JPS60156562U - フオトレジスト基板の処理装置 - Google Patents

フオトレジスト基板の処理装置

Info

Publication number
JPS60156562U
JPS60156562U JP4436684U JP4436684U JPS60156562U JP S60156562 U JPS60156562 U JP S60156562U JP 4436684 U JP4436684 U JP 4436684U JP 4436684 U JP4436684 U JP 4436684U JP S60156562 U JPS60156562 U JP S60156562U
Authority
JP
Japan
Prior art keywords
liquid
protective layer
substrate
photoresist substrate
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4436684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0331961Y2 (https=
Inventor
冨田　正男
秀樹 大野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Nippon Synthetic Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Synthetic Chemical Industry Co Ltd filed Critical Nippon Synthetic Chemical Industry Co Ltd
Priority to JP4436684U priority Critical patent/JPS60156562U/ja
Publication of JPS60156562U publication Critical patent/JPS60156562U/ja
Application granted granted Critical
Publication of JPH0331961Y2 publication Critical patent/JPH0331961Y2/ja
Granted legal-status Critical Current

Links

JP4436684U 1984-03-27 1984-03-27 フオトレジスト基板の処理装置 Granted JPS60156562U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4436684U JPS60156562U (ja) 1984-03-27 1984-03-27 フオトレジスト基板の処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4436684U JPS60156562U (ja) 1984-03-27 1984-03-27 フオトレジスト基板の処理装置

Publications (2)

Publication Number Publication Date
JPS60156562U true JPS60156562U (ja) 1985-10-18
JPH0331961Y2 JPH0331961Y2 (https=) 1991-07-08

Family

ID=30556869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4436684U Granted JPS60156562U (ja) 1984-03-27 1984-03-27 フオトレジスト基板の処理装置

Country Status (1)

Country Link
JP (1) JPS60156562U (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55149947U (https=) * 1979-04-14 1980-10-29
JPS58178348A (ja) * 1982-04-13 1983-10-19 Nippon Synthetic Chem Ind Co Ltd:The 画像形成法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55149947U (https=) * 1979-04-14 1980-10-29
JPS58178348A (ja) * 1982-04-13 1983-10-19 Nippon Synthetic Chem Ind Co Ltd:The 画像形成法

Also Published As

Publication number Publication date
JPH0331961Y2 (https=) 1991-07-08

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