JPS60124919A - 薄膜蒸着装置 - Google Patents

薄膜蒸着装置

Info

Publication number
JPS60124919A
JPS60124919A JP58235569A JP23556983A JPS60124919A JP S60124919 A JPS60124919 A JP S60124919A JP 58235569 A JP58235569 A JP 58235569A JP 23556983 A JP23556983 A JP 23556983A JP S60124919 A JPS60124919 A JP S60124919A
Authority
JP
Japan
Prior art keywords
electrode
substrate
thin film
clusters
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58235569A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0215629B2 (member.php
Inventor
Kenichiro Yamanishi
山西　健一郎
Akira Nushihara
主原　昭
Yoshifumi Minowa
美濃和　芳文
Tateo Motoyoshi
本吉　健郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP58235569A priority Critical patent/JPS60124919A/ja
Publication of JPS60124919A publication Critical patent/JPS60124919A/ja
Publication of JPH0215629B2 publication Critical patent/JPH0215629B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/22—

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP58235569A 1983-12-12 1983-12-12 薄膜蒸着装置 Granted JPS60124919A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58235569A JPS60124919A (ja) 1983-12-12 1983-12-12 薄膜蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58235569A JPS60124919A (ja) 1983-12-12 1983-12-12 薄膜蒸着装置

Publications (2)

Publication Number Publication Date
JPS60124919A true JPS60124919A (ja) 1985-07-04
JPH0215629B2 JPH0215629B2 (member.php) 1990-04-12

Family

ID=16987929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58235569A Granted JPS60124919A (ja) 1983-12-12 1983-12-12 薄膜蒸着装置

Country Status (1)

Country Link
JP (1) JPS60124919A (member.php)

Also Published As

Publication number Publication date
JPH0215629B2 (member.php) 1990-04-12

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