JPS60124112A - 表面弾性波素子 - Google Patents

表面弾性波素子

Info

Publication number
JPS60124112A
JPS60124112A JP23244583A JP23244583A JPS60124112A JP S60124112 A JPS60124112 A JP S60124112A JP 23244583 A JP23244583 A JP 23244583A JP 23244583 A JP23244583 A JP 23244583A JP S60124112 A JPS60124112 A JP S60124112A
Authority
JP
Japan
Prior art keywords
surface acoustic
acoustic wave
film
silicon substrate
zinc oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23244583A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0311686B2 (enrdf_load_stackoverflow
Inventor
Ryuichi Asai
龍一 浅井
Takeshi Okamoto
猛 岡本
Shoichi Minagawa
皆川　昭一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Faurecia Clarion Electronics Co Ltd
Original Assignee
Clarion Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Clarion Co Ltd filed Critical Clarion Co Ltd
Priority to JP23244583A priority Critical patent/JPS60124112A/ja
Priority to US06/677,712 priority patent/US4567392A/en
Priority to GB08430699A priority patent/GB2152315B/en
Priority to DE3444749A priority patent/DE3444749C2/de
Publication of JPS60124112A publication Critical patent/JPS60124112A/ja
Publication of JPH0311686B2 publication Critical patent/JPH0311686B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP23244583A 1983-12-09 1983-12-09 表面弾性波素子 Granted JPS60124112A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP23244583A JPS60124112A (ja) 1983-12-09 1983-12-09 表面弾性波素子
US06/677,712 US4567392A (en) 1983-12-09 1984-12-04 Sezawa surface-acoustic-wave device using ZnO(0001)/SiO2 / Si(100)(011)
GB08430699A GB2152315B (en) 1983-12-09 1984-12-05 Surface acoustic wave device
DE3444749A DE3444749C2 (de) 1983-12-09 1984-12-07 Akustische Oberflächenwellen ausbildendes Bauelement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23244583A JPS60124112A (ja) 1983-12-09 1983-12-09 表面弾性波素子

Publications (2)

Publication Number Publication Date
JPS60124112A true JPS60124112A (ja) 1985-07-03
JPH0311686B2 JPH0311686B2 (enrdf_load_stackoverflow) 1991-02-18

Family

ID=16939382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23244583A Granted JPS60124112A (ja) 1983-12-09 1983-12-09 表面弾性波素子

Country Status (1)

Country Link
JP (1) JPS60124112A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5160869A (en) * 1989-12-26 1992-11-03 Sumitomo Electric Industries Ltd. Surface acoustic wave device
EP0608864A3 (en) * 1993-01-29 1995-11-08 Sumitomo Electric Industries Surface acoustic wave device and method for manufacturing the same.
US5783896A (en) * 1995-08-08 1998-07-21 Sumitomo Electric Industries, Ltd. Diamond-Zn0 surface acoustic wave device
US5959389A (en) * 1995-08-08 1999-09-28 Sumitomo Electronic Industries, Ltd. Diamond-ZnO surface acoustic wave device
JP2006526919A (ja) * 2003-06-04 2006-11-24 エプコス　アクチエンゲゼルシャフト 電気音響構成素子および製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57145419A (en) * 1981-03-05 1982-09-08 Clarion Co Ltd Surface acoustic wave element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57145419A (en) * 1981-03-05 1982-09-08 Clarion Co Ltd Surface acoustic wave element
JPS5863214A (ja) * 1981-03-05 1983-04-15 Clarion Co Ltd 表面弾性波素子

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5160869A (en) * 1989-12-26 1992-11-03 Sumitomo Electric Industries Ltd. Surface acoustic wave device
EP0608864A3 (en) * 1993-01-29 1995-11-08 Sumitomo Electric Industries Surface acoustic wave device and method for manufacturing the same.
US5783896A (en) * 1995-08-08 1998-07-21 Sumitomo Electric Industries, Ltd. Diamond-Zn0 surface acoustic wave device
US5959389A (en) * 1995-08-08 1999-09-28 Sumitomo Electronic Industries, Ltd. Diamond-ZnO surface acoustic wave device
JP2006526919A (ja) * 2003-06-04 2006-11-24 エプコス　アクチエンゲゼルシャフト 電気音響構成素子および製造方法

Also Published As

Publication number Publication date
JPH0311686B2 (enrdf_load_stackoverflow) 1991-02-18

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