JPS60154318A - Manufacture of magnetic head - Google Patents

Abstract

PURPOSE:To process lots of magnetic heads at the same time with high accuracy by providing a resistance to both sides of the magnetic heads, adjusting the slope of processing so that the margin of the resistor is identical to the parallelism between the conversion gap and the resistor and processing the head in parallel with the conversion gap. CONSTITUTION:Two resistor 2 are arranged so as to be in parallel with a straight line A tying each gap zero position of a thin film element 1. The parallelism delta between the straight line A and the straight line B tying the two resistors 2 is detected by a high magnification and processing is attained so that the slope DELTAW on the basis of the two resistors is equal to the parallelism delta. Thus, the slope DELTAW is given by DELTAW=W0(R1/r1-R2/r2)=delta, where R1, R2 are initial resistance of each resistor, r1, r2 are resistance on the way of processing and W0 is a know value. Since the W0 and delta are known, the slope is decided by calculating the ratio of the initial resistance R1, R2 to the resistance r1, r2 on the way of processing. Thus, lots of magnetic heads are processed at the same time with high accuracy.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a method for manufacturing a magnetic head, and in particular to an endorsement method suitable for processing the gap depth point of an electromagnetic conversion gap of a thin film magnetic head with high precision. Regarding.

[Background of the invention]

A conventional embodiment will be explained with reference to FIGS. 1 to 3.

In FIG. 1, the masks are aligned so that they are parallel to the straight line A connecting the respective zero gap positions of the thin film head element section 1.
The arrangement of two resistors 2 formed in separate steps is shown.

Straight line B indicates a line connecting two resistors 2.

FIG. 2 shows a PP cross section of the device 1 shown in FIG.

Ultimately, it is necessary to process the gap depth G so that it becomes equal for each element. A straight line A in FIG. 1 is a straight line connecting the gap position 3 in FIG.

FIG. 3 is a diagram showing the resistor 2 in the process of being processed, and shows a state in which the resistor widths are Wl and WI, respectively.

Therefore, in this case, the machining inclination is ΔW, which is the difference between WI and WI, and it is necessary to correct the inclination in this part. Here, the initial resistance of each resistor'! 1-fLt.

Assuming R2, the resistance when shown in Figure 3'! If I"11"2, then VVl and VJz are as follows, and therefore, the amount of inclination ΔW is as follows.As Kali and WO are known values, it is necessary to calculate the ratio between the initial resistance and the resistance value during machining. yo p1 tilt correction'
! i was determined.

By the way, as shown in FIG. 4, the straight line A connecting the element part 1 gap zero position and the straight line B connecting the two resistors are formed in separate processes, so the parallelism δ is 0.5 to 1. 0μm/20
Therefore, if processing is continued so that the resistance ratio is equal, the parallelism δ between straight line A and straight line B will directly occur as a variation in the gap depth.

[Purpose of the invention]

An object of the present invention is to increase the tip gap depth of a magnetic head by
In order to process a large number of devices at the same time, it is an object of the present invention to provide a method for correcting the inclination during processing with high accuracy and commensurate with the gap depth control resistor, the element gear gear zero, and the parallelism.

[Summary of the invention]

The present invention applies to both sides of a large number of magnetic heads, or
A separate resistor is provided in the middle, approximately parallel to the transducer gap of the magnetic head, and the inclination of the machining is adjusted so that the remainder of this resistor is equal to the parallelism between the transducer gap and the resistor. However, by machining parallel to the conversion gap, each of a large number of heads can be machined with high precision. [Embodiment of the Invention] An embodiment of the present invention is shown in Figs. 4 to 6 below. I will explain it to you.

Similar to FIG. 1, FIG. 4 shows two resistors 2 formed in parallel with the straight line iv1glA connecting the zero gap positions of the thin film elements 1, but they are formed in separate steps. Therefore, the parallelism of straight line A and straight line B connecting two resistors 2 is δ
It's happening a lot.

In the conventional embodiment, the inclination amount ΔW of machining with two resistors as a reference is expressed as ( , and the inclination correction amount was determined so that ΔW=0.

