JPS60107613A - Sample stage for microscope - Google Patents

Abstract

PURPOSE:To shorten the examination time by adjusting the suface of a sample so that it is parallel with a plane determined by directions of (x) and (y) axes of a sample stage and focusing one point of the sample thereafter to make it unnecessary to focus the sample hereafter. CONSTITUTION:Pulse motors 32 and 30 and drivers 27 and 25 are provided as (x) and (y) axial direction moving means, and pulse motors 29 and 33 and drivers 24 and 28 are provided as movement angle adjusting means. A point B of a sample 34 is moved under an optical length measurer 37, and the distance of the point B is measured and is inputted to an operation command circuit 20, and the circuit 20 calculates position coordinates of the point B on a basis of this distance and a point E. Similarly, position coordinates of points C and D are obtained; and the command circuit 20 adjust movement angles on a basis of these coordinate values to make the surface of the sample 34 parallel with the plane determined by (x) and (y) axes. Thereafter, one point of the sample surface is focused. Thus, it is unnecessary to focus the sample hereafter, and the examination time is shortened.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a sample stage used in a microscope.

Conventional configuration and its problems Without further ado, we will explain the conventional microscope sample stage.

FIG. 1 shows an example of a conventional microscope sample stage. In FIG. 1, 1 is a sample stage, 2 is an automatic focusing means, 3 is a biaxial movement means, and point A is an inspection point. 6 is an arithmetic command means, 7 is a y-axis direction moving means, 8 is a y-axis direction moving means, 9 is a microscope, and 10 is a sample.

The operation of the conventional microscope sample stage configured as described above will be described below.

When inspecting inspection point A, the calculation command means 6 moves the X-axis direction moving means 7 and the Y-axis direction moving means 8V! : On the other hand, a command signal is output to move the sample stage 1 so that the inspection point is below the microscope 9 in two directions. After the sample stage 1 has completed its movement, the calculation command means 6 outputs a focusing command signal to the automatic focusing means 2.

The automatic focusing means 2 sends a movement command signal to the biaxial movement means 3 to focus on the inspection point A. Thereafter, the inspection at point A is performed using the microscope 9. If there are many inspection points, repeat this process to inspect all inspection points.

However, with the above configuration, there is a problem that the circuit configuration of the automatic focusing means 20 becomes complicated, and since focusing is performed at each inspection point, the inspection time increases in proportion to the number of inspection points. It had some problems.

OBJECT OF THE INVENTION The present invention solves the above-mentioned conventional problems.Before starting the inspection, the surface of the specimen is made parallel to the plane determined by the X-axis direction and the Y-axis direction of the microscope sample stage. It is an object of the present invention to provide a specimen stage for a microscope that eliminates the need for focusing at subsequent inspection points by focusing at one point on the specimen after adjusting the inclination.

Structure of the Invention The present invention is directed to X-axes 2. ! /'1(ll+
y-axis direction moving means for three directions of the y-axis; 2. On a sample stage that has a y-axis direction moving means and an angle adjustment means for the plane determined by the
distance measuring means for measuring the distance in two axial directions from the point or more to an arbitrary plane parallel to the y-axis and / 1lQi;
The first microscopic mirror is provided with calculation command means for calculating tilt angle adjustment amounts such that the respective distances are equal based on the distances measured by the distance measuring means, and transmitting a tilt angle adjustment command to the tilt angle adjusting means. This is a sample stage for use in the inspection, and by focusing at any one point before inspection, it is possible to eliminate the need for focusing at subsequent inspection points.

DESCRIPTION OF EMBODIMENTS FIG. 2 shows a microscope sample stage in a first embodiment of the present invention. In FIG. 2, 20 is a calculation command circuit as a calculation command means, 29.24 is a pulse motor and its driver for rotating the sample stage 35 β around the y-axis, and 30.25 is a tilt angle adjustment means. 32. 27 is a pulse motor and its driver as a means for moving in the y-axis direction; 3+28 is a means for adjusting the tilt angle, and A pulse motor and its driver rotate the table 35 by α; 34 is a sample whose surface is almost flat; 36 is a microscope; and 37 is an optical length measuring device as a means for measuring distance in two axial directions on the sample surface 1. .Point B,
C and D are arbitrary three points on the sample surface, point E is α rotation and β
It is the center of rotation.

The operation of the microscope sample stage of this embodiment constructed as described above will be described below.

When inspecting the sample 34, the calculation command circuit 20 directs the pulse motor drivers 25 and 27 for X-axis movement and y-axis movement so that point B is below the optical length measuring device 37 in the two-axis direction. Send a movement command like this. After the sample stage 35 has completed its movement, the optical length measuring device 37 measures the distance at point B-4 according to the calculation command circuit 200 command, and sends the measured value Bzi to the calculation command circuit 20. The calculation command circuit 20 calculates the position coordinates of point B (bL + b y ) with respect to Bz and point E.
Record it. bxdPosition coordinate in the X-axis direction, by is y
Represents the position coordinates in the axial direction.

Next, the calculation command circuit 20 performs the same operation for the point C1, Cz, DZ+ (cr, C, / ), (d, 2:).

dy).

