JPS6015645U - 半導体容量形圧力センサ - Google Patents

半導体容量形圧力センサ

Info

Publication number
JPS6015645U
JPS6015645U JP10838883U JP10838883U JPS6015645U JP S6015645 U JPS6015645 U JP S6015645U JP 10838883 U JP10838883 U JP 10838883U JP 10838883 U JP10838883 U JP 10838883U JP S6015645 U JPS6015645 U JP S6015645U
Authority
JP
Japan
Prior art keywords
pressure sensor
semiconductor capacitive
capacitive pressure
semiconductor
turgor pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10838883U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0134106Y2 (enrdf_load_stackoverflow
Inventor
三枝　徳治
平田　輝孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP10838883U priority Critical patent/JPS6015645U/ja
Publication of JPS6015645U publication Critical patent/JPS6015645U/ja
Application granted granted Critical
Publication of JPH0134106Y2 publication Critical patent/JPH0134106Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP10838883U 1983-07-13 1983-07-13 半導体容量形圧力センサ Granted JPS6015645U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10838883U JPS6015645U (ja) 1983-07-13 1983-07-13 半導体容量形圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10838883U JPS6015645U (ja) 1983-07-13 1983-07-13 半導体容量形圧力センサ

Publications (2)

Publication Number Publication Date
JPS6015645U true JPS6015645U (ja) 1985-02-02
JPH0134106Y2 JPH0134106Y2 (enrdf_load_stackoverflow) 1989-10-17

Family

ID=30252891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10838883U Granted JPS6015645U (ja) 1983-07-13 1983-07-13 半導体容量形圧力センサ

Country Status (1)

Country Link
JP (1) JPS6015645U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0134106Y2 (enrdf_load_stackoverflow) 1989-10-17

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