JPS5998300U - light irradiation furnace - Google Patents

light irradiation furnace

Info

Publication number
JPS5998300U
JPS5998300U JP19401782U JP19401782U JPS5998300U JP S5998300 U JPS5998300 U JP S5998300U JP 19401782 U JP19401782 U JP 19401782U JP 19401782 U JP19401782 U JP 19401782U JP S5998300 U JPS5998300 U JP S5998300U
Authority
JP
Japan
Prior art keywords
light irradiation
workpiece
irradiation furnace
heater
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19401782U
Other languages
Japanese (ja)
Other versions
JPH0240480Y2 (en
Inventor
立躬 平本
芳樹 三村
荒井　徹治
洋 清水
悟 福田
Original Assignee
ウシオ電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ウシオ電機株式会社 filed Critical ウシオ電機株式会社
Priority to JP19401782U priority Critical patent/JPS5998300U/en
Publication of JPS5998300U publication Critical patent/JPS5998300U/en
Application granted granted Critical
Publication of JPH0240480Y2 publication Critical patent/JPH0240480Y2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案実施例の断面図、第２図は特性曲線図、
第゛３図は他の実施例の要部断面図である。 １・・・炉体、３・・・加熱器、５・・・被処理物（ウ
ェハー）、６・・・フィルター、Ａ・・・透過率、Ｂ・
・・照射熱エネルギー密度、Ｃ・・・表面温度。Fig. 1 is a sectional view of the embodiment of the present invention, Fig. 2 is a characteristic curve diagram,
FIG. 3 is a sectional view of a main part of another embodiment. DESCRIPTION OF SYMBOLS 1... Furnace body, 3... Heater, 5... Processing object (wafer), 6... Filter, A... Transmittance, B...
...Irradiation thermal energy density, C...Surface temperature.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 被処理物を光照射て加熱する加熱器と、加熱器と被処理
物間に介在されるフィルターとを備え、このフィルター
により被処理物の中心部の受ける熱エネルギー密度を変
化させ、被処理物の表面温度を実質上均一とすることを
特徴とする光照射炉。It is equipped with a heater that heats the workpiece by irradiating it with light, and a filter interposed between the heater and the workpiece.The filter changes the thermal energy density received at the center of the workpiece, A light irradiation furnace characterized by making the surface temperature substantially uniform.
JP19401782U 1982-12-23 1982-12-23 light irradiation furnace Granted JPS5998300U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19401782U JPS5998300U (en) 1982-12-23 1982-12-23 light irradiation furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19401782U JPS5998300U (en) 1982-12-23 1982-12-23 light irradiation furnace

Publications (2)

Publication Number Publication Date
JPS5998300U true JPS5998300U (en) 1984-07-03
JPH0240480Y2 JPH0240480Y2 (en) 1990-10-29

Family

ID=30417147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19401782U Granted JPS5998300U (en) 1982-12-23 1982-12-23 light irradiation furnace

Country Status (1)

Country Link
JP (1) JPS5998300U (en)

Also Published As

Publication number Publication date
JPH0240480Y2 (en) 1990-10-29

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