JPS60121249U - Sample equipment for scanning electron microscopes, etc. - Google Patents
Sample equipment for scanning electron microscopes, etc.Info
- Publication number
- JPS60121249U JPS60121249U JP747084U JP747084U JPS60121249U JP S60121249 U JPS60121249 U JP S60121249U JP 747084 U JP747084 U JP 747084U JP 747084 U JP747084 U JP 747084U JP S60121249 U JPS60121249 U JP S60121249U
- Authority
- JP
- Japan
- Prior art keywords
- scanning electron
- side wall
- ball
- electron microscope
- guide body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示すための図、第２図は第
１図のＡ−Ａ’矢視親図ある。。
１：室壁、２：試料室、３：対物レンズ、４：前面カバ
ー、５：Ｚ動案内、６：ｚ動体、７：レール、８：傾斜
体、９：軸、１０ａ、１０ｂ、１０ｃ：ボール、１１ニ
ガイド体、Ｄ２案内筒、１３：試料、３４，１５，１６
，１７：０リング、１８．１９：嫡子、２０ニガイド軸
。FIG. 1 is a diagram showing one embodiment of the present invention, and FIG. 2 is a parent view taken along the line A-A' in FIG. . 1: Chamber wall, 2: Sample chamber, 3: Objective lens, 4: Front cover, 5: Z moving guide, 6: Z moving body, 7: Rail, 8: Inclined body, 9: Axis, 10a, 10b, 10c: Ball, 11 Ni guide body, D2 guide tube, 13: Sample, 34, 15, 16
, 17:0 ring, 18.19: legitimate child, 20 guide axis.
Claims (4)
に案内されて光軸に平行な方向に移動可能にされたＺ動
体と、該２動体に対して光軸と直交する軸の回りに傾斜
可能に取り付けられた傾−斜体と、該傾斜体に取りつけ
られたＸ方向およびＹ方向移動台とを具備する装置にお
いて、前記一方の側壁の反対側の側壁に対向する該傾斜
体の面と該反対側の側壁のうちの一方に任意の向きに回
転自在なボールを埋め込み、他方に該ボールが滑動する
平面を具備したことを特徴とする走査電子顕微鏡等にお
ける試料装置。(1) A Z moving body that is movable in a direction parallel to the optical axis guided by a guide means attached to one side wall of the sample chamber, and a Z moving body that is movable in a direction parallel to the optical axis, and a In an apparatus comprising a tiltable body mounted so as to be tiltable, and an X- and Y-direction movable stage mounted on the tilted body, a surface of the tilted body facing a side wall opposite to the one side wall; A sample device for a scanning electron microscope or the like, characterized in that a ball rotatable in any direction is embedded in one of the opposite side walls, and the other side has a flat surface on which the ball slides.
反対側の側壁に該ボールが滑動する平面を有するガイド
体が設−けられている実用新案登録請求の範囲第（１）
項記載の走査電子顕微鏡等における試料装置。(2) The ball is embedded in the surface of the inclined body, and the opposite side wall is provided with a guide body having a flat surface on which the ball slides.
A sample device for a scanning electron microscope, etc. described in Section 1.
ガイド体を回転させ颯ことにより、該ガイド体と該ボニ
ルとの接触圧を調節できるように構成されている実用新
案登録請求の範囲第（２）項記載の走査電子顕微鏡等に
おける試料装置。(3) The guide body is screwed to the side wall of the sample chamber, and the contact pressure between the guide body and the carbonyl can be adjusted by rotating and moving the guide body.Registration of a utility model. A sample device for a scanning electron microscope or the like according to claim (2).
ように構成されている実用新案登録請求の範囲第（２）
項又は第（３）項記載の走査電子顕微鏡等における試料
装置。(4) Utility model registration claim No. (2) in which the guide body is configured to come into contact with the ball via an elastic body.
A sample device for a scanning electron microscope, etc. as described in paragraph (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP747084U JPS60121249U (en) | 1984-01-23 | 1984-01-23 | Sample equipment for scanning electron microscopes, etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP747084U JPS60121249U (en) | 1984-01-23 | 1984-01-23 | Sample equipment for scanning electron microscopes, etc. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60121249U true JPS60121249U (en) | 1985-08-15 |
Family
ID=30485852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP747084U Pending JPS60121249U (en) | 1984-01-23 | 1984-01-23 | Sample equipment for scanning electron microscopes, etc. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60121249U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000021345A (en) * | 1998-07-06 | 2000-01-21 | Hitachi Ltd | Scanning type electron microscope |
-
1984
- 1984-01-23 JP JP747084U patent/JPS60121249U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000021345A (en) * | 1998-07-06 | 2000-01-21 | Hitachi Ltd | Scanning type electron microscope |
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