JPS5615567U - - Google Patents
Info
- Publication number
- JPS5615567U JPS5615567U JP9785579U JP9785579U JPS5615567U JP S5615567 U JPS5615567 U JP S5615567U JP 9785579 U JP9785579 U JP 9785579U JP 9785579 U JP9785579 U JP 9785579U JP S5615567 U JPS5615567 U JP S5615567U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9785579U JPS6015246Y2 (ja) | 1979-07-16 | 1979-07-16 | 電子顕微鏡等における試料装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9785579U JPS6015246Y2 (ja) | 1979-07-16 | 1979-07-16 | 電子顕微鏡等における試料装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5615567U true JPS5615567U (enExample) | 1981-02-10 |
| JPS6015246Y2 JPS6015246Y2 (ja) | 1985-05-14 |
Family
ID=29330641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9785579U Expired JPS6015246Y2 (ja) | 1979-07-16 | 1979-07-16 | 電子顕微鏡等における試料装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6015246Y2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60125570U (ja) * | 1984-01-31 | 1985-08-23 | 三井東圧化学株式会社 | ガスの検知素子 |
| WO2016114033A1 (ja) * | 2015-01-13 | 2016-07-21 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置 |
-
1979
- 1979-07-16 JP JP9785579U patent/JPS6015246Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60125570U (ja) * | 1984-01-31 | 1985-08-23 | 三井東圧化学株式会社 | ガスの検知素子 |
| WO2016114033A1 (ja) * | 2015-01-13 | 2016-07-21 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置 |
| JP2016131060A (ja) * | 2015-01-13 | 2016-07-21 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
| US10192713B2 (en) | 2015-01-13 | 2019-01-29 | Hitachi High-Technologies Corporation | Charged particle beam device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6015246Y2 (ja) | 1985-05-14 |