JPS59161636U - Light irradiation furnace workpiece moving device - Google Patents

Light irradiation furnace workpiece moving device

Info

Publication number
JPS59161636U
JPS59161636U JP3750783U JP3750783U JPS59161636U JP S59161636 U JPS59161636 U JP S59161636U JP 3750783 U JP3750783 U JP 3750783U JP 3750783 U JP3750783 U JP 3750783U JP S59161636 U JPS59161636 U JP S59161636U
Authority
JP
Japan
Prior art keywords
moving device
light irradiation
workpiece moving
irradiation furnace
furnace workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3750783U
Other languages
Japanese (ja)
Inventor
荒井　徹治
芳樹 三村
Original Assignee
ウシオ電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ウシオ電機株式会社 filed Critical ウシオ電機株式会社
Priority to JP3750783U priority Critical patent/JPS59161636U/en
Publication of JPS59161636U publication Critical patent/JPS59161636U/en
Pending legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
  • Furnace Charging Or Discharging (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は一部断面平面図、第２図は一部断面正面図、第
３図は移動器の斜視図、第４図は同じく断面図をそれぞ
れ示す。 １・・・炉体、３・・・加熱器、４・・・石英容器、５
・・・被処理物（ウェハー）、６・・・被処理物移動器
、７・・・中空部材、８・・・支持部材、９・・・透孔
。FIG. 1 is a partially sectional plan view, FIG. 2 is a partially sectional front view, FIG. 3 is a perspective view of the moving device, and FIG. 4 is a sectional view. 1... Furnace body, 3... Heater, 4... Quartz container, 5
... Processed object (wafer), 6... Processed object moving device, 7... Hollow member, 8... Support member, 9... Through hole.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 光照射て加熱する光照射炉内に被処理物を支持して出し
入れさせる被処理物移動器であって、支持部材の周縁に
、透孔が設けられた中空部材を連設し、該透孔より炉内
雰囲気コントロール用のガスを流出可能とした光照射炉
の被処理物移動器。A workpiece moving device that supports and takes a workpiece into and out of a light irradiation furnace that heats by irradiating light, in which a hollow member provided with a through hole is connected to the periphery of a supporting member, and the through hole is connected to the support member. A workpiece moving device for a light irradiation furnace that allows gas to flow out for better control of the furnace atmosphere.
JP3750783U 1983-03-17 1983-03-17 Light irradiation furnace workpiece moving device Pending JPS59161636U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3750783U JPS59161636U (en) 1983-03-17 1983-03-17 Light irradiation furnace workpiece moving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3750783U JPS59161636U (en) 1983-03-17 1983-03-17 Light irradiation furnace workpiece moving device

Publications (1)

Publication Number Publication Date
JPS59161636U true JPS59161636U (en) 1984-10-29

Family

ID=30168193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3750783U Pending JPS59161636U (en) 1983-03-17 1983-03-17 Light irradiation furnace workpiece moving device

Country Status (1)

Country Link
JP (1) JPS59161636U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017150056A (en) * 2016-02-26 2017-08-31 株式会社三井ハイテック Tray and heat treatment method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57147237A (en) * 1981-03-06 1982-09-11 Sony Corp Heat treatment device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57147237A (en) * 1981-03-06 1982-09-11 Sony Corp Heat treatment device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017150056A (en) * 2016-02-26 2017-08-31 株式会社三井ハイテック Tray and heat treatment method

Similar Documents

Publication Publication Date Title
JPS59161636U (en) Light irradiation furnace workpiece moving device
JPS6322733U (en)
JPS59100826U (en) Glass tube stem forming device
JPS63147812U (en)
JPS6089861U (en) superior device
JPS60172759U (en) Partial hardening equipment
JPS6111773U (en) diffusion furnace
JPS5998300U (en) light irradiation furnace
JPH01171296U (en)
JPH0248036U (en)
JPS6331369U (en)
JPS62142587U (en)
JPS606432U (en) wagon
JPS6424825U (en)
JPS59164574U (en) Hot water bottle warmer
JPS6017230U (en) Adsorption device with heating blow valve
JPS58182305U (en) candle burning appliances
JPS62199745U (en)
JPH01142418U (en)
JPS5989071U (en) Plant container with built-in support
JPH0221651U (en)
JPS6034272U (en) Tableware support for standing eating
JPS59151146U (en) Sample container cleaning device
JPS6146733U (en) Heat treatment equipment for semiconductors
JPS5939937U (en) Semiconductor wafer support stand