JPS60122776A - Cera mic and metal bonded body and manufacture - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a ceramic-metal bonded body and a manufacturing method thereof.

Conventional methods for joining ceramics and metals include a high melting point metal method in which a metallizing paste such as Mo-Mn light is coated on ceramics such as sintered alumina, baked, coated with Ni, and then joined to Kovar using eutectic silver brazing. , Cub, MgO, Al2O on sintered alumina.

An oxide solder method is known in which a mixed paste of oxides such as B2O5 is applied and bonded to metal Nb at high temperature in vacuum.

However, the former method requires a complicated process including at least two heating operations, one for baking and one for brazing, and a plating process, resulting in high manufacturing costs.

Furthermore, in the latter case, the processing temperature and bonding strength vary greatly depending on the component composition of the oxide mixed paste, so process control and quality control must be strictly controlled depending on the material of the objects to be bonded. Furthermore, since ceramics are generally hard and brittle materials with a high Young's modulus and low fracture resistance, the above two conventional methods are used to prevent ceramics from breaking due to residual stress caused by the difference in thermal expansion with metal after joining. According to the above, the combination of ceramics and metals having a small difference in coefficient of thermal expansion was limited, and the range of applications of the resulting joined body was also extremely narrow.

An object of the present invention is to overcome the drawbacks of the above-mentioned conventional methods, to provide a bonded body that can be obtained through simple steps and has a wide range of uses, and a method for producing the same.

The gist of the present invention is to provide two or more molded bodies of at least one type selected from ceramics and metals, and zirconium or its alloy sandwiched by brazing between the opposing surfaces of the molded bodies. The present invention resides in a joined body of ceramics and metal characterized by consisting of a plate. Furthermore, the gist of the second and third inventions related to the above-mentioned specified invention is a joined body of ceramics and metal, characterized in that a plate of zirconium or its alloy is brazed and fixed to ceramics, and A plate of zirconium or an alloy thereof is interposed in the gap between opposing surfaces of two or more molded bodies of at least one type selected from ceramics and metals,
The present invention resides in a method for producing a joined body of ceramics and metal, characterized in that each of the molded bodies and the plate are joined by brazing in a non-oxidizing atmosphere.

This will be explained below according to the drawings.

FIG. 1 is a sectional view showing an embodiment of the joined body of the present invention.

A plate 12 of zirconium or its alloy is placed between a molded body 1a and a molded body tb made of a desired material selected from ceramics and metals.
It is soldered and clamped using b.

In the present invention, ceramics include not only ceramics in a narrow sense such as alumina, zirconia, mica ceramics, petalite, silicon carbide, silicon nitride, and boron nitride, but also
Broadly interpreted to include crystallized glass and glass. Examples of metal include carbon steel, MO steel, stainless steel, copper, and sintered alloy.

Molded body 1a and molded body 1b to be joined by the joined body of the present invention
The combination of materials can be selected as desired from the above-mentioned materials, such as ceramics and metals, ceramics and ceramics, and metals and metals. If one of the molded bodies 1a and 1b is made of ceramics and the other is made of metal, as mentioned above, (according to the conventional method, the combinations are limited to materials with a small difference in coefficient of thermal expansion). However, since the joined body of the present invention is joined by interposing a plate of zirconium or its alloy between the two, the material of the molded body to be joined is not limited by the coefficient of thermal expansion. In other words, zirconium has a small Young's modulus and is highly ductile, and its coefficient of thermal expansion is similar to that of many ceramics, so it can absorb residual stress caused by the difference in thermal expansion between ceramics and metals. be. Moreover, zirconium has shear strength,
and excellent high-temperature mechanical strength, zirconium and Ag low,
The eutectic obtained by reacting with various metal brazing materials such as Cu low, l'Ji low, and Ag-Cu eutectic low has good wettability not only for metals but also for many ceramics. Therefore, it is suitable for interposing between molded bodies. Therefore, the bonded body of the present invention has strong bonding strength. The zirconium used in the present invention is preferably industrially pure zirconium containing unavoidable impurities during manufacturing, but alloys containing well-known solid solution metals such as hafnium and tin can also be used.

To describe the general manufacturing method of the joined body of the present invention, between a molded body 1a made of a desired material selected from ceramics and metals and a molded body ib, a plate 12 of metal brazing material 3a% zirconium or its alloy and The metal brazing materials 3b are laminated in order and joined by heating in a non-oxidizing atmosphere such as Ar% vacuum, lI2, N2, etc. High-temperature types of metal brazing materials such as Ag brazing, Cu brazing, Ni brazing, and Ag-Cu eutectic brazing are good because they easily form eutectic materials with Zr.
-Mn alloy raw material and Au raw material can also be bonded. In the present invention, as described above, the molded body and the plate 12 can be joined by a single heating operation using the metal brazing material, so the joined body can be manufactured through an extremely simple process. If this is not required, the surface of the plate 12 may be covered with a metal brazing material in advance and then joined to the molded body. In the latter case, the heating operation is performed twice, but the molded bodies 1a and 1
b and the plate 12 are easily fixed, and the displacement of the joint part is reduced, so that the accuracy of the relative positional dimension between the molded bodies 1a, lb and the plate 12 after joining is improved.

