JPS6015246Y2 - Sample equipment for electron microscopes, etc. - Google Patents

Description

[Detailed explanation of the idea] The present invention relates to a sample device for an electron microscope or the like.

As a sample device for an electron microscope, a side entry type device, as shown in FIG. 1, is often used in which a sample is inserted from a direction perpendicular to the electron beam optical axis.

In the figure, reference numeral 1 denotes a mirror body 2 of an electron microscope, which is a cylindrical preliminary chamber attached to the side wall of the mirror body 1, and the preliminary chamber is arranged so that its axial center is perpendicular to the electron beam optical axis Z. .

Also, one end (vacuum side) of the preliminary chamber is connected to the mirror body 1 through the communication hole 3.
The other end is open to the atmosphere.

4 is an air lock valve for closing the communication hole 3;
The air lock valve is rotatably mounted within the preliminary chamber 2 via shafts 5a and 5b, and a bevel gear 6 is fixed to the shaft 5a of the air lock valve 4.

A bevel gear 8 fixed to a cylinder 7 rotatably inserted into the preliminary chamber 2 meshes with the bevel gear.

Therefore, when the cylinder 7 is rotated, the rotation is transmitted to the bevel gear 6 by the bevel gear 8, so that the air lock valve 4 is connected to the shaft 5.
It rotates around a and 5b, thereby communicating or cutting off the interior of the mirror body 1 and the interior of the preliminary chamber 2.

Reference numeral 9 denotes a sample holder movably inserted into the cylindrical body 7 while keeping airtight with an O-ring 10. The tip is formed into a plate shape, and holds the sample 11. The position regulating guide rod 12 is installed.

A guide rod 1 is provided at the end of the preliminary chamber 2 and the cylinder 7 on the atmospheric side.
Long grooves 13 and 14 are respectively formed along the axial direction for fitting the two.

Further, the open portion of the long groove 13 of the preliminary chamber 2 is further provided with a notch 15 formed in the circumferential direction as shown in FIG.

Now, when the air lock valve 4 is closed as shown in FIG. 1, the long groove 14 of the cylinder body 7 is deviated from the long groove 13 of the preliminary chamber 2 by a certain rotation angle, as shown by the dotted line a in FIG.

Therefore, in this state, after inserting the sample holder '-9 into the cylindrical body 7 and fitting the guide rod 12 into the long groove 14 and the notch 15, the sample holder 9 When the cylinder 14 is turned, the cylinder 14 rotates at the same time, so the shafts 5a and 5b rotate through the bevel gears 8 and 6, and the air lock valve 4 is opened.

After that, if you push the sample holder 9 to the left in Fig. 1,
Since the guide rod 12 moves within the length 413.14, the sample 11 can be set between the upper magnetic pole 16a and the lower magnetic pole 16b of the objective lens.

However, in such a structure, since a long groove for guiding the guide rod is formed in the preparatory chamber, the sample holder has the disadvantage that it becomes very long.

In view of these points, the present invention provides a sample device in which the length of the sample holder can be made as short as possible, and will be explained in detail below based on the embodiment of the device shown in FIG.

Note that the same numbers as in FIGS. 1 and 2 indicate the same components.

That is, the present invention is characterized in that a long groove 17 is formed in the sample holder 9 along the axial direction, and the guide rod 12 is movably mounted within this long groove 17.

To install the guide rod 12 into the long groove 17, for example, as shown in the figure, a ring-shaped piece 18 is loosely fitted around the outer periphery of the sample N holder 9, and the guide rod 12 is passed through this piece. The lower end of the groove 17 is inserted into the long groove 17.

Further, the open end of the cylinder 7 has a recess 19 into which the guide rod 12 and the piece 18 are fitted.

Furthermore, at the open end of the preliminary chamber 2, there is a cutout 20 (this cutout 2
0 has the same shape as the notch 15 shown in FIG. 2), which is constant along the circumferential direction.

Furthermore, a recess 21 is formed at the end of the notch 20 for guiding the linear movement of the sample holder 9 by fitting the guide rod 12 therein.

