JPS60114385A - 蒸気洗浄装置 - Google Patents
蒸気洗浄装置Info
- Publication number
- JPS60114385A JPS60114385A JP22010283A JP22010283A JPS60114385A JP S60114385 A JPS60114385 A JP S60114385A JP 22010283 A JP22010283 A JP 22010283A JP 22010283 A JP22010283 A JP 22010283A JP S60114385 A JPS60114385 A JP S60114385A
- Authority
- JP
- Japan
- Prior art keywords
- steam
- cleaning
- substrate
- section
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000013020 steam cleaning Methods 0.000 claims description 30
- 238000004140 cleaning Methods 0.000 claims description 20
- 239000007788 liquid Substances 0.000 claims description 15
- 238000001816 cooling Methods 0.000 claims description 11
- 230000007423 decrease Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 43
- 238000009833 condensation Methods 0.000 description 10
- 230000005494 condensation Effects 0.000 description 10
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 9
- 238000009434 installation Methods 0.000 description 4
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000009835 boiling Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22010283A JPS60114385A (ja) | 1983-11-22 | 1983-11-22 | 蒸気洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22010283A JPS60114385A (ja) | 1983-11-22 | 1983-11-22 | 蒸気洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60114385A true JPS60114385A (ja) | 1985-06-20 |
| JPS6316189B2 JPS6316189B2 (enrdf_load_stackoverflow) | 1988-04-07 |
Family
ID=16745944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22010283A Granted JPS60114385A (ja) | 1983-11-22 | 1983-11-22 | 蒸気洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60114385A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0659070U (ja) * | 1993-02-02 | 1994-08-16 | 賢一 江草 | 画一した文章中の空白にしている要所に、自分の人生の あらゆる出来事を記入すれば、自動的に自分史自叙伝と して完成する書物。 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5089146U (enrdf_load_stackoverflow) * | 1973-12-17 | 1975-07-28 |
-
1983
- 1983-11-22 JP JP22010283A patent/JPS60114385A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5089146U (enrdf_load_stackoverflow) * | 1973-12-17 | 1975-07-28 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0659070U (ja) * | 1993-02-02 | 1994-08-16 | 賢一 江草 | 画一した文章中の空白にしている要所に、自分の人生の あらゆる出来事を記入すれば、自動的に自分史自叙伝と して完成する書物。 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6316189B2 (enrdf_load_stackoverflow) | 1988-04-07 |
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