JPS60136047U - 走査電子顕微鏡装置 - Google Patents

走査電子顕微鏡装置

Info

Publication number
JPS60136047U
JPS60136047U JP20193284U JP20193284U JPS60136047U JP S60136047 U JPS60136047 U JP S60136047U JP 20193284 U JP20193284 U JP 20193284U JP 20193284 U JP20193284 U JP 20193284U JP S60136047 U JPS60136047 U JP S60136047U
Authority
JP
Japan
Prior art keywords
pedestal
electron microscope
scanning electron
electron beam
moving table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20193284U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6131483Y2 (enExample
Inventor
上原　勝景
高野　勇作
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP20193284U priority Critical patent/JPS60136047U/ja
Publication of JPS60136047U publication Critical patent/JPS60136047U/ja
Application granted granted Critical
Publication of JPS6131483Y2 publication Critical patent/JPS6131483Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP20193284U 1984-12-27 1984-12-27 走査電子顕微鏡装置 Granted JPS60136047U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20193284U JPS60136047U (ja) 1984-12-27 1984-12-27 走査電子顕微鏡装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20193284U JPS60136047U (ja) 1984-12-27 1984-12-27 走査電子顕微鏡装置

Publications (2)

Publication Number Publication Date
JPS60136047U true JPS60136047U (ja) 1985-09-10
JPS6131483Y2 JPS6131483Y2 (enExample) 1986-09-12

Family

ID=30764178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20193284U Granted JPS60136047U (ja) 1984-12-27 1984-12-27 走査電子顕微鏡装置

Country Status (1)

Country Link
JP (1) JPS60136047U (enExample)

Also Published As

Publication number Publication date
JPS6131483Y2 (enExample) 1986-09-12

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