JPS6015246Y2 - 電子顕微鏡等における試料装置 - Google Patents

電子顕微鏡等における試料装置

Info

Publication number
JPS6015246Y2
JPS6015246Y2 JP9785579U JP9785579U JPS6015246Y2 JP S6015246 Y2 JPS6015246 Y2 JP S6015246Y2 JP 9785579 U JP9785579 U JP 9785579U JP 9785579 U JP9785579 U JP 9785579U JP S6015246 Y2 JPS6015246 Y2 JP S6015246Y2
Authority
JP
Japan
Prior art keywords
sample
rotation
sample holder
guide rod
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9785579U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5615567U (enExample
Inventor
公郎 大井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP9785579U priority Critical patent/JPS6015246Y2/ja
Publication of JPS5615567U publication Critical patent/JPS5615567U/ja
Application granted granted Critical
Publication of JPS6015246Y2 publication Critical patent/JPS6015246Y2/ja
Expired legal-status Critical Current

Links

JP9785579U 1979-07-16 1979-07-16 電子顕微鏡等における試料装置 Expired JPS6015246Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9785579U JPS6015246Y2 (ja) 1979-07-16 1979-07-16 電子顕微鏡等における試料装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9785579U JPS6015246Y2 (ja) 1979-07-16 1979-07-16 電子顕微鏡等における試料装置

Publications (2)

Publication Number Publication Date
JPS5615567U JPS5615567U (enExample) 1981-02-10
JPS6015246Y2 true JPS6015246Y2 (ja) 1985-05-14

Family

ID=29330641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9785579U Expired JPS6015246Y2 (ja) 1979-07-16 1979-07-16 電子顕微鏡等における試料装置

Country Status (1)

Country Link
JP (1) JPS6015246Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60125570U (ja) * 1984-01-31 1985-08-23 三井東圧化学株式会社 ガスの検知素子
JP6421041B2 (ja) 2015-01-13 2018-11-07 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Also Published As

Publication number Publication date
JPS5615567U (enExample) 1981-02-10

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