JPS60113631U - 電子ビーム露光装置 - Google Patents

電子ビーム露光装置

Info

Publication number
JPS60113631U
JPS60113631U JP18423384U JP18423384U JPS60113631U JP S60113631 U JPS60113631 U JP S60113631U JP 18423384 U JP18423384 U JP 18423384U JP 18423384 U JP18423384 U JP 18423384U JP S60113631 U JPS60113631 U JP S60113631U
Authority
JP
Japan
Prior art keywords
electron beam
resist layer
chamber
exposure
exposure chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18423384U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6242533Y2 (https=
Inventor
堀　光平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP18423384U priority Critical patent/JPS60113631U/ja
Publication of JPS60113631U publication Critical patent/JPS60113631U/ja
Application granted granted Critical
Publication of JPS6242533Y2 publication Critical patent/JPS6242533Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP18423384U 1984-12-06 1984-12-06 電子ビーム露光装置 Granted JPS60113631U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18423384U JPS60113631U (ja) 1984-12-06 1984-12-06 電子ビーム露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18423384U JPS60113631U (ja) 1984-12-06 1984-12-06 電子ビーム露光装置

Publications (2)

Publication Number Publication Date
JPS60113631U true JPS60113631U (ja) 1985-08-01
JPS6242533Y2 JPS6242533Y2 (https=) 1987-10-31

Family

ID=30741718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18423384U Granted JPS60113631U (ja) 1984-12-06 1984-12-06 電子ビーム露光装置

Country Status (1)

Country Link
JP (1) JPS60113631U (https=)

Also Published As

Publication number Publication date
JPS6242533Y2 (https=) 1987-10-31

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