JPS60103837U - 半導体ウエフア用カセツト - Google Patents

半導体ウエフア用カセツト

Info

Publication number
JPS60103837U
JPS60103837U JP8237681U JP8237681U JPS60103837U JP S60103837 U JPS60103837 U JP S60103837U JP 8237681 U JP8237681 U JP 8237681U JP 8237681 U JP8237681 U JP 8237681U JP S60103837 U JPS60103837 U JP S60103837U
Authority
JP
Japan
Prior art keywords
cassette
insertion grooves
stopper
semiconductor wafer
semiconductor wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8237681U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6127179Y2 (enExample
Inventor
松宮　律夫
大沢　光明
Original Assignee
エム・セテツク株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エム・セテツク株式会社 filed Critical エム・セテツク株式会社
Priority to JP8237681U priority Critical patent/JPS60103837U/ja
Publication of JPS60103837U publication Critical patent/JPS60103837U/ja
Application granted granted Critical
Publication of JPS6127179Y2 publication Critical patent/JPS6127179Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Packaging For Recording Disks (AREA)
JP8237681U 1981-06-04 1981-06-04 半導体ウエフア用カセツト Granted JPS60103837U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8237681U JPS60103837U (ja) 1981-06-04 1981-06-04 半導体ウエフア用カセツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8237681U JPS60103837U (ja) 1981-06-04 1981-06-04 半導体ウエフア用カセツト

Publications (2)

Publication Number Publication Date
JPS60103837U true JPS60103837U (ja) 1985-07-15
JPS6127179Y2 JPS6127179Y2 (enExample) 1986-08-13

Family

ID=30212326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8237681U Granted JPS60103837U (ja) 1981-06-04 1981-06-04 半導体ウエフア用カセツト

Country Status (1)

Country Link
JP (1) JPS60103837U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49149669U (enExample) * 1973-04-26 1974-12-25
JPS5598822A (en) * 1979-01-24 1980-07-28 Hitachi Ltd Wafer holding jig

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49149669U (enExample) * 1973-04-26 1974-12-25
JPS5598822A (en) * 1979-01-24 1980-07-28 Hitachi Ltd Wafer holding jig

Also Published As

Publication number Publication date
JPS6127179Y2 (enExample) 1986-08-13

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