JPS6338647B2 - - Google Patents

Info

Publication number
JPS6338647B2
JPS6338647B2 JP58228581A JP22858183A JPS6338647B2 JP S6338647 B2 JPS6338647 B2 JP S6338647B2 JP 58228581 A JP58228581 A JP 58228581A JP 22858183 A JP22858183 A JP 22858183A JP S6338647 B2 JPS6338647 B2 JP S6338647B2
Authority
JP
Japan
Prior art keywords
flow rate
clean
fluid resistance
exhaust duct
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58228581A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60120219A (ja
Inventor
Shigeharu Hanajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DAN KAGAKU KK
Original Assignee
DAN KAGAKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DAN KAGAKU KK filed Critical DAN KAGAKU KK
Priority to JP22858183A priority Critical patent/JPS60120219A/ja
Publication of JPS60120219A publication Critical patent/JPS60120219A/ja
Publication of JPS6338647B2 publication Critical patent/JPS6338647B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP22858183A 1983-12-05 1983-12-05 クリ−ンドラフトの流量計測装置 Granted JPS60120219A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22858183A JPS60120219A (ja) 1983-12-05 1983-12-05 クリ−ンドラフトの流量計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22858183A JPS60120219A (ja) 1983-12-05 1983-12-05 クリ−ンドラフトの流量計測装置

Publications (2)

Publication Number Publication Date
JPS60120219A JPS60120219A (ja) 1985-06-27
JPS6338647B2 true JPS6338647B2 (enrdf_load_stackoverflow) 1988-08-01

Family

ID=16878602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22858183A Granted JPS60120219A (ja) 1983-12-05 1983-12-05 クリ−ンドラフトの流量計測装置

Country Status (1)

Country Link
JP (1) JPS60120219A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6783193B2 (ja) 2017-06-14 2020-11-11 株式会社日立産機システム 安全キャビネット
CN107631765B (zh) * 2017-09-05 2020-07-07 合肥科迈捷智能传感技术有限公司 一种差压流量计水处理方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53143361A (en) * 1977-05-20 1978-12-13 Oval Eng Co Ltd Flow meter for von k*arman*s vortex street
JPS5633565U (enrdf_load_stackoverflow) * 1979-08-23 1981-04-02

Also Published As

Publication number Publication date
JPS60120219A (ja) 1985-06-27

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