JPS60101852A - 荷電粒子エネルギ−分析装置 - Google Patents

荷電粒子エネルギ−分析装置

Info

Publication number
JPS60101852A
JPS60101852A JP58209706A JP20970683A JPS60101852A JP S60101852 A JPS60101852 A JP S60101852A JP 58209706 A JP58209706 A JP 58209706A JP 20970683 A JP20970683 A JP 20970683A JP S60101852 A JPS60101852 A JP S60101852A
Authority
JP
Japan
Prior art keywords
low
charged particle
filter
grid
particle energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58209706A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0479103B2 (en, 2012
Inventor
Hiroshi Yamauchi
洋 山内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP58209706A priority Critical patent/JPS60101852A/ja
Publication of JPS60101852A publication Critical patent/JPS60101852A/ja
Publication of JPH0479103B2 publication Critical patent/JPH0479103B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP58209706A 1983-11-07 1983-11-07 荷電粒子エネルギ−分析装置 Granted JPS60101852A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58209706A JPS60101852A (ja) 1983-11-07 1983-11-07 荷電粒子エネルギ−分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58209706A JPS60101852A (ja) 1983-11-07 1983-11-07 荷電粒子エネルギ−分析装置

Publications (2)

Publication Number Publication Date
JPS60101852A true JPS60101852A (ja) 1985-06-05
JPH0479103B2 JPH0479103B2 (en, 2012) 1992-12-15

Family

ID=16577287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58209706A Granted JPS60101852A (ja) 1983-11-07 1983-11-07 荷電粒子エネルギ−分析装置

Country Status (1)

Country Link
JP (1) JPS60101852A (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7141800B2 (en) * 2003-07-11 2006-11-28 Charles E. Bryson, III Non-dispersive charged particle energy analyzer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7141800B2 (en) * 2003-07-11 2006-11-28 Charles E. Bryson, III Non-dispersive charged particle energy analyzer

Also Published As

Publication number Publication date
JPH0479103B2 (en, 2012) 1992-12-15

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