JPS5999242A - 感ガス素子の製造方法 - Google Patents

感ガス素子の製造方法

Info

Publication number
JPS5999242A
JPS5999242A JP20770482A JP20770482A JPS5999242A JP S5999242 A JPS5999242 A JP S5999242A JP 20770482 A JP20770482 A JP 20770482A JP 20770482 A JP20770482 A JP 20770482A JP S5999242 A JPS5999242 A JP S5999242A
Authority
JP
Japan
Prior art keywords
gas
catalyst layer
sensitive
sensitive element
org
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20770482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6152423B2 (enExample
Inventor
Masayuki Shiratori
白鳥　昌之
Masaki Katsura
桂　正樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP20770482A priority Critical patent/JPS5999242A/ja
Publication of JPS5999242A publication Critical patent/JPS5999242A/ja
Publication of JPS6152423B2 publication Critical patent/JPS6152423B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP20770482A 1982-11-29 1982-11-29 感ガス素子の製造方法 Granted JPS5999242A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20770482A JPS5999242A (ja) 1982-11-29 1982-11-29 感ガス素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20770482A JPS5999242A (ja) 1982-11-29 1982-11-29 感ガス素子の製造方法

Publications (2)

Publication Number Publication Date
JPS5999242A true JPS5999242A (ja) 1984-06-07
JPS6152423B2 JPS6152423B2 (enExample) 1986-11-13

Family

ID=16544180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20770482A Granted JPS5999242A (ja) 1982-11-29 1982-11-29 感ガス素子の製造方法

Country Status (1)

Country Link
JP (1) JPS5999242A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09269306A (ja) * 1996-04-02 1997-10-14 New Cosmos Electric Corp 熱線型半導体式ガス検知素子及びガス検知装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09269306A (ja) * 1996-04-02 1997-10-14 New Cosmos Electric Corp 熱線型半導体式ガス検知素子及びガス検知装置

Also Published As

Publication number Publication date
JPS6152423B2 (enExample) 1986-11-13

Similar Documents

Publication Publication Date Title
US5813764A (en) Catalytic differential calorimetric gas sensor
JP2829416B2 (ja) 感ガス素子
US4504522A (en) Method of making a titanium dioxide oxygen sensor element by chemical vapor deposition
JP2542643B2 (ja) センサの製造方法
EP0722565A1 (en) A catalytic gas sensor
JPH0769285B2 (ja) 高い応答速度を有する抵抗式ガスセンサ用半導体
JPS5999242A (ja) 感ガス素子の製造方法
JPH0623710B2 (ja) ＮＯｘガス検知素子
DE69601930T2 (de) Katalytisches Gassensorelement
KR890000390B1 (ko) 가스 검지소자(檢知素子)
Kim et al. Fabrication of Au-In 2 O 3 Thin/Thick-Film Gas Sensors and Their Sensing Characteristics for Toxic Gases
Garje et al. Effect of firing temperature on electrical and gas‐sensing properties of nano‐SnO2‐based thick‐film resistors
JPS6366448A (ja) 酸素ガス検出器
US5969232A (en) Catalytic layer system
JPH0531104B2 (enExample)
JPH0676980B2 (ja) ＮＯｘガス検知素子
JP2922264B2 (ja) ガスセンサ
JPH04269650A (ja) 酸化物半導体ガスセンサ
JPS607352A (ja) 感ガス素子
JPH06148112A (ja) 水素ガス検知素子
JPH0315976B2 (enExample)
JP2000055854A (ja) ガスセンサ
JP2002055073A (ja) ガスセンサ
JPH051419B2 (enExample)
JPH0252247A (ja) ガスセンサ