JPS60133725A - パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法 - Google Patents
パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法Info
- Publication number
- JPS60133725A JPS60133725A JP58240832A JP24083283A JPS60133725A JP S60133725 A JPS60133725 A JP S60133725A JP 58240832 A JP58240832 A JP 58240832A JP 24083283 A JP24083283 A JP 24083283A JP S60133725 A JPS60133725 A JP S60133725A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- pixel
- black
- white
- boundary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007547 defect Effects 0.000 title claims description 19
- 238000000034 method Methods 0.000 title claims description 19
- 230000015654 memory Effects 0.000 claims description 29
- 238000007689 inspection Methods 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 230000006870 function Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 3
- 241000519695 Ilex integra Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58240832A JPS60133725A (ja) | 1983-12-22 | 1983-12-22 | パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58240832A JPS60133725A (ja) | 1983-12-22 | 1983-12-22 | パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60133725A true JPS60133725A (ja) | 1985-07-16 |
| JPH0374822B2 JPH0374822B2 (enrdf_load_stackoverflow) | 1991-11-28 |
Family
ID=17065353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58240832A Granted JPS60133725A (ja) | 1983-12-22 | 1983-12-22 | パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60133725A (enrdf_load_stackoverflow) |
-
1983
- 1983-12-22 JP JP58240832A patent/JPS60133725A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0374822B2 (enrdf_load_stackoverflow) | 1991-11-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |