JPS60139241U - 荷電粒子分析器の電離真空計 - Google Patents

荷電粒子分析器の電離真空計

Info

Publication number
JPS60139241U
JPS60139241U JP2706584U JP2706584U JPS60139241U JP S60139241 U JPS60139241 U JP S60139241U JP 2706584 U JP2706584 U JP 2706584U JP 2706584 U JP2706584 U JP 2706584U JP S60139241 U JPS60139241 U JP S60139241U
Authority
JP
Japan
Prior art keywords
charged particle
particle analyzer
ionization vacuum
vacuum gauge
ionization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2706584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0338669Y2 (enExample
Inventor
浩 竹内
好夫 北
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2706584U priority Critical patent/JPS60139241U/ja
Publication of JPS60139241U publication Critical patent/JPS60139241U/ja
Application granted granted Critical
Publication of JPH0338669Y2 publication Critical patent/JPH0338669Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP2706584U 1984-02-27 1984-02-27 荷電粒子分析器の電離真空計 Granted JPS60139241U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2706584U JPS60139241U (ja) 1984-02-27 1984-02-27 荷電粒子分析器の電離真空計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2706584U JPS60139241U (ja) 1984-02-27 1984-02-27 荷電粒子分析器の電離真空計

Publications (2)

Publication Number Publication Date
JPS60139241U true JPS60139241U (ja) 1985-09-14
JPH0338669Y2 JPH0338669Y2 (enExample) 1991-08-15

Family

ID=30523665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2706584U Granted JPS60139241U (ja) 1984-02-27 1984-02-27 荷電粒子分析器の電離真空計

Country Status (1)

Country Link
JP (1) JPS60139241U (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010511875A (ja) * 2006-12-06 2010-04-15 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 真空圧力測定装置のための電子源
JP2013072695A (ja) * 2011-09-27 2013-04-22 Ulvac Japan Ltd 熱陰極電離真空計
CN114823273A (zh) * 2022-05-07 2022-07-29 合肥工业大学 可用于强磁场环境测量下限较低的高灵敏度热阴极电离规

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5255575A (en) * 1975-10-31 1977-05-07 Hitachi Ltd Vacuum degree measuring element for vacuum valve
JPS5258590A (en) * 1975-11-10 1977-05-14 Hitachi Ltd Ion number counter device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5255575A (en) * 1975-10-31 1977-05-07 Hitachi Ltd Vacuum degree measuring element for vacuum valve
JPS5258590A (en) * 1975-11-10 1977-05-14 Hitachi Ltd Ion number counter device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010511875A (ja) * 2006-12-06 2010-04-15 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 真空圧力測定装置のための電子源
JP2013072695A (ja) * 2011-09-27 2013-04-22 Ulvac Japan Ltd 熱陰極電離真空計
CN114823273A (zh) * 2022-05-07 2022-07-29 合肥工业大学 可用于强磁场环境测量下限较低的高灵敏度热阴极电离规

Also Published As

Publication number Publication date
JPH0338669Y2 (enExample) 1991-08-15

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