JPS60144689A - 定盤およびその製造方法 - Google Patents

定盤およびその製造方法

Info

Publication number
JPS60144689A
JPS60144689A JP172184A JP172184A JPS60144689A JP S60144689 A JPS60144689 A JP S60144689A JP 172184 A JP172184 A JP 172184A JP 172184 A JP172184 A JP 172184A JP S60144689 A JPS60144689 A JP S60144689A
Authority
JP
Japan
Prior art keywords
surface plate
base
magnetic
ceramic powder
pores
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP172184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0372956B2 (enrdf_load_stackoverflow
Inventor
成賢 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP172184A priority Critical patent/JPS60144689A/ja
Publication of JPS60144689A publication Critical patent/JPS60144689A/ja
Publication of JPH0372956B2 publication Critical patent/JPH0372956B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Units (AREA)
  • Powder Metallurgy (AREA)
  • Manufacture Of Alloys Or Alloy Compounds (AREA)
JP172184A 1984-01-09 1984-01-09 定盤およびその製造方法 Granted JPS60144689A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP172184A JPS60144689A (ja) 1984-01-09 1984-01-09 定盤およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP172184A JPS60144689A (ja) 1984-01-09 1984-01-09 定盤およびその製造方法

Publications (2)

Publication Number Publication Date
JPS60144689A true JPS60144689A (ja) 1985-07-31
JPH0372956B2 JPH0372956B2 (enrdf_load_stackoverflow) 1991-11-20

Family

ID=11509426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP172184A Granted JPS60144689A (ja) 1984-01-09 1984-01-09 定盤およびその製造方法

Country Status (1)

Country Link
JP (1) JPS60144689A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005027206A1 (ja) * 2003-09-11 2005-03-24 Nikon Corporation 定盤、ステージ装置及び露光装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005027206A1 (ja) * 2003-09-11 2005-03-24 Nikon Corporation 定盤、ステージ装置及び露光装置

Also Published As

Publication number Publication date
JPH0372956B2 (enrdf_load_stackoverflow) 1991-11-20

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