JPS60124853U - 電子線装置 - Google Patents

電子線装置

Info

Publication number
JPS60124853U
JPS60124853U JP1257684U JP1257684U JPS60124853U JP S60124853 U JPS60124853 U JP S60124853U JP 1257684 U JP1257684 U JP 1257684U JP 1257684 U JP1257684 U JP 1257684U JP S60124853 U JPS60124853 U JP S60124853U
Authority
JP
Japan
Prior art keywords
electron beam
sample
beam equipment
converging lens
converged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1257684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH024442Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
生江　隆男
後藤　俊徳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1257684U priority Critical patent/JPS60124853U/ja
Publication of JPS60124853U publication Critical patent/JPS60124853U/ja
Application granted granted Critical
Publication of JPH024442Y2 publication Critical patent/JPH024442Y2/ja
Granted legal-status Critical Current

Links

JP1257684U 1984-02-01 1984-02-01 電子線装置 Granted JPS60124853U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1257684U JPS60124853U (ja) 1984-02-01 1984-02-01 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1257684U JPS60124853U (ja) 1984-02-01 1984-02-01 電子線装置

Publications (2)

Publication Number Publication Date
JPS60124853U true JPS60124853U (ja) 1985-08-22
JPH024442Y2 JPH024442Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-02-01

Family

ID=30495770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1257684U Granted JPS60124853U (ja) 1984-02-01 1984-02-01 電子線装置

Country Status (1)

Country Link
JP (1) JPS60124853U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH024442Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-02-01

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