In this example, the straight line mA connecting the zero position of the smooth tightening gap is
and the parallelism δ of the straight line B connecting the two resistors 2 is 2000.
Post-processing tilt amount ΔW measured at high magnification of 2x to 4000x
is processed so that it becomes equal to the parallelism δ. Therefore, the amount of inclination ΔW is as follows. Since WO and δ are known values, the amount of inclination correction can be determined by calculating the ratio of the initial resistance and the resistance value during processing.

FIG. 5 shows an embodiment of a processing device 9 having an inclination correction device 8 on a table 6 of a grinding machine 7 having a vertical spindle 5 and a table 6 that moves left and right.

The tilt amount correction device 8 has a pulse motor 13, 1/200 below a chuck table 12 on which is mounted a processing jig 11 in which four abrasions 10 each having 10 to 20 thin film head elements 1 are bonded with wax or the like. It has a wedge 140 balls 15 with a slope of ~1/40 Oi degree, and a pulse motor 1.
3, the wedge 14 is moved left and right, and the chuck table 12 is moved up and down via the ball 15.
It is a mechanism that slightly corrects the tilt at 0 parts.

For example, if the slope of the wedge 14 is 1/200 and the length ratio of the core block 10 and the chuck table 12 is 175, by moving the wedge 14 to the left by 0.05 mm, the core block 10 can be moved in half. It rotates a small amount in the direction of the hour hand and can correct the inclination by 0.05 mm/1000 = 0.05 μm.

In this embodiment, after inputting the parallelism δ into the in-process control unit 16 in advance, the grinding wheel 1 is attached to the lower end of the spindle 5.
After processing the core block 10 in step 7, the resistance values from the resistors 2 provided on the left and right sides of the core block 10 are measured on the FPC.
The method is such that the in-process control unit 16 gives a signal to the pulse motor 13 so that the measurement is performed in-process using the in-process controller 18, etc., and applied to the calculation formula shown above.

The in-process control unit 16 also performs signal correction with the grinding machine control unit 19, and repeats machining, resistance value measurement, inclination correction, and machining in a well-timed manner.

FIG. 6 shows the state after implementation. After processing, the parallelism δ of the straight line A connecting the zero gap position and the straight line iB connecting the two resistors 2 is δ=WI W! However, it is possible to machine many elements at the same time with the same gap depth G parallel to the processing surface C, and it is possible to achieve highly accurate gap depths for all elements. .

In this embodiment, the spindle 5 is of a vertical type and the tilt amount correction device 8 is of a wedge type, but even if it is a horizontal spindle or a tilt amount correction device that uses a combination of piezoelectric elements etc. Needless to say, it's a good thing.

〔Effect of the invention〕

According to the present invention, the inclination during processing can be set with high precision according to the parallelism of the straight line A connecting the element gear zero and the straight line B connecting the two resistors 2, so that the magnetic head can be Many pieces can be processed simultaneously with high precision.

[Brief explanation of drawings]

Figure 1 is a diagram showing the positional relationship between the thin film head element and the resistor;
The figure shows a sectional view taken along the line P-P of the thin film head element 1 in Fig. 1, Fig. 3 shows the shape of a resistor in the process of conventional processing, and Fig. 4 shows the thin film head element and the resistor as in Fig. 1. Figure 5 is a diagram showing the positional relationship of the body, and Figure 6 is a configuration diagram showing one implementation state of the present invention.
FIG. 3 is a positional relationship diagram between a thin film head element and a resistor after implementing the present invention. DESCRIPTION OF SYMBOLS 1... Thin film head element part, 2... Resistor, 4...
Thin film magnetic material, 5... spindle, 6... table,
7... Grinding machine, 8... Inclination amount correction device, 9... Processing device, 1o... Core block, 11... Processing jig, 12... Chuck table, 13... Pulse Motor 114... Wedge, 15°°° ball, 16°°
I'p°7 control section・17-°°grid

Claims (1)

[Claims] 1. In a processing method that detects the resistance value of a resistor that has a correlation with the amount of processing and controls the amount of processing, the conversion gap of each of multiple thin film heads and the parallelism of multiple resistors installed are measured in advance. After that, a value corresponding to the parallelism is set and processed, and the ratio of the resistance value of the resistor during processing and the initial resistance value before processing is measured, and the ratio of each resistor is determined. A method for manufacturing a magnetic head, characterized in that the tip of the magnetic head is machined with high precision while correcting the slope of the process so that the amount of machining imbalance determined from the difference is equal to the set value.