JPS60149798A - めつき装置 - Google Patents
めつき装置Info
- Publication number
- JPS60149798A JPS60149798A JP291884A JP291884A JPS60149798A JP S60149798 A JPS60149798 A JP S60149798A JP 291884 A JP291884 A JP 291884A JP 291884 A JP291884 A JP 291884A JP S60149798 A JPS60149798 A JP S60149798A
- Authority
- JP
- Japan
- Prior art keywords
- plating
- plating solution
- plated
- outflow
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007747 plating Methods 0.000 title claims abstract description 115
- 239000007788 liquid Substances 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 abstract 5
- 239000012212 insulator Substances 0.000 description 15
- 239000010408 film Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000005323 electroforming Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- FDDDEECHVMSUSB-UHFFFAOYSA-N sulfanilamide Chemical compound NC1=CC=C(S(N)(=O)=O)C=C1 FDDDEECHVMSUSB-UHFFFAOYSA-N 0.000 description 1
- 229940124530 sulfonamide Drugs 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP291884A JPS60149798A (ja) | 1984-01-11 | 1984-01-11 | めつき装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP291884A JPS60149798A (ja) | 1984-01-11 | 1984-01-11 | めつき装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60149798A true JPS60149798A (ja) | 1985-08-07 |
| JPH0561359B2 JPH0561359B2 (enrdf_load_stackoverflow) | 1993-09-06 |
Family
ID=11542726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP291884A Granted JPS60149798A (ja) | 1984-01-11 | 1984-01-11 | めつき装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60149798A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02185999A (ja) * | 1989-01-11 | 1990-07-20 | Nec Corp | 電気メッキ槽 |
| EP3830320A1 (de) * | 2018-07-30 | 2021-06-09 | RENA Technologies GmbH | Strömungsgenerator, abscheidevorrichtung und verfahren zum abscheiden eines materials |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH068630U (ja) * | 1992-07-06 | 1994-02-04 | 新明和工業株式会社 | 機械式駐車装置の安全装置 |
-
1984
- 1984-01-11 JP JP291884A patent/JPS60149798A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02185999A (ja) * | 1989-01-11 | 1990-07-20 | Nec Corp | 電気メッキ槽 |
| EP3830320A1 (de) * | 2018-07-30 | 2021-06-09 | RENA Technologies GmbH | Strömungsgenerator, abscheidevorrichtung und verfahren zum abscheiden eines materials |
| JP2024037950A (ja) * | 2018-07-30 | 2024-03-19 | レナ テクノロジー ゲーエムベーハー | フロー発生器、成膜装置及び材料の成膜方法 |
| US12221713B2 (en) | 2018-07-30 | 2025-02-11 | RENA Technologies GmbH | Flow generator, deposition device and method for the deposition of a material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0561359B2 (enrdf_load_stackoverflow) | 1993-09-06 |
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