Now, as shown in FIG. 3, after inserting the sample holder 9 into the cylinder 7, move the piece 18 to position the guide rod 12 at the leftmost end of the long groove 17 provided in the sample holder. The guide rod 12 is fitted into the recess 19 of the cylinder 7 and the cutout 20 of the preliminary chamber 2.

When rotating the sample holder 9 in this state, the cylinder body 7 rotates in the same direction via the guide rod 12, so the air lock valve 4
opens.

After that, by pushing the sample holder 9 to the left in FIG. 3, the sample holder 9
move linearly in the same direction, so the sample 11 is placed in the upper magnetic pole 16a.
and the lower magnetic pole 16b.

With the above configuration, the length of the sample holder can be made shorter than the conventional one by an amount corresponding to the distance the sample holder is moved from the preliminary chamber to the predetermined position within the mirror body.

Similarly, since the length of the preliminary chamber and the cylinder on the atmosphere side is shortened, the entire device can be made more compact.Moreover, since the center of gravity is closer to the mirror body, the structure is resistant to vibration, which has a great practical effect. has.

It should be noted that the above-mentioned embodiments are merely illustrative of the present invention, and many modifications may be made to its implementation.

For example, in a side-entry type sample device in which the sample is inserted from the direction perpendicular to the optical axis, the sample holder is elongated as in the above embodiment, and the sample holder is inserted into and removed from the mirror body. One has a structure in which the objective lens can be exchanged, and the other has a structure in which a movement stage is built into the objective lens, and a sample holder is attached to this movement stage, and the movement stage is moved horizontally to give slight movement to the sample. There is something.

In the latter structure, since the sample holder is mounted on a moving stage, a sample exchange rod is required to take out the sample holder into the atmosphere.

Therefore, in this case, it goes without saying that the present invention can be applied to such a sample exchange rod.

[Brief explanation of drawings]

1 and 2 are diagrams for explaining the prior art, FIG. 3 is a sectional view showing an embodiment of the present invention, and FIG. 4 is a partial plan view of the preliminary chamber. 1: Mirror body, 2: Preliminary chamber, 3: Communication hole, 4: Air lock valve, 5a, 5b: Shaft, 6 and 8: Bevel gear, 7: Cylindrical body,
9: Sample holder, 10: 0 ring, 11: Sample, 12
Ni guide rod, 13.14 and 17: long groove, 15 and 20
: cutout, 16a and 16b: upper and lower magnetic poles of objective lens, 18 two frames, 19, 21: concave portion.

Claims (1)

[Scope of utility model registration request] A cylindrical preliminary chamber is attached to the side wall of the mirror body and has a communication hole between it and the sample chamber, an air lock valve for controlling the opening and closing of the communication hole, and an airtight airtight chamber inside the preliminary chamber. a cylindrical body rotatably provided; a mechanism for converting the rotation of the cylindrical body into an opening/closing motion of the air lock valve; for converting the rotation of the sample holder or sample exchange rod into the rotation of the cylindrical body and for inserting the sample holder or sample exchange rod into the sample chamber along a predetermined straight line. In a device provided with means for guiding,
A means for converting rotation of the sample holder or sample exchange rod into rotation of the cylinder and guiding the sample holder or sample exchange rod to be inserted into the sample chamber along a predetermined straight line is a means for converting rotation of the sample holder or sample exchange rod into rotation of the cylinder, and for guiding the sample holder or sample exchange rod to be inserted into the sample chamber along a predetermined straight line. a long groove formed in the exchange rod, a guide rod whose one end is inserted into the long groove and is attached to the sample holder or the sample exchange rod so as to be movable along the long groove, and the cylinder as the guide rod rotates. Consisting of a recess for fitting a guide rod provided in the cylindrical body to rotate the body, and a recess provided in the preliminary chamber for regulating the rotation of the guide rod when the guide rod is inserted. A sample device for an electron microscope, etc., characterized by: