JPS60142529A - 回路基板等の検査装置 - Google Patents

回路基板等の検査装置

Info

Publication number
JPS60142529A
JPS60142529A JP25015483A JP25015483A JPS60142529A JP S60142529 A JPS60142529 A JP S60142529A JP 25015483 A JP25015483 A JP 25015483A JP 25015483 A JP25015483 A JP 25015483A JP S60142529 A JPS60142529 A JP S60142529A
Authority
JP
Japan
Prior art keywords
probe
contact
protection plate
support plate
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25015483A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0329175B2 (enrdf_load_stackoverflow
Inventor
Ko Nakajima
中島　鋼
Katsutoshi Saida
斉田　勝利
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokowo Co Ltd
Original Assignee
Yokowo Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokowo Mfg Co Ltd filed Critical Yokowo Mfg Co Ltd
Priority to JP25015483A priority Critical patent/JPS60142529A/ja
Publication of JPS60142529A publication Critical patent/JPS60142529A/ja
Publication of JPH0329175B2 publication Critical patent/JPH0329175B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP25015483A 1983-12-28 1983-12-28 回路基板等の検査装置 Granted JPS60142529A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25015483A JPS60142529A (ja) 1983-12-28 1983-12-28 回路基板等の検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25015483A JPS60142529A (ja) 1983-12-28 1983-12-28 回路基板等の検査装置

Publications (2)

Publication Number Publication Date
JPS60142529A true JPS60142529A (ja) 1985-07-27
JPH0329175B2 JPH0329175B2 (enrdf_load_stackoverflow) 1991-04-23

Family

ID=17203620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25015483A Granted JPS60142529A (ja) 1983-12-28 1983-12-28 回路基板等の検査装置

Country Status (1)

Country Link
JP (1) JPS60142529A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS637370U (enrdf_load_stackoverflow) * 1986-07-01 1988-01-19
JPS6361788U (enrdf_load_stackoverflow) * 1986-10-14 1988-04-23
JPH0194274A (ja) * 1987-10-07 1989-04-12 Matsushita Electron Corp 半導体装置測定用器具
JP2016223955A (ja) * 2015-06-02 2016-12-28 日置電機株式会社 プローブユニットおよび測定装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS637370U (enrdf_load_stackoverflow) * 1986-07-01 1988-01-19
JPS6361788U (enrdf_load_stackoverflow) * 1986-10-14 1988-04-23
JPH0194274A (ja) * 1987-10-07 1989-04-12 Matsushita Electron Corp 半導体装置測定用器具
JP2016223955A (ja) * 2015-06-02 2016-12-28 日置電機株式会社 プローブユニットおよび測定装置

Also Published As

Publication number Publication date
JPH0329175B2 (enrdf_load_stackoverflow) 1991-04-23

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