Note that the plate interposed between the molded bodies is not limited to a homogeneous material made entirely of zirconium or its alloy. For example, if one side of the molded body is a metal and the other is a ceramic material with a particularly low coefficient of thermal expansion, such as silicon nitride or silicon carbide, as shown in Figure 2, silicon nitride or silicon carbide such as Mo or W may be used. Plates 5a and 5b made of zirconium or its alloy are interposed on both sides of a plate 4 made of a low-expansion metal with a similar coefficient of thermal expansion, together with brazing metal materials 3C and 3d, and the molded bodies 1a and 1b are integrally joined during heating. It is more effective in alleviating residual stress caused by differences in thermal expansion coefficients. In general, the amount of reaction between a material made of zirconium or its alloy and a metal brazing material is zirconium and Ag,
Although it depends on factors such as the phase equilibrium diagram with Cu, Ni, etc., heating temperature, schedule, etc., it is possible to
If the multilayer plywood 22 is made up of zirconium a, plate 4, and plate 5b, the thickness of the unreacted layer of the material made of zirconium or its alloy can be made different between the plate 5a side and the plate 5b side.

That is, if the molded body 1a is made of a silicon nitride sintered body or a silicon carbide sintered body, and the molded body 1b is made of a material such as carbon steel or Mow1 that has a larger coefficient of thermal expansion than ceramics, then the thermal expansion of the material of the plate 4 Since the coefficient is close to that of the sintered body, the plate 5a does not necessarily need to remain in the form of Ti alone, which has a stress-relaxing effect, but the plate 5b is the same as the plate 5a in order to alleviate residual stress and improve the reliability of the joined body. It is desirable to make the thickness of the plate 5b larger than that of the plate 5a, and to leave the unreacted layer of the plate 5a. When a metal plate other than these is interposed between the plates of zirconium or its alloy as the plate 22, in addition to the method of joining using a metal brazing material as described above, it is possible to use a Ti plate - another metal plate manufactured in advance by heat compression bonding, etc. It is also conceivable to use a type of -Ti plate clad plate.

Further, by interposing a ceramic plate such as alumina, zirconia, mullite, etc., which has a lower thermal conductivity than metal, it is possible to manufacture a ceramic-metal bonded body having a heat-insulating structure.

Example 1 Porosity: 2%, 5i3Nf, St, N content: 90%.

A sintered body, porosity 3%, Al2O3 content 95% by weight
ILO, sintered body, partially stabilized ZrO□ sintered body with porosity 2%, ZrO2 content 90% by weight, stainless steel plate, carbon steel plate, Ni plate, bottom surface 10X with a diamond grindstone.
IOn was processed into a size of 5 ml in height, washed, and molded bodies 1a and 1b shown in Table 1 were obtained. Between the molded body 1a and the molded body 1b, a thickness of 0.0 made of metal of the type shown in Table 1 is provided.
A 5m brazing material 3a, a plate-2 with a thickness of 1.0 and a thickness of 0.
05 fin brazing material 3b was interposed and bonded under the heating conditions shown in Table 1 to produce bonded bodies A to ■. In addition, a plate on which the surface of the zirconium plate 2 was previously covered with brazing materials 3a and 3b shown in Table 2 was interposed between the molded bodies 1a and 1b, and they were joined under the heating conditions shown in Table 1 to form a joined body. M was produced. The joined body was fixed to the support stand 6 as shown in Figure 3, and a load was applied at a speed of 2 as/sin using an autograph made by Shimabara Seisakusho. The shear strength of the joint was measured. Table 1 shows the results. show.

Note $1) k7. I used the Zr autopsy of the r4 audience.

$2) Zr alloy Zr alloy &;t! r9B, 5%, 11
t%, Sn 1.5+Tt% I! tlI
Luta.

Example 2 Molded bodies 1a and 1b shown in Table 2 were obtained through the same steps as in Example 1. Next, between the molded body 1a and the molded body 1b, a brazing material 3 with a thickness of 0.05 mm made of the metals shown in Table 2
a, 0.03 dragon plate 5as, 0.05 mm thick brazing material 3c, 0.3 fin plate 4, 0.05n thick brazing material 3d, 0.3 m thick plate 5b, and A bonded body J- was obtained by interposing a brazing material 3b having a thickness of 0.05 m and bonding under the heating conditions shown in Table 2. The conjugated body J was prepared in the same manner as in Example 1.
- Table 2 shows the results of measuring the shear strength of the joint.

Note *1) wl, r Pure Zr...Zr of 1% was used.

[Brief explanation of drawings]

Fig. 1 is a cross-sectional view showing an embodiment of the bonded body of the present invention, Fig. 2 is a cross-sectional view showing the actual 3% gll of the plate used in the bonded body of the present invention, and Fig. 3 is a cross-sectional view of the bonded body of the bonded body of the present invention. FIG. 3 is a diagram showing a method for measuring shear strength. la, lb...molded body, 3 a, 3 b, 3 c, 3 ""..."-material, 12.
5a, 5b...Dilreconium or other alloy plate Figure 1 Procedural amendment (spontaneous) Indication of the January 17, 1980 incident 1982 Patent Application No. 231973a Amendment Relationship with the case involving the person who filed the patent application Patent applicant postal code: 467-91 14-18 Takatsuji-cho, Mizuho-ku, Nagoya ([H1wr440-6111) Column for detailed explanation of the invention in the specification subject to live amendment. 1. In the 7th line of page 8 of the specification, "T1 monotaste" is corrected to "rZr monotaste". 2. I am making the following correction to page 8, line 15. + Zr plate - other metal plate - Zr plate clad plate"

Claims (1)

[Scope of Claims] (11) Two or more molded bodies of at least one type selected from ceramics and metals, and a plate of zirconium or its alloy sandwiched by brazing between the opposing surfaces of each of the molded bodies. (2) A ceramic-metal joined body characterized in that a plate of zirconium or its alloy is brazed and fixed to the ceramic. (3) A ceramic and A plate of zirconium or its alloy is interposed in the gap between opposing surfaces of two or more molded bodies of at least one type of metal, and each of the molded bodies and the plate are joined by brazing in a non-oxidizing atmosphere. A method for producing a joined body of ceramics and metal characterized by: