above the walking beam 14, as shown in FIG. 3, a magnet mechanism 17 that is substantially the same as the magnet mechanism 11 is installed. This magnet t
+MfM! Inspection on walking beam 14/
/ Of the 10 objects to be measured of FC7j, several good items (5
) Stored in a predetermined position on the pitch feeding type recovery tray 18. The trays 18 are stored empty in the rack 19 in several stages, and a pusher (not shown) pushes out the bottom tray one by one toward the front right side in the figure. Is it of good quality? ! ! ! A plurality of 1-rays 18 containing inspection objects 10 are stacked as shown at 13a.

Next, the operation of this embodiment will be explained.

The object to be inspected 10 is a flat package type semiconductor device as an example, which undergoes the previous process (cutting process, machining process).
The L-Ray 1 is stored in the rack 2 together with the empty tray 18, and the empty tray 18 for collection is also stored in the rack 19. Rack 2.19 cents to device. Rank 2.19
Lower the rack to a predetermined height by vertical movement of tray 1,
After positioning is performed by pushing the rear end of the empty tray 18, the tray groove portion is hooked with a claw (not shown) and pinch feeding is performed.

On the supply side, the object to be inspected 1o is sucked up from a predetermined position on the tray 1 by the magnet mechanism 11 and released onto the four parts 7 of the block 4 of the walking beam 3. The magnet mechanism 11 moves from the origin to the tray 1 to the inspected object 10.
Adsorption - Walking beam feeds to 3 - inspected item 1o
The operation is performed as one cycle up to the l'llll exit-origin return operation.

The object to be inspected 10 placed on the walking beam 3 is moved in the Ilt transport direction (Y direction) by the inclined surface 8 of the transport block 4.
The rectangular movement of the transport rail 5 positions the transport rail 5 in the direction perpendicular to the transport (X direction).

The conveyor block 4 of the making beam 3 is fixed, positioned by the rectangular movement of the conveyor rail 8, and 1. transported.

During the transportation, preliminary heating is performed using the heater 6 built into the transportation block 7.

The object to be inspected, which has arrived at the fourth section 7 at the end of Q, is transported into the socket i-13 by the rotating arm mechanism 12.

The holding arms of the rotating arm UIA structure 12 each rotate with respect to each socket 13, and rotate from the origin to 45° and move up and down.
One cycle is 90° rotation - vertical movement - 135° rotation return → origin, and the suction parts of the two holding arms installed at right angles attract and l'ill the inspected object 10 during vertical movement.
Take off your clothes. The object to be inspected 1O transported into the socket 13 is swung up and down with its bottom held by an alignment head installed in the center of the socket 13, and after alignment 1~ is completed, a pusher (Fig. (not shown) pressurizes the lead portion of the transported inspection object IO. After pressurizing, a test start signal is sent to the tester to determine whether it is good or bad.

The inspection and sorting work is performed for each of the sockets 13 in 2'), and the test is carried out in series to test the object 10 in one socket 13 while it is being transported to one socket 13. There is no free time between sockets 13.

When recovering inspected objects 10 that have been inspected, non-defective items are transported by the walking beam 14 in the detachment pocket of the rotary arm mechanism 12, and defective items are randomly collected by the removal operation of the l'llll M4 pocket itself.

The non-defective products transported by the walking beam 14 are stored in a tray 18 in the collection section by a magnet mechanism 17. Good products are collected by pitch-feeding the trays 18, and the full trays 18 are stacked as shown at 18a. on the other hand,
Empty trays 1 on the supply side are stacked in the same manner as shown in 1a.

According to this embodiment, there are effects such as reduction in man-hours, improvement in tester throughput, and unmanned screening during breaks.

Further, by holding the package f41r and feeding it m, effects such as a reduction in bending and an improvement in reliability of preheating temperature during high-temperature sorting can be obtained.

(1) Through the consistent automation of inspection work, work efficiency can be significantly improved.

(2) Automation makes it possible to perform inspections with fewer man-hours.

(3) Automation can reduce costs by reducing the number of workers.

(4) Automatic inspection prevents deformation of the inspected object. It should be possible to prevent scratches and to prevent bending of external leads, especially when the object to be inspected is a flat package type semiconductor device.

(5) Automatic inspection improves the reliability of high temperature sorting.
You can do it.

Although the invention made by the present inventor has been specifically explained above based on Examples, it goes without saying that the present invention is not limited to the Examples and can be modified in various ways without departing from the gist thereof. Nor.

For example, it is possible to use other transport means instead of the magnet mechanism 11.17 or the rotary arm mechanism 12, or to use other transport means instead of the walking beam 3.14.

[Field of Application] In the above explanation, the invention made by the present inventor was mainly applied to a Franthangage type semiconductor device, which is the field of application that formed the background of the invention, but the present invention is not limited thereto. For example, it can be widely used for other types of semiconductor devices or other test objects.

[Brief explanation of the drawing]

FIG. 1 is a schematic perspective view of an inspection device that is an embodiment of the present invention, FIG. 2 is a perspective view of an enlarged portion P of the supply side conveyance section, and FIG. 3 is a perspective view of an enlarged portion P of the collection side conveyance section. It is a diagram. 1... Tray (supply section), 2... Rack, 3...
Walking beam (first conveyance means), 4... Conveying block, 5... Conveyance rail, 6... Heater, 7...
... Concavity, 8... Slanted surface for positioning, 9... Slanted surface around 1 for positioning, 10... Object to be inspected, 11... Magnet (tilt, t2... Rotating arm mechanism (Transfer means), 13...Socket, 14...Walking beam (second 1 progressive transfer means), 15...Transport block, 1G...1Bt feed rail, 17...Macuneno I
・Mechanism, 18... Tray (collection department), 19... Rank.

Claims (1)

[Scope of Claims] (1) A supply section for supplying the object to be inspected, a first conveyance means for conveying the object to be inspected sent from the supply section, and an object to be inspected on the first conveyance means; A transport means for transporting the object to the inspection position, and the t-no! transported by this transport means. +An inspection means for inspecting the inspection object, a second conveyance means for conveying the inspected inspection object to a recovery position, and this second I! An inspection device that includes a collection section that collects the inspection object that has been transported by a transport means. 2. Inspection according to claim 1, characterized in that the transfer means comprises a rotating arm mechanism that individually transfers the objects to be inspected that have been transferred by the first transfer means to the inspection position. Device. 3. Σf day and Q・The second 1) transport means includes a transport block having a recess for clearly positioning the object to be inspected, and the object to be inspected placed on the four parts of this transport block. +1 more advantage of the transport rail while positioning! (The inspection device according to claim 1.