JPS60125844A - Galss mask - Google Patents

Abstract

PURPOSE:To enable only one mask to acquire the functions 2 masks by attaching polarizing films on both sides of a glass mask, and allowing it to serve as the first glass mask in the case of no light interception through electric field control, and so serve as the second mask in the reverse case. CONSTITUTION:The glass plate to both faces of which polarizing films 12, 13 are attached and which is capable of controlling transmission of lights A, B through these faces by application of an electric field is used for a base plate 11, and one of the films 12, 13 is patterned and the parts except the patterned parts to be subjected to the light transmission control by application of the electric field are eliminated, and other patterned films 2, 15 are attached to the patterned film side of the films 12, 13. The application of the electric field in such a structure permits the mask 11 to serve as the first glass mask in the case of no light interception, and to serve as the second glass mask in the reverse case, thus permitting the desired functions of the 2 glass mask to be acquired practicably with one glass mask, and registering of the glass mask to be made easy by reduction of the number of the glass mask.

Description

DETAILED DESCRIPTION OF THE INVENTION fa+ TECHNICAL FIELD OF THE INVENTION The present invention relates to the construction of a glass mask used in photolithography techniques.

(bl -, Background of the Technology Photolithography technology is a technology that removes unnecessary parts using optical and chemical methods in order to obtain a desired pattern on a substrate or thin film made of insulators, semiconductors, metals, etc.). This is an important technology used in the manufacture of semiconductor chips, which are the main component of semiconductors.

The glass mask according to the present invention is used to form the pattern of photoresist on the surface of the necessary portion by exposure and development in order to prevent the removal of the necessary portion during the step of removing the unnecessary portion, and the glass mask is used to form the pattern of photoresist on the surface of the necessary portion by exposure and development. It is coated with a patterned light-shielding film.

(C1 Prior Art and Problems Figure 1 is a cross-sectional view showing the light shielding situation in an example of a conventional glass mask. 1 is the substrate, 2 is the light shielding film, A is the incident light, and B is the transmitted light. .

In the illustrated glass mask, a patterned light-shielding film 2 is adhered to the lower surface of a substrate 1 made of a transparent glass plate, and incident light A that enters the entire surface from the upper side is transmitted to the light-shielding film 2 area. The light is blocked, and the transmitted light B is transmitted only to the area other than the light blocking film 2.

On the other hand, as the number of types of semiconductor chips increases, as typified by gate array types, the number of types of glass masks increases. In other words, by adding a partial light-shielding crotch pattern to the light-shielding film pattern of the first glass mask, the light-shielding film pattern of the second glass mask is often obtained.

Furthermore, in many cases, multiple glass masks are used for the same semiconductor chinobu, but in this case, a high level of skill is generally required to match the masks, and in some cases, the first and second glass masks are included in the multiple masks. There is.

Therefore, if the first glass mask and the second glass mask are common, the increase in the number of glass masks can be suppressed,
This is desirable because mask alignment becomes easier.

+dl Purpose of the Invention In view of the above-mentioned conventional demands, the purpose of the present invention is to add a part of the light-shielding film pattern to the light-shielding film pattern of the first glass mask, thereby creating a relationship that will become the light-shielding film pattern of the second glass mask. The purpose is to provide a configuration that realizes the functions of two glass masks with one glass mask.

tel Structure of the Invention The above object is to provide a deflection film coated on each of the front and back surfaces,
A glass plate is used as a substrate that can control whether or not to block light passing through the cough surface by controlling the application of an electric field, and either one of the deflection films is patterned to remove areas other than the area to be controlled to block light by controlling the application of the electric field. This is achieved by a glass mask characterized in that the patterned deflection film is coated with another patterned light shielding film on the side where the patterned deflection film is located.

When there is no light shielding due to the electric field control, it becomes the first glass mask, and when the light shielding film is used, it becomes the second glass mask, so it is possible to realize the desired functions of two glass masks with one glass mask. become.

(fl Embodiments of the Invention The embodiments of the invention will now be described with reference to the drawings. The same reference numerals indicate the same objects throughout the invention.

FIG. 2 is a cross-sectional view of an embodiment of an optical modulator using glass for optical modulators, and FIG.
11 is a substrate, 12.13 is a deflection film, 14 is an electrode, 1
Reference numeral 5 indicates a light-shielding film, and reference numeral 16 indicates a switch.

The optical modulator shown in FIG. 2 has deflection films 12 and 13 adhered to each of the front and back surfaces of a substrate 11 made of a transparent crystallized glass plate containing sodium niobate, and a voltage is applied to an electrode 14. As a result, an electric field is applied in a direction parallel to the surface (horizontal direction in the figure). By changing the voltage, the strength of the electric field is changed, and the transmitted light B is changed with respect to the incident person.For example, if the voltage is increased, the electric bill becomes larger and the transmitted light B becomes weaker, and it is possible to make the transmitted light B weaker to the extent necessary for the light shielding of the glass mask according to the present invention.

The present invention utilizes the operation of an optical modulator using this optical modulator glass.

The glass mask shown in FIG. 3 is obtained by patterning the deflection film 13 of the optical modulator shown in FIG. A light-shielding film 15 is formed by removing the other regions, and a light-shielding film 2 that forms the light-shielding film pattern of the first glass mask is further applied using a normal light-shielding film material.

When using this glass mask, apply a sufficient voltage to the electrodes to shield the glass mask from light as described in the explanation of Figure 2.
If the application of the electric field to the light shielding film 15 is controlled by, for example, the switch 16, the electric field is not applied when the switch 16 is turned off. The region exhibits light-transmitting properties, and only the light-shielding film 2 forms a light-shielding film pattern and functions as a first glass mask. Then, when the switch 16 is connected, the electric field is applied, so that the light shielding film 15 area exhibits light shielding properties as shown in Figure (b1), and the light shielding films 11i2 and 15 form a light shielding film pattern and the second Functions as a glass mask.

Therefore, it becomes possible to realize the desired functions of two glass masks with one glass mask.

(gl Effects of the Invention As explained above, according to the configuration of the present invention, by adding a part of the light-shielding film pattern to the light-shielding film pattern of the first glass mask, the light-shielding film pattern of the second glass mask It is possible to provide a configuration in which the functions of two glass masks that have the following relationship are realized with one glass mask, which has the effect of suppressing the increase in the number of glass masks and making it possible to easily match the masks. .

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view showing a light shielding situation in an example of a conventional glass mask, FIG. 2 is a cross-sectional view of an example of a light modulator using glass for optical modulators, and FIG. 3 is a cross-sectional view showing the structure of the present invention. A cross-sectional view (al (bl) showing a light shielding situation in an example of a glass mask. In the drawing, 1.11 is a substrate, 2.15 is a light shielding film, 1
2.13 is a deflection film, 14 is an electrode, 16 is a switch, A is incident light, and B is transmitted light. leather 31m

Claims (1)

[Claims] A glass plate is used as a substrate, on which a polarizing film is adhered to each of the front and back surfaces, and whether or not light passing through the surface is blocked can be controlled by controlling the application of an electric field. What is claimed is: 1. A glass mask characterized in that areas other than areas to be light-shielded are removed by application control, and another patterned light-shielding film is adhered to the side where the patterned deflection film is located.