JPS60154679A - 圧覚センサ - Google Patents

圧覚センサ

Info

Publication number
JPS60154679A
JPS60154679A JP59011589A JP1158984A JPS60154679A JP S60154679 A JPS60154679 A JP S60154679A JP 59011589 A JP59011589 A JP 59011589A JP 1158984 A JP1158984 A JP 1158984A JP S60154679 A JPS60154679 A JP S60154679A
Authority
JP
Japan
Prior art keywords
pressure
detecting
unit cells
strain gauge
sensitive structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59011589A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0446464B2 (esLanguage
Inventor
Teizo Takahama
高浜　禎造
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Corporate Research and Development Ltd
Priority to JP59011589A priority Critical patent/JPS60154679A/ja
Publication of JPS60154679A publication Critical patent/JPS60154679A/ja
Publication of JPH0446464B2 publication Critical patent/JPH0446464B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
JP59011589A 1984-01-25 1984-01-25 圧覚センサ Granted JPS60154679A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59011589A JPS60154679A (ja) 1984-01-25 1984-01-25 圧覚センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59011589A JPS60154679A (ja) 1984-01-25 1984-01-25 圧覚センサ

Publications (2)

Publication Number Publication Date
JPS60154679A true JPS60154679A (ja) 1985-08-14
JPH0446464B2 JPH0446464B2 (esLanguage) 1992-07-30

Family

ID=11782085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59011589A Granted JPS60154679A (ja) 1984-01-25 1984-01-25 圧覚センサ

Country Status (1)

Country Link
JP (1) JPS60154679A (esLanguage)

Also Published As

Publication number Publication date
JPH0446464B2 (esLanguage) 1992-07-30

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