JPS60116125A - 成膜方法 - Google Patents

成膜方法

Info

Publication number
JPS60116125A
JPS60116125A JP58223312A JP22331283A JPS60116125A JP S60116125 A JPS60116125 A JP S60116125A JP 58223312 A JP58223312 A JP 58223312A JP 22331283 A JP22331283 A JP 22331283A JP S60116125 A JPS60116125 A JP S60116125A
Authority
JP
Japan
Prior art keywords
conductive substrate
substrate
electrode
plasma
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58223312A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523050B2 (enExample
Inventor
Zenko Hirose
広瀬　全孝
Takeshi Ueno
毅 上野
Katsumi Suzuki
克己 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP58223312A priority Critical patent/JPS60116125A/ja
Publication of JPS60116125A publication Critical patent/JPS60116125A/ja
Publication of JPH0523050B2 publication Critical patent/JPH0523050B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/24—
    • H10P14/3411—

Landscapes

  • Photovoltaic Devices (AREA)
JP58223312A 1983-11-29 1983-11-29 成膜方法 Granted JPS60116125A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58223312A JPS60116125A (ja) 1983-11-29 1983-11-29 成膜方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58223312A JPS60116125A (ja) 1983-11-29 1983-11-29 成膜方法

Publications (2)

Publication Number Publication Date
JPS60116125A true JPS60116125A (ja) 1985-06-22
JPH0523050B2 JPH0523050B2 (enExample) 1993-03-31

Family

ID=16796172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58223312A Granted JPS60116125A (ja) 1983-11-29 1983-11-29 成膜方法

Country Status (1)

Country Link
JP (1) JPS60116125A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4919077A (en) * 1986-12-27 1990-04-24 Mitsubishi Denki Kabushiki Kaisha Semiconductor producing apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56130466A (en) * 1980-03-17 1981-10-13 Canon Inc Film forming method
JPS58158929A (ja) * 1982-03-17 1983-09-21 Kokusai Electric Co Ltd プラズマ発生装置
JPS58163434A (ja) * 1982-03-25 1983-09-28 Semiconductor Energy Lab Co Ltd プラズマ気相反応方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56130466A (en) * 1980-03-17 1981-10-13 Canon Inc Film forming method
JPS58158929A (ja) * 1982-03-17 1983-09-21 Kokusai Electric Co Ltd プラズマ発生装置
JPS58163434A (ja) * 1982-03-25 1983-09-28 Semiconductor Energy Lab Co Ltd プラズマ気相反応方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4919077A (en) * 1986-12-27 1990-04-24 Mitsubishi Denki Kabushiki Kaisha Semiconductor producing apparatus

Also Published As

Publication number Publication date
JPH0523050B2 (enExample) 1993-03-31

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