-Bz, Cz, Dz, (bx +b
y )+ (c-c+ cy)+ (a, 2:+ a
y), the calculation command circuit 2o determines that the surface of the sample 34 is
The amount of α rotation and the amount of β rotation that are parallel to the y-axis and /+ll+ are calculated, and rotation commands are output to the α rotation and β rotation pulse motor drivers. And the sample surface is y
After paralleling the axes and the y-axes, focusing is performed on one point on the sample surface.

Therefore, there is no need to focus on subsequent inspection points, and inspection time is shortened.

FIG. 3 shows a microscope sample stage in a second embodiment of the present invention. In Figure 3, 21,2
2.23 is a fixed distance detection means, 22.23 is
It is made of a conductor and is normally in contact, and is a switch in which the conductors 22 and 23 are separated when the tip of 22 is moved in two axial directions. 31.26 is a pulse motor and its driver as a z-axis direction moving means. The rest is the same as the second embodiment.

The operation of the microscope sample stage of this embodiment constructed as described above will be described below. When inspecting the sample 34, the calculation command circuit 20 moves the pulse motor drivers 26 and 27 for movement in the X-axis direction and the Y-axis direction so that point B is a certain distance below the tip of the detection circuit 22 in the two-axis direction. Send a movement command so that After the sample stage 35 has completed its movement, the calculation command circuit 20 outputs a movement command to the pulse motor driver 31 for moving the sample 34 in the z-axis direction, and
Move in the axial direction. When the tip of 22 of the constant distance detection circuit contacts point B and 22 is pushed in the Z-axis direction, 22 and 23
21 outputs a signal indicating that a certain distance has been detected to the calculation command circuit 20. Upon receiving this signal, the calculation command circuit 20 stops the Z-axis direction movement command, and records the amount of movement Bz in the two-axis direction at that time and the position coordinates (bx+by) of point B with respect to point E. .

The same procedure is performed sequentially for the point C2, and Cz+Dz(C,
Record I + c, / ) + (a,, la, 7).

Bz + Cz l Dz l (bl
+by L (c, z + cy)+ ((Lz+
dy), the calculation command circuit 2o determines that the surface of the sample 34 is
The amount of α rotation and the amount of β rotation parallel to the y-axis and the y-axis are calculated, and driver rotation commands for the α-rotation and β-rotation pulse motors are output. Then, the sample surface is set on the y-axis and y-axis.
After aligning the specimen parallel to the axis, one point on the sample surface is focused. This embodiment has a simple configuration by using a type of switch as the fixed distance detection means.

Effects of the Invention The microscope sample stage of the present invention makes it possible to focus on any one inspection point before inspection by making the surface of the sample parallel to the plane determined by the y-axis and the y-axis direction of the moving stage. This eliminates the need for focusing at subsequent inspection points, shortens inspection time, and eliminates the need for complicated automatic focusing means, which has great practical effects.

[Brief explanation of the drawing]

Fig. 1 is a principle diagram showing the structure of a microscope sample stage in a conventional example, Fig. 2 is a principle diagram showing the structure of a microscope sample stage in an embodiment of the present invention, and Fig. 3 is the same example. It is a principle diagram of a sample stage for a microscope in an example. 20... Arithmetic command circuit, 24, 25, 27.2
8... Dry nozzle for pulse motor, 37.
...Optical length measuring device, 21, 22.23...
- Constant distance detection means, 29. 30. 31. 32.
33 ・・・・・・ノ;Rusmoku, 34・・・・・・
...Sample, 36...Sample stand, 36...
Microscope, points B, C, D... Three arbitrary points on the sample surface, point T... Center of α rotation and β rotation. Name of agent: Patent attorney Toshio Nakao and 1 other person 1st
Figure 2

Claims (3)

[Claims] (1) An X-axis direction moving means and a y-axis direction moving means for the three directions of the X-axis, y-axis, and z-axis that are orthogonal to each other. and a sample stage on which a sample is placed, which has tilt angle adjustment means with respect to a plane determined by the X-axis and y#IVc, and whose surface is a concave plane. a distance measuring means for measuring the distance in two axial directions to an arbitrary plane parallel to the y-axis, and calculating an amount of tilt angle adjustment from the distances measured by the distance measuring means so that the respective distances are equal; Tilt angle adjustment means;
A sample stage for a microscope, comprising an X-axis direction moving means and a calculation command means for sending a command to the Y-axis direction moving means. (2) As a second distance measuring means, set a fixed point in a space in two axial directions away from the surface of the sample, and sequentially measure any three or more points on the surface of the sample in the two axial directions of the fixed point. downwardly moved by the X-axis direction moving means and the M-axis moving means,
2. The microscope sample stage according to claim 1, wherein the distance in two axial directions from the fixed point to the sample surface is measured by one distance measuring means. (3) As a distance measuring means, a constant distance detection means detects when the distance in two axes between the sample surface on the sample stage equipped with a two-axis moving means and the fixed point becomes constant. 3. The microscope sample stage according to claim 2, wherein the required movement distance in two axial directions is calculated to obtain the distance.