JPS60129133U - 酸化膜生成用石英ボ−ト - Google Patents

酸化膜生成用石英ボ−ト

Info

Publication number
JPS60129133U
JPS60129133U JP1501584U JP1501584U JPS60129133U JP S60129133 U JPS60129133 U JP S60129133U JP 1501584 U JP1501584 U JP 1501584U JP 1501584 U JP1501584 U JP 1501584U JP S60129133 U JPS60129133 U JP S60129133U
Authority
JP
Japan
Prior art keywords
inner tube
tube
oxide film
quartz boat
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1501584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0227563Y2 (enrdf_load_stackoverflow
Inventor
博信 宮
遠藤　好英
黒河　治重
茂 武田
鈴木　増雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP1501584U priority Critical patent/JPS60129133U/ja
Publication of JPS60129133U publication Critical patent/JPS60129133U/ja
Application granted granted Critical
Publication of JPH0227563Y2 publication Critical patent/JPH0227563Y2/ja
Granted legal-status Critical Current

Links

JP1501584U 1984-02-07 1984-02-07 酸化膜生成用石英ボ−ト Granted JPS60129133U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1501584U JPS60129133U (ja) 1984-02-07 1984-02-07 酸化膜生成用石英ボ−ト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1501584U JPS60129133U (ja) 1984-02-07 1984-02-07 酸化膜生成用石英ボ−ト

Publications (2)

Publication Number Publication Date
JPS60129133U true JPS60129133U (ja) 1985-08-30
JPH0227563Y2 JPH0227563Y2 (enrdf_load_stackoverflow) 1990-07-25

Family

ID=30500468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1501584U Granted JPS60129133U (ja) 1984-02-07 1984-02-07 酸化膜生成用石英ボ−ト

Country Status (1)

Country Link
JP (1) JPS60129133U (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5355978A (en) * 1976-10-29 1978-05-20 Nec Corp Vaccuum type vapor growth device
JPS53148283A (en) * 1977-05-30 1978-12-23 Toshiba Ceramics Co Silicon wafer jig
JPS5720143U (enrdf_load_stackoverflow) * 1980-07-08 1982-02-02
JPS5844834U (ja) * 1981-09-18 1983-03-25 日本電気ホームエレクトロニクス株式会社 半導体製造装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5355978A (en) * 1976-10-29 1978-05-20 Nec Corp Vaccuum type vapor growth device
JPS53148283A (en) * 1977-05-30 1978-12-23 Toshiba Ceramics Co Silicon wafer jig
JPS5720143U (enrdf_load_stackoverflow) * 1980-07-08 1982-02-02
JPS5844834U (ja) * 1981-09-18 1983-03-25 日本電気ホームエレクトロニクス株式会社 半導体製造装置

Also Published As

Publication number Publication date
JPH0227563Y2 (enrdf_load_stackoverflow) 1990-07-25

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