JPS60101930A - 半導体への不純物拡散方法 - Google Patents

半導体への不純物拡散方法

Info

Publication number
JPS60101930A
JPS60101930A JP58209314A JP20931483A JPS60101930A JP S60101930 A JPS60101930 A JP S60101930A JP 58209314 A JP58209314 A JP 58209314A JP 20931483 A JP20931483 A JP 20931483A JP S60101930 A JPS60101930 A JP S60101930A
Authority
JP
Japan
Prior art keywords
film
diffusion
semiconductor
impurity
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58209314A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527243B2 (en:Method
Inventor
Eiji Nagasawa
長澤　英二
Hidekazu Okabayashi
岡林　秀和
Mitsutaka Morimoto
光孝 森本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP58209314A priority Critical patent/JPS60101930A/ja
Publication of JPS60101930A publication Critical patent/JPS60101930A/ja
Publication of JPH0527243B2 publication Critical patent/JPH0527243B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P32/1414—
    • H10P32/171—

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP58209314A 1983-11-08 1983-11-08 半導体への不純物拡散方法 Granted JPS60101930A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58209314A JPS60101930A (ja) 1983-11-08 1983-11-08 半導体への不純物拡散方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58209314A JPS60101930A (ja) 1983-11-08 1983-11-08 半導体への不純物拡散方法

Publications (2)

Publication Number Publication Date
JPS60101930A true JPS60101930A (ja) 1985-06-06
JPH0527243B2 JPH0527243B2 (en:Method) 1993-04-20

Family

ID=16570899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58209314A Granted JPS60101930A (ja) 1983-11-08 1983-11-08 半導体への不純物拡散方法

Country Status (1)

Country Link
JP (1) JPS60101930A (en:Method)

Also Published As

Publication number Publication date
JPH0527243B2 (en:Method) 1993-04-20

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