JPS60128632A - 位置決め装置 - Google Patents

位置決め装置

Info

Publication number
JPS60128632A
JPS60128632A JP23701383A JP23701383A JPS60128632A JP S60128632 A JPS60128632 A JP S60128632A JP 23701383 A JP23701383 A JP 23701383A JP 23701383 A JP23701383 A JP 23701383A JP S60128632 A JPS60128632 A JP S60128632A
Authority
JP
Japan
Prior art keywords
holding
fang
spears
stem
cam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23701383A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6325705B2 (enrdf_load_stackoverflow
Inventor
Hidetoshi Ichiki
市木　英利
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP23701383A priority Critical patent/JPS60128632A/ja
Publication of JPS60128632A publication Critical patent/JPS60128632A/ja
Publication of JPS6325705B2 publication Critical patent/JPS6325705B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Control Of Position Or Direction (AREA)
JP23701383A 1983-12-15 1983-12-15 位置決め装置 Granted JPS60128632A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23701383A JPS60128632A (ja) 1983-12-15 1983-12-15 位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23701383A JPS60128632A (ja) 1983-12-15 1983-12-15 位置決め装置

Publications (2)

Publication Number Publication Date
JPS60128632A true JPS60128632A (ja) 1985-07-09
JPS6325705B2 JPS6325705B2 (enrdf_load_stackoverflow) 1988-05-26

Family

ID=17009090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23701383A Granted JPS60128632A (ja) 1983-12-15 1983-12-15 位置決め装置

Country Status (1)

Country Link
JP (1) JPS60128632A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5565444A (en) * 1978-11-09 1980-05-16 Toshiba Corp Positioning method and apparatus therefor
JPS5565445A (en) * 1978-11-13 1980-05-16 Toshiba Corp Positioning device for plate-shaped body

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5565444A (en) * 1978-11-09 1980-05-16 Toshiba Corp Positioning method and apparatus therefor
JPS5565445A (en) * 1978-11-13 1980-05-16 Toshiba Corp Positioning device for plate-shaped body

Also Published As

Publication number Publication date
JPS6325705B2 (enrdf_load_stackoverflow) 1988-05-26

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