JPS60113446A - バンプ電極の製造方法 - Google Patents

バンプ電極の製造方法

Info

Publication number
JPS60113446A
JPS60113446A JP58220925A JP22092583A JPS60113446A JP S60113446 A JPS60113446 A JP S60113446A JP 58220925 A JP58220925 A JP 58220925A JP 22092583 A JP22092583 A JP 22092583A JP S60113446 A JPS60113446 A JP S60113446A
Authority
JP
Japan
Prior art keywords
bump
formation
metal film
bump electrode
electrode structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58220925A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0552666B2 (enExample
Inventor
Hiroshi Nakatani
宏 中谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP58220925A priority Critical patent/JPS60113446A/ja
Publication of JPS60113446A publication Critical patent/JPS60113446A/ja
Publication of JPH0552666B2 publication Critical patent/JPH0552666B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/012—
    • H10W72/251—

Landscapes

  • Electroplating Methods And Accessories (AREA)
  • Magnetic Heads (AREA)
JP58220925A 1983-11-24 1983-11-24 バンプ電極の製造方法 Granted JPS60113446A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58220925A JPS60113446A (ja) 1983-11-24 1983-11-24 バンプ電極の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58220925A JPS60113446A (ja) 1983-11-24 1983-11-24 バンプ電極の製造方法

Publications (2)

Publication Number Publication Date
JPS60113446A true JPS60113446A (ja) 1985-06-19
JPH0552666B2 JPH0552666B2 (enExample) 1993-08-06

Family

ID=16758697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58220925A Granted JPS60113446A (ja) 1983-11-24 1983-11-24 バンプ電極の製造方法

Country Status (1)

Country Link
JP (1) JPS60113446A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62252951A (ja) * 1986-04-22 1987-11-04 Oki Electric Ind Co Ltd バンプ電極の製造方法
US5057453A (en) * 1987-10-21 1991-10-15 Kabushiki Kaisha Toshiba Method for making a semiconductor bump electrode with a skirt

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62252951A (ja) * 1986-04-22 1987-11-04 Oki Electric Ind Co Ltd バンプ電極の製造方法
US5057453A (en) * 1987-10-21 1991-10-15 Kabushiki Kaisha Toshiba Method for making a semiconductor bump electrode with a skirt

Also Published As

Publication number Publication date
JPH0552666B2 (enExample) 1993-08-06

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