JPS60120219A - クリ−ンドラフトの流量計測装置 - Google Patents

クリ−ンドラフトの流量計測装置

Info

Publication number
JPS60120219A
JPS60120219A JP22858183A JP22858183A JPS60120219A JP S60120219 A JPS60120219 A JP S60120219A JP 22858183 A JP22858183 A JP 22858183A JP 22858183 A JP22858183 A JP 22858183A JP S60120219 A JPS60120219 A JP S60120219A
Authority
JP
Japan
Prior art keywords
flow rate
clean
exhaust duct
fluid resistance
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22858183A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6338647B2 (enrdf_load_stackoverflow
Inventor
Shigeharu Hanajima
花島　重春
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DAN KAGAKU KK
Original Assignee
DAN KAGAKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DAN KAGAKU KK filed Critical DAN KAGAKU KK
Priority to JP22858183A priority Critical patent/JPS60120219A/ja
Publication of JPS60120219A publication Critical patent/JPS60120219A/ja
Publication of JPS6338647B2 publication Critical patent/JPS6338647B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP22858183A 1983-12-05 1983-12-05 クリ−ンドラフトの流量計測装置 Granted JPS60120219A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22858183A JPS60120219A (ja) 1983-12-05 1983-12-05 クリ−ンドラフトの流量計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22858183A JPS60120219A (ja) 1983-12-05 1983-12-05 クリ−ンドラフトの流量計測装置

Publications (2)

Publication Number Publication Date
JPS60120219A true JPS60120219A (ja) 1985-06-27
JPS6338647B2 JPS6338647B2 (enrdf_load_stackoverflow) 1988-08-01

Family

ID=16878602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22858183A Granted JPS60120219A (ja) 1983-12-05 1983-12-05 クリ−ンドラフトの流量計測装置

Country Status (1)

Country Link
JP (1) JPS60120219A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107631765A (zh) * 2017-09-05 2018-01-26 合肥科迈捷智能传感技术有限公司 一种差压流量计水处理方法
WO2018230043A1 (ja) * 2017-06-14 2018-12-20 株式会社日立産機システム 安全キャビネット

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53143361A (en) * 1977-05-20 1978-12-13 Oval Eng Co Ltd Flow meter for von k*arman*s vortex street
JPS5633565U (enrdf_load_stackoverflow) * 1979-08-23 1981-04-02

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53143361A (en) * 1977-05-20 1978-12-13 Oval Eng Co Ltd Flow meter for von k*arman*s vortex street
JPS5633565U (enrdf_load_stackoverflow) * 1979-08-23 1981-04-02

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018230043A1 (ja) * 2017-06-14 2018-12-20 株式会社日立産機システム 安全キャビネット
US11273438B2 (en) 2017-06-14 2022-03-15 Hitachi Industrial Equipment Systems Co., Ltd. Safety cabinet
CN107631765A (zh) * 2017-09-05 2018-01-26 合肥科迈捷智能传感技术有限公司 一种差压流量计水处理方法
CN107631765B (zh) * 2017-09-05 2020-07-07 合肥科迈捷智能传感技术有限公司 一种差压流量计水处理方法

Also Published As

Publication number Publication date
JPS6338647B2 (enrdf_load_stackoverflow) 1988-08-01

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