JPS60143770U - 電子衝撃型蒸着装置 - Google Patents

電子衝撃型蒸着装置

Info

Publication number
JPS60143770U
JPS60143770U JP3241184U JP3241184U JPS60143770U JP S60143770 U JPS60143770 U JP S60143770U JP 3241184 U JP3241184 U JP 3241184U JP 3241184 U JP3241184 U JP 3241184U JP S60143770 U JPS60143770 U JP S60143770U
Authority
JP
Japan
Prior art keywords
electron impact
evaporation equipment
vapor deposition
vapor
impact evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3241184U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238925Y2 (enExample
Inventor
俊敬 鳥飼
尾鍋　研太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP3241184U priority Critical patent/JPS60143770U/ja
Publication of JPS60143770U publication Critical patent/JPS60143770U/ja
Application granted granted Critical
Publication of JPH0238925Y2 publication Critical patent/JPH0238925Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3241184U 1984-03-07 1984-03-07 電子衝撃型蒸着装置 Granted JPS60143770U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3241184U JPS60143770U (ja) 1984-03-07 1984-03-07 電子衝撃型蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3241184U JPS60143770U (ja) 1984-03-07 1984-03-07 電子衝撃型蒸着装置

Publications (2)

Publication Number Publication Date
JPS60143770U true JPS60143770U (ja) 1985-09-24
JPH0238925Y2 JPH0238925Y2 (enExample) 1990-10-19

Family

ID=30533899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3241184U Granted JPS60143770U (ja) 1984-03-07 1984-03-07 電子衝撃型蒸着装置

Country Status (1)

Country Link
JP (1) JPS60143770U (enExample)

Also Published As

Publication number Publication date
JPH0238925Y2 (enExample) 1990-10-19

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